基于低压CMOS工艺的新型负电压型电荷泵电路

采用UMC 0.18 μm 1.8 V/3.3 V CMOS工艺设计并流片验证了一个应用于生医刺激器的新型负电压型电荷泵电路.介绍了几种典型的负电压型电荷泵电路,比较其优缺点,在此基础上设计了一个新型4级交叉耦合型负电压电荷泵.和现有的结构相比,该电路在启动过程和工作过程中都不存在过压问题,器件任意两端口之间的电压均小于电源电压VDD,同时降低了MOS器件衬底效应、反向漏电流对电荷泵效率的影响.电荷泵的电容采用MIM电容,升压电容为50 pF,输出电容为100 pF.芯片面积为2.3 mm×1.3 mm,测试结果表明负电压型电荷泵电路输出电压为-10.3 V,系统最高效率为56％.当输出电流为3.5 mA时,输出电容为100 pF时,纹波电压为150 mV.     

采用有限状态机控制的升降压双通路高效率电荷泵

针对诸如系统芯片中模拟和数字模块需工作在不同电源电压下的要求,提出一种可同时提供双路输出且具有多种增益模式的电荷泵,它仅利用一组开关电容阵列,根据输入电压与负载电流的变化自动为双通路选择合适的增益对,从而在提供稳定的输出电压同时使电荷泵具有较高的转换效率。专门引入增益跳变技术,改善了增益过渡的平滑性,进一步提高了转换效率。整个调制过程采用数字状态机控制,电路结构简单,响应速度快。芯片采用TSMC 0.35μm混合信号CMOS工艺设计并制造,仿真与测试结果显示设计目标均已实现,能够同时提供稳定的1.8 V和5.0 V的双路输出,动态响应迅速,转换效率比传统多增益模式电荷泵提高了10%以上。     

一种用于Flash的新型电荷泵调节技术

在Flash、带电可擦可编程只读存储器(EEROM)等存储器中,电荷泵电路是用于提供编程、擦除和读取高压的重要模块。电荷泵调节电路用于输出稳定的电压和电流。文章提出了一种新型Flash电荷泵调节电路,以解决传统电路在轻负载时纹波过大而难以适用多位Flash的问题。其电路结构特征是对传统频率调节电路增加了时钟幅度调节模块,使得在电流轻载时电荷泵在较小的时钟幅度下工作,而在电流重载时切换到最大时钟幅度,并且通过锁存控制电路避免临界负载时的时钟幅度反复改变。基于XMC 65 nm浮栅工艺的Cadence Spectre仿真表明,该电荷泵调节技术能够在轻载和重载两个状态下都保持40 mV的纹波电压,有效减少了轻载情况下Flash电荷泵输出纹波。     

一种用于AMOLED驱动的多模式高效电荷泵

设计了一种用于AMOLED驱动芯片的多模式高效低纹波电荷泵。该电荷泵通过模式选择,使输出电压可配置,实现多模式功能。针对电压建立和模式切换过程中电荷损耗的问题,利用初始化电路和电压检测电路来保证电荷泵中电荷单向传输,同时利用衬底选择开关来解决电荷泵的体效应问题,提高了电压转换效率。采用双边对称的泵电路结构,减小了输出电压纹波。采用UMC 80 nm CMOS工艺进行仿真。结果表明,负载电流为4 mA时,输出电压为8.4~17 V,四种工作模式下电压转换效率均在90%以上,电压纹波均小于1 mV。     

双模式高集成负电荷泵电路设计

提出了一种新颖的双模式高集成开关电容电荷泵。该电荷泵集成高频振荡器、电平移位、逻辑驱动以及4个功率MOSFET开关。与传统电荷泵相比,该电路可以工作在单电源以及双电源两种模式。单电源模式下,输出电压为-VCC;双电源模式下,输出电压为-3×VCC。电路采用0.35μm BCD工艺实现。测试结果表明:室温时,单电源模式和双电源模式下电荷泵输出电流分别为36 mA和80 mA时输出电压分别为-3.07 V和-12.10 V。在-55℃到125℃温度范围内,单电源模式和双电源模式下电荷泵输出电流分别为24 mA和50 mA时输出电压分别低于-3.06 V和-12.35 V。该电荷泵在两种模式下工作特性良好,已应用于相关工程项目。     

