溶胶—凝胶法制造的稀土的掺杂低损耗单模光纤

采用溶胶－凝胶法（ｓｏｌ－ｇｅｌ）进行稀土离子掺杂，在Ｅｒ＾３＋掺杂的Ａｌ２Ｏ３－ＳｉＯ２玻璃单模光纤中已重复性地获得１．１５μｍ波长区小于２ｄＢ／ｋｍ的最低光损耗。以该技术成功地在光纤中进行了宽浓度范围的稀土掺杂。已发现，以Ｓｏｌ－ｇｅｌ浸渍涂复厚膜制取低损耗光纤关键在于能够制成始终无裂纹膜的工艺技术。     

GaAlAs激光器腔面减反射涂层

通过对波长９１０ｎｍ ＧａＡｓ／ＧａＡｌＡｓ激光器谐振腔面蒸镀ＺｒＯ２膜的工艺过程，从理论和实验上分析了涂层特性，透射率由无膜时６２％提高到蒸镀膜后的９４％以上，提高了激光器的激光输出功率和工作寿命，对器件端面起到了保护作用。     

GaAlAs激光器腔面减反射涂层的研究

通过对波长９１０ｎｍＧａＡｓ－ＧａＡｌＡｓ激光器谐振腔面蒸镀ＺｒＯ＿２膜的工艺过程，从理论和实验上分析涂层特性，透射率由无膜时６２％提高到９４％以上，提高了激光输出功率和工作寿命，对器件端面起到了保护作用。     

GaAlAs激光器腔面减反向涂层的研究

通过对波长９１０ｎｍＧａＡｓ－ＧａＡｌＡｓ激光器谐振腔面蒸镀ＺｒＯ２膜的工艺过程，从理论和实验上分析涂层特性，透射率由无膜时６２％提高到９４％以上，提高了激光输出功率和工作寿命，对器件端面起到了保护作用。     

GaAs衬底层选择性腐蚀技术

本文在ＧａＡｓＧａＡｌＡｓ选择性腐蚀的基础上进行了腐蚀ＧａＡｓ衬底层获得ＧａＡ／ＧａＡｌＡｓ外延层薄膜的二次腐蚀技术。最终选用了Ｃ３Ｈ４（ＯＨ）（ＣＯＯＨ）３．Ｈ２Ｏ－Ｈ２Ｏ２系选择性腐蚀液和Ｈ２ＳＯ４－Ｈ２Ｏ２系腐蚀液，获得了快速，可控制，重复性好的可全部可局部去除衬底的腐蚀方法。     

低损耗玻璃光波导的溶胶-凝胶法制备

采用溶胶－凝胶（Ｓｏｌ－ｇｅｌ）技术制备了ＳｉＯ２－ＴｉＯ２低损耗平面光波导,在６３３ｎｍ处的传输损耗为０．５７ｄＢ／ｃｍ。同时在硅基板上制备了脊型Ｙ形波导分束器,分束比为１１。     

用sol-gel法在不锈钢基片上制备TiO2薄膜

介绍利用钛酸丁酯为前驱液, 用ｓｏｌ－ｇｅｌ法在不锈钢基片上制备ＴｉＯ２ 薄膜。研究分析了冰醋酸、乙酰丙酮等添加物对溶胶性能的影响,对制备在不锈钢基片上的ＴｉＯ２ 薄膜进行ＸＲＤ分析,并检测薄膜的阻－温特性、Ｖ－Ｉ特性、绝缘强度等电学特性。实验显示添加一定比例的Ｈ２Ｏ、冰醋酸、乙酰丙酮, 可以得到长时间不胶凝、性能稳定的溶胶,通过适当工艺, 能在金属基片上制备出致密、不开裂、电阻率为１０５ ～１０６ Ω·ｃｍ 的ＴｉＯ２ 薄膜。     

Er,O离子共注入GaAs的二次离子质谱的研究

在Ⅲ－Ⅴ族半导体ＧａＡｓ外延层上共注入Ｅｒ和Ｏ离子（ＧａＡｓ：Ｅｒ，Ｏ）．经面对面优化退火后，光致发光（ｐｈｏｔｏｌｕｍｉｎｅｓｃｅｎｃｅ－ＰＬ）谱中观测到对应Ｅｒ３＋第一激发态到基态４Ｉ１３／２－４Ｉ１５／２跃迁，其相对强度较单注入Ｅｒ的ＧａＡｓ（ＧａＡｓ：Ｅｒ）增强１０倍，且谱线变窄．从二次离子质谱（ＳｅｃｏｎｄａｒｙＩｏｎＭａｓＳｐｅｃｔｒｏｍｅｔｒｙ－ＳＩＭＳ）和卢瑟福背散射实验给出退火前后Ｅｒ在ＧａＡｓ：Ｅｒ样品中的剖面分布．ＳＩＭＳ测量分别给出Ｏ注入前后Ｅｒ和Ｏ在ＧａＡｓ：Ｅｒ，Ｏ中的深度剖面分布，分析表明Ｅｒ和Ｏ共注入后形成光学激活有效的发光中心．     

GaAs／Al_xGa_（1－x）As多量子阱掩埋条形激光器

利用ＭＢＥ生长的ＧａＡｓ／ＡｌｘＧａ１－ｘＡｓ折射率渐变－分别限制－多量子阱材料（ＧＲＩＮ－ＳＣＨ－ＭＱＷ），经液相外延二次掩埋生长，制备了阈值最低达２．５ｍＡ（腔面未镀膜），光功率室温连续输出可达１５ｍＷ／面的半导体激光器．经腔面镀膜后，器件已稳定工作４５００多小时．     

GaAs／AlxGa1—xAs和AlxGa1—xAs／AlAs超晶格的喇曼散射对比研究

报道不同层厚的ＡｌＡｓ／ＡｌｘＧａ１－ｘＡｓ及ＧａＡｓ／ＡｌｘＧａ１－ｘＡｓ短周期超晶格的纵光学声子模的室温喇曼散射测量结果．在非共振条件下,观察到ＡｌＡｓ／ＡｌｘＧａ１－ｘＡｓ中限制在ＡｌｘＧａ１－ｘＡｓ混晶层中的类ＧａＡｓＬＯ限制模和限制在ＡｌＡｓ层中的ＡｌＡｓＬＯ限制模,还观察到ＧａＡｓ／ＡｌｘＧａ１－ｘＡｓ中限制在ＡｌｘＧａ１－ｘＡｓ混晶层中的类ＡｌＡｓＬＯ限制模和限制在ＧａＡｓ层中的ＧａＡｓＬＯ限制模．在近共振条件下,还观察到了ＡｌＡｓ／ＡｌｘＧａ１－ｘＡｓ中ＡｌＡｓ的界面模．根据线性链模型,把测量的ＬＯ限制模的频率按照ｑ＝ｍｎ＋１２πα０展开,给出了ＡｌｘＧａ１－ｘＡｓ混晶的类ＡｌＡｓ支和类ＧａＡｓ支光学声子色散曲线．     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.