激光在机测量系统的实现

为了能在加工航空发动机关键零部件(如叶片)等复杂曲面零件的过程中实现快速在机测量,研制了非接触式激光在机测量系统。分别介绍了测量系统的工作原理,机械结构和电控系统。该系统主要由激光测头、无线传输电路、可充电锂电池、转接基座、刀柄和外壳等部分组成。为了实现机床的加工模式与测量模式之间的快速切换,其采用刀柄式的安装方式,从加工叶片切换到在机测量时,机床只要运行换刀程序,即可实现叶片加工到叶片测量的转换。此外文中还针对在机测量系统的电控部分研制了通过无线传输的数据采集系统。为了验证所研制的在机测量系统的实用性和有效性,在五轴叶片加工中心上进行了叶片截面测量实验,结果显示其测量精度为20μm,测量时间为10min。验证结果表明所研制的激光在机测量系统能够高效精确地完成叶片型面的测量任务。     

基于三维激光扫描的移动大尺寸圆柱体工件长度快速检测系统

针对移动大尺寸圆柱体工件两端的表面形貌特征,利用三维激光扫描仪设计了一种快速长度在线检测系统。基于三维激光扫描仪可在短时间内连续高速获取大量测量数据的特点,系统在虚拟环境下构造出自适应测量形状的虚拟测量基准面,采用二维误差分离方法抑制系统误差和运动误差,识别定位工件两端端点并计算其到虚拟测量基准面的位移;最后结合多传感器融合模型获取三维位移场测量结果。另外,测试前用三坐标测量机精密测量过的相似形状圆柱体工件对系统进行了校准修正。为验证系统的精度和可靠性,分别对处于（1 000±25）mm内不同直径的圆柱体工件进行了长度检测。结果显示,系统可在1 s完成直径约为50 mm工件的长度测量,检测分辨力为0.010 mm,检测精度达到0.050 mm。实际运行结果表明,该设计系统具有高自动性和高效性,可满足在线生产中对大尺寸工件控制和检测的要求。     

数控齿轮加工机床的在机测量系统

基于齿轮渐开线轮廓面的构型机理和数控齿轮加工机床的运动功能,提出了一种齿轮在机测量方法,并开发了相应的在机测量系统。该方法在不增加额外的测量系统机械机构的情况下,充分利用数控机床自身的高速、高精密和高可靠性的伺服运动实现渐开线齿轮的齿形、齿向及齿距等误差项目的在机测量。在机测量实验表明了该系统的有效性和可行性,是齿轮在机测量中高效率、高精度、低成本的解决方案,构成了数控机床质量保证系统中的一个重要环节。     

基于自适应采样的曲面加工误差 在机测量方法

基于模具在机测量的自适应采样结果,提出一种新的获取自由曲面加工误差的方法。该方法首先基于自适应采样获取加工曲面上少量测点的坐标数据,利用NURBS曲面重构来拟合加工曲面;然后基于广义牛顿法计算重构的实际曲面和理论曲面的法向距离,获得自由曲面的加工误差,并对实验加工的模具模型曲面的轮廓度误差进行分析。实验结果表明,基于自适应采样的加工曲面重构方法能够在机测量且有效地获得自由曲面加工误差。     

Investigation of diamond cutting tool lapping system based on on-machine image measurement

The profile tolerance of diamond cutting tool??s edge is one of the key factors in affecting machining accuracy. With the development of ultra-precision machining technology for optical free-form surfaces and optical microstructures, the demand for high-precision round nose diamond cutting tools is increasing. In this study, an on-machine image processing approach is applied to cutting edge geometry truing process, and profile data of cutting edge in sub-pixel precision is acquired using a series of image processing methods. According to the profile captured, the deviation from an ideal cutting edge is calculated and feedbacked to the controller. The lapping system is employed to lap the cutting edge pertinently using the deviation and the corresponding position captured, and the round edge of high accuracy is obtained efficiently. This method can avoid the error caused by the process of refixturing for offline measurement in the traditional lapping method of diamond cutting tool and reduce the influence of human factors. A truing experiment for cutting edge of the monocrystal diamond cutting tool is carried out at the developed lapping system based on on-machine image measurement, and round cutting edge of profile tolerance less than or equal to ±0.5???m is achieved.     

