BF2^＋注入多晶硅栅的SIMS分析

文本采用ＳＩＭＳ技术，分析了ＢＦ２＾＋注入多晶硅栅退火前后Ｆ原子在多晶硅和ＳｉＯ２中的迁移特性，结果表明，８０ｋｅＶ，２×１０＾１５和５×１０＾１５ｃｍ＾－２ＢＦ２＾＋注入多晶硅栅经过９００℃，ｍｉｎ退火后，部分Ｆ原子已扩散到ＳｉＯ２中，Ｆ在多晶硅和ＳｉＯ２中的迁移行为呈现不规则的特性，这归因于损伤缺陷和键缺陷对Ｆ原子的富集作用。     

离子注入半绝缘GaAs电激活效率与电激活均匀性的研究

研究了Ｓｉ＾＋和Ｓｉ＾＋／Ａｓ＾＋注入到Ｈｏｒｉｚｏｎｔａｌ Ｂｒｉｄｇｍａｎ（ＨＢ）和Ｌｉｑｕｉｄ Ｅｎｃａｐｓｕｌａｔｅｄ Ｃｚｏｃｈｒａｌｓｋｉ（ＬＥＣ）方法制备的半绝缘ＧａＡｓ衬底电激活效率与均匀性。结果发现：在相同条件下（注入与退火）,不同生长方法的半绝缘ＧａＡｓ衬底电激活不同,通常电激活ＨＢ〉ＬＥＣ,ＨＢ ＳＩ－－ＧａＡｓ（Ｃｒ）（１００）Ａ面〉（１００）Ｂ面,Ｓｉ＾＋／Ａｓ＾＋双离子     

激光制备多层薄膜及铁电性能的研究

利用脉冲准分子激光淀积（ＰＬＤ）方法，在Ｓｉ基片上制备了ＢＩＴ／Ｓｉ〔１００〕、ＰＺＴ／ＢＩＴ／Ｓｉ〔１００〕和ＢＩＴ／ＰＺＴ／ＢＩＴ／Ｓｉ〔１００〕铁电薄膜。用ＸＲＤ分析了多层铁电薄膜的晶相结构；用Ｓａｗｙｅｒ－Ｔｏｗｅｒ电路研究了这些单层和多层铁电薄膜的铁电性能。结果表明，单层ＢＩＴ的矫顽场Ｅｃ为４ｋＶ／ｃｍ，剩余极化强度为３．４μＣ／ｃｍ２；ＰＺＴ／ＢＩＴ的矫顽场Ｅｃ为８２ｋＶ／ｃｍ，剩余极化强度Ｐｒ为３６μＣ／ｃｍ２；ＢＩＴ／ＰＺＴ／ＢＩＴ夹层铁电薄膜的矫顽场Ｅｃ为５７ｋＶ／ｃｍ，剩余极化强度Ｐｒ为２９μＣ／ｃｍ２。最后讨论了薄膜的铁电性能与多层结构的关系     

氢化非晶硅的红外光谱及氢释放的研究

用等离子体增强化学气相淀积（ Ｐ Ｅ Ｃ Ｖ Ｄ）制备了氢化非晶硅薄膜（ａ Ｓｉ∶ Ｈ）并进行了退火实验, 利用红外吸收光谱（ Ｉ Ｒ）和金相显微镜研究薄膜中的氢含量及退火前后的脱氢现象, 得出材料组成及热稳定性对衬底温度 Ｔｓ 和射频功率 Ｐｒｆ 的依赖关系。     