一种用于H桥功率驱动电路的电荷泵设计

提出了一种可驱动H桥功率电路的电荷泵.为了简化电路设计和确保电路稳定性,本电荷泵采用两倍压电荷泵电路拓扑结构,通过加入两路反馈控制电路来提高电荷泵充电电流和输出电压值的控制精度以及电源转换效率.设计采用0.35μm BCD工艺,通过Cadence Spectre仿真器表明,在负载电流为5mA条件下,电荷泵正常工作时输出电压范围广(10~40V),电源转换效率最高达到91%,输出电压建立所需时间为579μs.样片实测结果显示,在不同输入电压条件下,输出电压纹波控制在385mV以下.     

用于相变存储器的超低输出纹波2X/1.5X电荷泵

本文针对相变存储器编程驱动电路,提出了一种超低输出电压纹波的开关电容型电荷泵。该电荷泵可根据输入电压的不同,自适应工作在2X/1.5X升压模式之间,以获得更高的电源转换效率。相比于传统开关电容型电荷泵,在充电阶段泵电容被充电至预先设定的电压值Vo-VDD(Vo为预期的输出电压);放电阶段,泵电容串联在输入电压VDD与输出端,通过此方法将电荷泵输出端电压稳定在Vo,并有效的降低了由于电荷分享所造成的输出纹波。在中芯国际40nm标准CMOS工艺模型下,对电路进行了仿真验证,结果表明在输入电压为1.6-2.1V,输出2.5V电压,最大负载电流为10mA,输出电压纹波低于4mV,电源效率最高可达91%。     

一种高速低过冲电荷泵电路的设计

为了有效降低传统电荷泵电路的充放电过冲电流,提高电荷泵输出控制电压的稳定性,提出、设计并实现了一种高速低过冲的电荷泵结构,该电路适用于高速锁相环及时钟数据恢复电路.电路在电源电压为1.2 V的0.13 μm CMOS工艺下设计实现,并对版图数据进行了HSPICE模拟,其结果表明,电路在2.5 GHz的速度下能很好的工作,同时电流过冲相比传统电荷泵下降了70%.     

基于常数跨导轨到轨运算放大器的新型电荷泵

针对传统电荷泵电荷共享引起的输出电压波动、充放电电流失配引起的电路杂波问题,设计了一种新型电荷泵。该电荷泵电路采用常数跨导轨到轨运算放大器,降低了电荷共享引起的输出电压波动;采用基于全差分放大器的负反馈结构,解决了充放电电流失配的问题。基于SMIC 0.18 μm CMOS工艺,利用Cadence软件完成了电路的设计与仿真。结果表明,在0.5～1.5 V输出电压范围内,该电荷泵充放电电流失配小于2%;与传统电荷泵相比,该电荷泵输出电压的波动减小了1.5 mV,并且采用该电荷泵的锁相环输出频谱噪声减小了10 dB。     

一种全集成高效率多通道神经电刺激电路

设计了一种超低待机功耗、高效率的16通道高压神经电刺激集成电路(IC)。该电路主要包括1个基于串-并联电荷泵的高压产生模块，以及1个16路独立配置的通道输出驱动电路模块。高压产生模块将输入的1.65 V低压域电压转换为高压域电压6.6、9.9、13.2 V;通道输出驱动电路根据设定的刺激电流和电极负载情况动态选择合适的高压域电压以提高电刺激效率。经测试，在1.65 V输入电压和3.3 V电源电压下，该电路待机时静态功耗约为7.6 nW,由待机至电刺激电路工作切换时间小于36 ns,电荷泵输出最大电压可达12.7 V,约为电源电压的4倍，通道控制电路能输出最高1 mA的刺激电流。与传统的固定电源电压电刺激电路相比，消耗的能量最高减少了76.9%。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.