Development of machining technology for micropatterns with large surface area

With increasing demand for micropatterns such as V-shaped microgrooves and the trend of large surface areas in developing technologies, precision machining technology for micropatterns with large surface areas is expected to play an increasingly important role in today's manufacturing technology. In large-surface micromachining, machining time is much longer than that in general pattern machining and it is not easy to achieve uniform machining accuracy in the entire machined areas because of various factors. Therefore, systematic machining processes and technical development for achieving precision in each process are essential prerequisites to reduce the errors. In this study, we focused on developing machining technologies, which include a machine vision system for precise tool setting, an on-machine measurement system for large-area measurement, and software for tool path generation and simulation, for the fabrication of large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in., 675?×?450-mm mold with tens of V-and pyramid-shaped micropatterns.     

纳米精度在位测量系统测头误差校正方法

针对超精密机床两轴联动接触式在位测量过程中测头误差影响测量精度的问题,提出了一种测头半径误差及形状误差校正方法。进行了在位测量实验,比较分析了测头误差未校正、测头半径误差校正及测头形状误差校正三种情况的测量结果,并分别与Taylor Hobson PGI840离线测量结果进行对比,以验证测头形状误差校正方法的有效性。测头形状误差校正后,面形精度PV值由420nm变为370nm,与离线测量PV值380nm的差值为10nm。结果表明,该在位测量系统测头误差校正方法有效,能够提高在位测量精度。     

凸轮轴高速数控磨削在位测量技术

基于USB总线技术与自复位光栅位移传感器开发了凸轮轴轮廓在位测量装置,对磨削后的凸轮轴进行了在位升程测量。介绍了测量原理及升程测量过程,采用“敏感点”法并结合三次均匀B样条拟合与最小二乘法对测量数据进行了处理,求解了凸轮升程的起始转角,获得了凸轮的实测升程。利用在位测量装置与BG1310-10型凸轮轮廓检测仪针对同一凸轮轴样件进行了对比检测实验。结果表明,该在位测量装置能够满足凸轮轴加工轮廓误差检测的精度要求。     

曲面类零件在线测量

利用数控车床和TP6C-T型触发式红外通讯测量头等软硬件建立了一套数控车床在线测量平台，分析异形测头的x、Y和z向误差、测量头原理误差等产生的原因，并提出了相应的解决方法，从而在数控车床上基本实现了曲面类零件轮廓在线测量。     

在机测量激光测头位姿的线性标定

针对在机激光扫描测量中激光测头安装位置和姿态引起的测量误差,提出了一种适用于在机激光测量的测头标定方法。构造了在机激光扫描测量原型系统,建立了激光测头随机床运动的测量模型;通过多角度扫描标准球球面拟合球心,给出了一种线性求解测头安装位姿参数的算法,避免了非线性优化求解中的大量计算和不稳定问题。分析了测量过程中机床各个轴的运动误差对测量结果的影响,建立了误差模型,并给出补偿机床系统误差的方法。实验显示,对直径已知的标准球进行测量时,测头在不同摆角测得的标准球直径误差小于0.05 mm,误差补偿后球心位置误差减小了83%。实验结果验证了该标定方法的可行性,以及机床误差对测量精度影响的模型及补偿方法的正确性。     

五轴机床旋转轴误差的在机测量与模糊径向基神经网络建模

考虑五轴机床中的旋转轴误差会影响加工精度和在机测量结果,本文研究了旋转轴误差的在机测量与建模方法。介绍了基于标准球和机床在机测量系统的旋转轴综合误差测量方法,采用随机Hammersely序列分组规划旋转轴的测量角位置,通过自由安放策略确定标准球初始安装位置。然后,引入模糊减法聚类和模糊C-均值聚类(Fuzzy C-means,FCM)建立旋转轴误差的径向基(Radial basis function,RBF)神经网络预测模型。最后,进行数学透明解析,从而为误差的精确解析建模提供新途径。利用曲面的在机测量实例验证了提出的旋转轴误差测量与建模方法。结果表明:利用所建模型计算的预测位置与实测位置的距离偏差平均值为9.6μm,最大值不超过15μm;利用所建模型补偿工件的在机测量结果后,其平均值由32.5μm减小到13.6μm,最大误差也由62.3μm减小到18.6μm。结果显示,提出的测量方法操作简单,自动化程度高;模糊RBF神经网络的学习速度快、适应能力强、鲁棒性好,能满足高度非线性、强耦合的旋转轴误差建模要求。     

