压电式旋转驱动器的设计与实验

为了实现压电驱动器低频率、高效率的输出,设计了一种低频压电式旋转驱动器,这种旋转驱动器结构简单,由低频电源驱动。首先对旋转驱动器进行了结构设计与工作机理分析;然后建立了系统的动力学模型,得出系统输出位移和固有频率表达式;最后制作了实验样机进行实验测试,以微小物料为研究对象,测试驱动器的驱动能力。测试结果表明,当系统频率在91.5Hz时,旋转驱动器性能最佳,输出振动位移大致为45μm,物料移动最大速度为0.15cm/s。     

径向双压电叠堆执行器建模与实验研究

该文设计了一种径向双压电叠堆执行器,可以实现单压电或双压电叠堆驱动,在不增加轴向长度的基础上实现输出位移的放大。针对该执行器,建立了基于Bouc-Wen的压电动态迟滞力模型作为执行器整体动力学模型力的输入;在MATLAB/Simulink中,基于最小二乘法对迟滞力模型中的参数进行辨识。仿真与实验结果表明,在峰-峰值140 V、直流偏置70 V的激励信号下,两根长为18 mm的压电叠堆在复合驱动下能输出约55μm的位移,实现了执行器的位移放大输出且在高频下无明显衰减;所建立的执行器动态迟滞模型很好地描述了单压电或双压电叠堆在1～600 Hz驱动频率下的电压-位移滞环曲线。在驱动频率为600 Hz时,双压电复合驱动的模型最大均方根误差为1.13μm,最大相对误差为6.1%,为大位移、高精度的执行器控制提供了基础。     

基于悬臂梁结构的惯性冲击直线压电马达

针对大天区面积多目标光纤光谱天文望远镜（LAMOST）观测光纤扫描定位的需求,设计了一种基于悬臂梁结构的惯性冲击直线压电马达,分析了该压电马达的驱动机理。为避免共振,采用有限元仿真法获得了振动座的一阶共振频率。设计加工了马达样机,搭建了实验平台,并进行了马达性能测试与分析。结果表明,在预紧力为0.2 N,驱动信号为锯齿波偏置一半,当电压峰 峰值为60 V（600 Hz）时,马达无负载速度为1.83 mm/s,当电压峰 峰值是15 V时,马达的位移分辨率为0.8 μm;当预紧力为0.4 N,驱动信号峰 峰值为60 V（600 Hz）时,马达最大负载为0.18 N,行程为40.5 mm。马达的性能参数符合光纤定位器扫描需求。     

双压电叠堆驱动执行器率相关迟滞建模与分析

提出一种双压电叠堆驱动执行器设计方案,即执行器由2根不同尺寸的压电叠堆驱动,中间由套筒连接。为描述执行器在不同频率下的迟滞特性,利用准静态下的非对称Maxwell模型、系统动力学方程及一阶惯性环节等建立数学模型,并进行参数辨识、模型仿真与实验研究。仿真与实验结果表明,在140 V、600 Hz激励电压信号同时驱动2个长度不超过20 mm压电叠堆时,输出位移可达37.1μm,相较于140 V、1 Hz时的位移仅衰减7.1%,与其他执行器位移放大机构相比,具有较好的高频性能。所建立的执行器率相关迟滞模型在600 Hz内幅值最大误差不超过1.71μm,均方根误差最大为1.34μm,可较准确地描述执行器位移输出特性,为执行器高精度控制提供了基础。     

磁力调控驰振压电-电磁复合俘能器设计与研究

为避免驰振俘能器高流速下PZT损坏,使其能在复杂工作环境中具有稳定的输出特性,该文提出了一种利用磁力控制悬臂梁振动幅值的压电-电磁复合俘能器(GPEEH)。引入的非线性磁力可以调控钝体的振幅,提高驰振压电俘能器(PEH)的输出稳定性,改善其对高风速环境的适应性,且能够增加复合俘能器的输出电压。在搭建风洞实验平台和制作实验样机的基础上,研究不同负载电阻、风速、关键结构参数d₀和d₁对俘能器输出特性的影响规律。实验结果表明,当PEH钝体的振幅被磁力限制在一定区间时,钝体的振动频率和速度随着风速的升高而逐渐增加。风速为11.5 m/s时,PEH振动主频率(6.3 Hz)是风速为8.4 m/s时PEH振动主频率(4.3 Hz)的1.4倍。当风速为12 m/s, GPEEH的输出功率为6.18 mW,相较于单一驰振压电俘能器的输出功率提高了47%。其中当风速达到10.5 m/s时,PEH和电磁俘能器(EEH)的输出功率均趋于稳定。     

大驱动力高刚度纳米致动新原理研究

提出了一种将高位移分辨率的压电陶瓷致动器与大驱动力的电磁致动器进行有机结合，实行优势互补的新方法。基于新原理研制的实验样机获得了较好的技术性能指标，即驱动力300N，刚度95N／μm；分辨率1nm；最大位移4μm。研究工作为大驱动力高刚度纳米致动开辟了一条新的途径。     