P埋层技术研究

介绍了在Ｓｉ￣＋注入的ｎ－ＧａＡｓ沟道层下面用Ｂｅ￣＋或Ｍｇ￣＋注入以形成ｐ埋层。采用此方法做出了阈值电压０～０．２Ｖ，跨导大于１００ｍＳ／ｍｍ的Ｅ型ＧａＡｓＭＥＳＦＥＴ，也做出了夹断电压－０．４～－０．６Ｖ、跨导大于１００ｍＳ／ｍｍ的低阈值Ｄ型ＧａＡｓＭＥＳＦＥＴ。     

a-SiOx:H/a-SiOy:H多层薄膜微结构的退火行为

采用ＰＥＣＶＤ技术在Ｐ型硅衬底上制备了ａ－ＳｉＯｘ：Ｈ／ａ－ＳｉＯｙ：Ｈ多层薄膜,利用ＡＥＳ和ＴＥＭ技术研究了这种薄膜微结构的退火行为,结果表明：ａ－ＳｉＯｘＬ：Ｈ／ａ－ＳｉＯｙ：Ｈ多层薄膜经退火处理形成ｎｃ－Ｓｉ／ＳｉＯ２多层量子点复合膜,膜层具有清晰完整的结构界面,纳米硅嵌埋颗粒呈多晶结构,颗粒大小随退火温度升高而增大小随退火温度升高而增大,在一定的实验条件下,样品在６５０℃下退火可形成尺寸大     

Fe~＋和H~＋注入引起的Si／SiO_2界面重构现象

针对Ｓｉ－ＳｉＯ２过渡区对于离子注入较为敏感的特点，用１．２ＭｅＶ，剂量１×１０１０ｃｍ－２的Ｆｅ＋和Ｈ＋先后注入ＳｉＯ２－Ｓｉ样品，并用ＸＰＳ技术重点分析了Ｓｉ－ＳｉＯ２界面附近硅的化学结构、组分的变化。结果表明，在界面附近，除了Ｓｉ４＋，Ｓｉ０价态，还存在明显的Ｓｉ２＋价态。这和注入Ｈ＋产生的高温退火以及Ｓｉ—Ｓｉ键或Ｓｉ—Ｈ键的形成有关。     

BF^＋2注入硅的损伤和退火

本文用椭圆偏振光谱法研究了低温（７７Ｋ）、中等能量（１４７ｋｅＶ）、剂量分别为３×１０１３及４×１０１３ｉｏｎｓ／ｃｍ２的ＢＦ２＋分子离子注人Ｓｉ的损伤及退火效应．根据样品椭圆偏振参数与Ｃ－Ｓｉ的比较确定退火后晶格恢复的程度．结果表明，椭偏测量是研究分子离子注入Ｓｉ的有用工具；ＢＦ注入硅样品的退火转变温度在５００℃以下；并获得在某些实验条件下的最佳退火温度和最佳退火时间。     

GaAs低能Si^＋及SiF^＋离子注入研究

本文对３０ｋｅｖ Ｓｉ＾＋和分子离子ＳｉＦ＾＋注入半绝缘ＧａＡｓ的行为进行了研究对比。注入Ｓｉ＾２＋样品的Ｓｉ原子纵向分布与相同条件下用ＳＩＣＴ模拟程序理论计算出的分布相一致。经灯光９００℃１０″ＲＴＡ，电激活率可达６０％，电化学Ｃ－Ｖ测得的载流子纵向分布与注入态ＳＩＭＳ结果相同，可以获得近０．２μｍ的ＧａＡｓ有源层。而注入分子离子ＳｉＦ＾＋样品，虽注入层较浅，但灯光退火后，电激活率很低。因此，用     

铕离子注入氧化硅膜光发射的研究

采用铕离子注入热生长ＳｉＯ２薄膜的方法,获得掺杂剂量为１０１４ｃｍ－２及１０１５ｃｍ－２的ＳｉＯ２∶Ｅｕ３＋硅基复合膜,研究了该薄膜的光致发光退火特性．经１０００℃退火后观察到Ｅｕ３＋的红光发射．在１２００℃下氮气中退火观察到Ｅｕ２＋４５０ｎｍ的强光发射．讨论了Ｅｕ３＋向Ｅｕ２＋的转变     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.