Form error compensation in single-point inclined axis nanogrinding for small aspheric insert

Based on an examination of traditional arc-enveloped grinding method, a single-point inclined axis nanogrinding method is presented to grind an aspheric insert by compensating tool setting error, radius error, and residual form error. Profile data from on-machine measurement are used to obtain the tool setting error and radius error of grinding wheel, as well as the normal residual form error. Compensation method of single-point inclined axis nanogrinding is built up for generating new compensation path. Grinding test of aspheric tungsten carbide insert with diameter 9.5 mm is conducted to evaluate performances of the grinding mode and compensation method. A last form error of 200 nm in peak to valley and surface roughness of 2.243 nm in Ra are achieved. These results indicated that the form error compensation method and single-point inclined axis nanogrinding mode can significantly improve form accuracy and surface roughness of ground surface.     

On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit

A new contact-type on-machine measurement system is designed and developed for the evaluation of a micro cutting edge profile. The measurement system is composed of a compact probe unit having a sharp stylus mounted on a flexible beam, an inner displacement sensor for the detection of the stylus displacement, and a two-axis precision positioning system. For the evaluation of tool faces having a steep slope, a new probing procedure with the enhancement of the inner displacement sensor integrated into the probe unit is newly proposed. After the design and development of the probe unit, the feasibilities of the developed measurement system and the proposed probing procedure are demonstrated through some basic experiments. Regarding the out-of-straightness and angular error motion of the two-axis positioning system employed in the developed measurement system, a pair of length gauges is newly employed to reduce the influences of error motions of the stage system. The topographic profile of the micro cutting edge obtained by the measurement system with the modified probe unit is then compared with those obtained by a commercial stylus profiler and a laser confocal microscope. The feasibility and effectiveness of the developed on-machine tool edge profile measurement system are also demonstrated through uncertainty analysis based on the GUM with the Monte-Carlo method.     

基于多波长协作的切削液残留表面激光位移测量误差补偿方法

在加工测量一体化过程中,工件表面切削液残留形成的油膜会严重影响光学在机测量的精度。 现有的误差补偿方法通 常需要获取油膜介质的先验信息,如成分、厚度等。 而这些信息受加工形质、切削液随机分布等因素的影响难以实时获取。 为 此,本文提出一种基于多波长协作的切削液残留表面激光位移测量误差补偿方法。 首先设计并搭建了基于激光三角位移测量 的多波长激光测量系统,可利用多波长激光测量同一被测点位移。 通过引入柯西色散规律,建立光学系统与激光波长的解析关 系,并基于此推导出多波长激光测量内在的差分特性,最终实现误差补偿。 本文依此方法进行了实验。 结果表明补偿后测量误 差绝对值小于 0. 01 mm,与未补偿的测量数据对比,误差降低了至少 92% 。     

切削区热电偶测温刀具的制备及其性能测试

由于切削测温温感器无法直接接触切削区,故在铂铑丝表面喷涂耐热绝缘层制作耐热热电偶,把表面覆盖耐热绝缘层的热电偶埋入硬质合金粉末,压制、烧结成热电偶测温刀片。通过恒温箱测温实验判定热电偶的测温性能,用性能正常的热电偶测温刀具进行切削测温实验,测温实验结果及切削刀具镜测结果表明,热电偶测温刀具能直接、可靠地进行切削区温度的测量,但是用此工艺制作的刀具切削寿命较短;实验结果还表明直径越大的铂铑丝制作的热电偶测温刀具的成品率越高,但是铂铑丝直径越大,刀具寿命越短;实验进一步揭示切削区内各点的温差较大,但是一次切削切削区温度场处于稳态时切削测温点的温度是稳定的,温度场处于稳态时切削温度的变化能迅速反映刀具的磨损状态的变化。     

