万兆以太网时钟产生电路设计

给出了基于 0 .2 um Ga As PHEMT工艺的 10 GHz单片频率综合器的系统模型、电路结构、性能分析、版图设计以及仿真结果 ,并简单介绍了工艺特点。整个芯片由压控振荡器、分频器、鉴相器以及低通滤波器组成。在 ADS软件下的仿真结果表明 :芯片采用 3 .3 V单电源供电 ,总功耗为 40 0 m W,输出功率为 -15 d Bm,工作频率 9.5 GHz～ 11.0 GHz,相位噪声 -95 d Bc/Hz@1MHz,输出信号的峰峰值抖动约为 2 ps。整个芯片面积为 1.2 5× 1.3 5 mm2 ,适合作为万兆以太网的时钟产生电路     

7.3GHz 0.18μm CMOS注入式锁相环电路

给出一种利用0 .18μm CMOS工艺实现的注入式振荡器辅助锁相环.在1.8V电源电压下,电路工作频率为7.3GHz,功耗为15 7m W,跟踪范围为15 0 MHz,锁定时在1‰(7.3MHz)频率偏移量下的相位噪声为- 97.36 d Bc/Hz     

基于电感电容振荡器的电荷泵锁相环的设计

设计并实现了一种采用电感电容振荡器的电荷泵锁相环,分析了锁相环中鉴频/鉴相器(PFD)、电荷泵(CP)、环路滤波器(LP)、电感电容压控振荡器(VCO)的电路结构和设计考虑。锁相环芯片采用0.13μm MS&RF CMOS工艺制造。测试结果表明,锁相环锁定的频率为5.6～6.9 GHz。在6.25 GHz时,参考杂散为-51.57 dBc;1 MHz频偏处相位噪声为-98.35 dBc/Hz;10 MHz频偏处相位噪声为-120.3 dBc/Hz;在1.2 V/3.3 V电源电压下,锁相环的功耗为51.6 mW。芯片总面积为1.334 mm2。     

2.125～3.125GHz高速CMOS锁相环电路设计

针对数模混合结构的电荷泵锁相环电路,建立了系统的数学模型,确定了电荷泵锁相环的系统参数,提出一种能够有效消除时钟馈通、电荷注入等非理想特性影响,并具有良好电流匹配特性的电荷泵电路,以及一种中心频率可调的压控振荡器电路。电路采用SMIC 0.18μm CMOS工艺模型,使用Spectre进行仿真。结果显示,整个锁相环系统的功耗约为40 mW,输出时钟信号峰-峰值抖动为21 ps@2.5 GHz,单边带相位噪声在5 MHz频偏处为-105 dBc/Hz。     

2～6GHz单片功率放大器

报道了有耗匹配宽带单片功率放大器的研究方法和结果。该两级单片功放电路采用自建的 Root非线性模型进行了谐波平衡分析。在 2 .0～ 6.7GHz频带上线性增益为 17d B,平坦度为± 0 .75d B,输入和输出驻波分别小于 2。全频带上 ,饱和输出功率为 1～ 1.4 W,功率附加效率大于2 0 %。该宽带单片功率放大器在 76mm Ga As单片 MMIC工艺线上用全离子注入、0 .5μm栅长工艺研制完成 ,电路芯片面积为 0 .1mm× 2 .6mm× 2 .7mm。     

一个简单鉴频鉴相器结构实现的快速锁定低抖动锁相环

用简单的鉴频鉴相器结构实现了一个快锁定低抖动的锁相环.鉴频鉴相器仅仅由两个异或门组成,它可以同时获得低抖动和快锁定的性能.锁相环中的电压控制振荡器由四级环形振荡器来实现,每级单元电路工作在相同的频率,并提供45°的相移.芯片用0.18μm CMOS工艺来实现.PLL输出的中心频率为5GHz,在偏离中心频率500kHz处,测量的相位噪声为-102.6dBc/Hz.锁相环的捕获范围为280MHz,RMS抖动为2.06ps.电源电压为1.8V时,功耗仅为21.6mW(不包括输出缓冲).     

一个简单鉴频鉴相器结构实现的快速锁定低抖动锁相环

用简单的鉴频鉴相器结构实现了一个快锁定低抖动的锁相环.鉴频鉴相器仅仅由两个异或门组成,它可以同时获得低抖动和快锁定的性能.锁相环中的电压控制振荡器由四级环形振荡器来实现,每级单元电路工作在相同的频率,并提供45°的相移.芯片用0.18μm CMOS工艺来实现.PLL输出的中心频率为5GHz,在偏离中心频率500kHz处,测量的相位噪声为-102.6dBc/Hz.锁相环的捕获范围为280MHz,RMS抖动为2.06ps.电源电压为1.8V时,功耗仅为21.6mW(不包括输出缓冲).     

一种低抖动电荷泵锁相环频率合成器

设计一种低抖动电荷泵锁相环频率合成器,输出频率为400 MHz~1 GHz。电路采用电流型电荷泵自举结构消除电荷共享效应,同时实现可编程多种输出电流值。通过具体的频率范围来选择使用的VCO,获得更小的锁相环相位抖动。电路采用0.13μm 1.2 V CMOS工艺,芯片面积为0.6 mm×0.5 mm。Hsim后仿真结果显示当输出频率为1 GHz时,锁相环频率合成器的锁定时间为4.5μs,功耗为19.6 mW,最大周对周抖动为11 ps。     

基于012μm GaAs PHEMT 工艺的压控振荡器IC 设计

摘要:给出了一个采用012μm GaAs PHEMT工艺设计的全集成差分负阻式LC 压控振荡器电路,芯片面积为0152 × 017 mm2 。采用313 V 正电源供电,测得输出功率约- 11122 dBm ,频率调节范围61058 GHz～91347 GHz ;在自由振荡 频率712 GHz 处,测得的单边带相位噪声约为- 82 dBc/ Hz @100 kHz.     

SDH系统STM-16速率级CMOS注入同步环形振荡器

基于 0 .2 5 μm CMOS工艺 ,通过在环形振荡器的基础上引入注入同步技术 ,实现了一种新颖的应用于 SDH系统 STM- 1 6速率级的注入同步振荡器 .测试结果表明 ,该振荡器中心频率为 2 .4 88GHz,具有 1 5 0 MHz的电压调谐范围 ,相位噪声为 - 1 0 0 d Bc/ Hz@1 MHz.当注入峰峰值为 5 0 m V的信号时 ,相位噪声为 - 91 .7d Bc/ Hz@1 0 k Hz,并具有 1 0 0 MHz的锁定范围 .应用这种注入同步振荡器于时钟恢复电路的高 Q值锁相环时 ,可以解决窄锁定范围的问题 ,而无需另加复杂的锁频环     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.