车削工件表面粗糙度在机视觉测量的照明技术

照明技术对车削工件表面粗糙度在机视觉测量具有重要意义,不同的照明方法会得到不同的测量结果。为寻求最合适的照明方法,分别用不同颜色和不同角度的光源为工件提供照明进行实验,并对获取的图像进行二值化处理。最后,通过对处理结果进行对比分析,得出较为合适的照明方法,为车削工件表面粗糙度在机视觉测量提供照明方案。     

Knife-edge interferometry for cutting tool wear monitoring

This paper presents a novel technique for more easily measuring cutting tool wear using knife-edge interferometry (KEI). Unlike an amplitude splitting interferometry, such as Michelson interferometry, the proposed KEI utilizes interference of a transmitted wave and a diffracted wave at the cutting tool edge. In this study, a laser beam was incident on the cutting tool edge, and the photodetector was used to determine the interference fringes by scanning a cutting tool edge along the cutting direction. The relationship between the cutting tool wear and interferometric fringes generated by edge diffraction phenomena was established by using the cross-correlation of KEI fringes of two different cutting tool-edge conditions. The cutting tool wear produced the phase shift (attrition wear) and the decay of oscillation (abrasive wear) in the interferometric fringe. The wear characteristics of the cutting tool with a radius of curvature of 6 mm were investigated by measuring the interferometric fringes of the tool while cutting an aluminum work piece in a lathe. As a result, the attrition and abrasive wear of cutting tool showed a linear relationship of 5.62 lag/wear (μm) and 1.14E-3/wear (μm), respectively. This measurement technique can be used for directly inspecting the cutting tool wear in on-machine process at low-cost.     

Research on the error analysis and compensation for the precision grinding of large aspheric mirror surface

The purpose of this paper is to propose a compensation grinding method for large aspheric mirror surface. Because the tradition grinding is not suitable for large aspheric mirror surface, in this paper, a grate parallel grinding in 3-axis and an on-machine measurement system are applied. Based on that, it presents the errors that mainly affect the form accuracy and technology of compensation grinding. An experiment of compensation grinding was carried out for large aspheric mirror surface. With the separation of decentering, wheel arc, and residual grinding system error, the PV value further decreased comparing to tradition compensation. These results indicated that this compensation can improve the form accuracy significantly in large aspheric mirror surface grinding.     

磨齿机在机检测系统的测头综合预行程误差建模

因为测头预行程误差的存在,现有研究大都考虑单项或双项影响因素进行误差补偿。然而多次的实验统计表明,由于接触式测头的各向异性,导致信号传输迟滞、检测速度、测球半径、测杆长度、测头重力及测球表面测点法矢等因素都会对检测信号的触发时机产生影响,因而存在测头综合预行程误差,故而很难进行精确补偿。借助BP神经网络的高效逼近算法,利于求解输入为多项误差影响因素场合的测量误差输出问题,有效提高在机检测精度。根据自主研发卧式磨齿机L300G在机检测原理,以多项误差影响因素为输入节点,以测头综合预行程误差为输出节点,建立基于BP神经网络的测头综合预行程误差预测模型。完成误差补偿后,开展磨齿机标准样板齿轮在机检测实验。结果表明：误差补偿前后,齿向精度均为4级;误差补偿后,齿形精度提高2个等级,为4级精度,与格里森检测结果相吻合。结果验证了模型的正确性,有望在国产低成本磨齿机的高精度在机检测系统中推广使用。     

基于激光三角法的圆度误差在线检测技术研究

提出了一种基于激光三角测距原理的圆度误差在线检测新方法。论述了检测系统的构成、测量原理和测量方法,讨论了主轴回转误差的分离,最后在普通车床上进行了实验验证,并用三坐标测量机作了对比测量,结果表明,两种测量方法的标准差均为0.75μm,两者间相对误差平均为4%。