一种冲击式悬臂梁压电俘能器的设计与实验

为提高悬臂梁压电俘能器的俘能效率,提出了一种冲击式悬臂梁压电俘能器。该俘能器包括多个悬臂梁压电振子,可在风力、人体动力能及环境振动能等多种外载荷作用下产生电能。俘能器的核心部件是悬臂梁压电振子,通过冲击实验发现悬臂梁压电振子在周期性冲击载荷作用下拓宽了共振频率,同时提高了输出功率。测试结果显示在频率约为21Hz的方波冲击信号下,外接电阻为50kΩ时,单个悬臂压电俘能器最大输出功率可达0.28mW;当频率分别为5Hz、8.5Hz时,还可分别输出0.07mW和0.17mW的功率,俘能器出现多个峰值电功率。研究表明所设计的冲击式压电俘能器可有效提高俘能效率。     

两平动一转动三维并联压电微动平台的设计

为提高微定位系统的灵敏性,设计了三自由度并联压电微定位系统的新构型。首先,在考虑平台结构具有对称性的基础上,采用双平行四连杆机构对台体进行设计,并设计了可集成于台体的承载模块及传感器安装模块;接着,采用有限元法对平台的位移、应力、刚度及模态进行了分析;最后,基于所搭建的实验系统,对平台的位移及频率响应特性进行了测试。实验结果表明,在120V电压的作用下,平台沿x向的最大位移为26.0μm(此时沿y向产生的寄生位移为141.0nm),沿y向的最大位移为25.9μm(此时沿x向产生的寄生位移为39.7nm),绕z轴的最大转角为210μrad;平台x、y向的位移分辨率均为6.5nm;平台x、y、θz向的固有频率分别为328.0Hz、481.3Hz、402.8Hz。     

基于智能复合微结构的亚手掌尺度压电双驱扑翼微飞行器的研究

该文设计、制作和研究了一种亚手掌尺度的双驱扑翼微飞行器。飞行器主要采用多层平面材料的智能复合微结构（SCM）加工工艺进行加工。装配得到的样机整机质量为244 mg,翼展61 mm。对样机的压电驱动器性能进行了测试。测试结果表明,压电驱动器空载共振频率约为1 100 Hz,负载共振频率约为28 Hz;对样机进行了升力测试,得到样机的升力为 0.689 mN。     

基于垂直驱动的压电振动送料器结构设计分析与试验研究

振动送料器是自动加工和装配系统中的一种供料装置,由于其整列定向性能优良,供料效率高,通用性好,因而广泛应用于装配、加工、包装等各种自动上料工序。为了实现对轻、薄、小产品的平稳输送,笔者分析了基于系统共振方法的新型垂直驱动压电振动送料器,介绍了该种双晶片驱动式振动送料器的工作原理,建立了动力学模型,获得了系统固有频率表达式,通过样机制作和实验测试得到了系统固有频率以及振幅与输送速度的关系。     

Technology innovation and process integrations for sub-100nm gate patterning

This paper presents a brief overview of the Applied Centura(R)DPS(R)system,configured with silicon etch DPS Ⅱ chamber, with emphasis on discussing tuning capability for CD uniformity control. It also presents the studies of etch process chemistry and film integration impact for an overall successful gate patterning development. Discussions will focus on resolutions to key issues, such as CD uniformity, line-edge roughness, and multilayer film etching integration.     

White organic light-emitting devices based on fac tris（2- phenylpyridine） iridium sensitized 5,6,11,12-tetraphenylnap -hthacene

We have fabricated the white organic light-emitting devices （WOLEDs） based on 4,4＇ -bis（2,2 -diphenyl vinyl）-1,1＇ - biphenyl （DPVBi） and phosphorescence sensitized 5,6,11,12,-tetraphenylnaphthacene （rubrene）. The device structure is ITO/2T-NATA （20 nm）/NPBX （20 nm）/CBP： x%Ir（ppy）3：0.5% rubrene （8 nm）/NPBX （5 nm）/DPVBi （30 nm）/Alq（30 nm）/LiF（0.5 nm）/A1. In the devices, DPVBi acts as a blue light-emitting layer, the rubrene is sensitized by a phosphorescent material, fac tris （2-phenylpyridine） iridium [Ir（ppy）3], acts as a yellow light-emitting layer, and N,N＇ -bis- （1-naphthyl）- N,N＇ -diphenyl -1, 1＇ -biphenyl-4,4＇ -diamine （NPBX） acts as a hole transporting and exciton blocker layer, respectively. When the concentration of Ir （PPY）3 is 6wt%, the maximum luminance is 24960 cd/m^2 at an applied voltage of 15 V, and the maximum luminous efficiency is 5.17 cd/A at an applied voltage of 8 V.     

Complete approach to automatic identification and subpixel center location for ellipse feature

To meet the need of automatic image features extraction with high precision in visual inspection, a complete approach to automatic identification and sub-pixel center location for similar-ellipse feature is proposed. In the method, the feature area is identified automatically based on the edge attribute, and the sub-pixel center location is accomplished with the leastsquare algorithm. It shows that the method is valid, practical, and has high precision by experiment. Meanwhile this method can meet the need of instrumentation of visual inspection because of easy realization and without man-machine interaction.     

小角度扩展相关性近似算法分析

本论文提出一种在多天线MIMO信道相关性建模中小角度扩展近似理论算法,并应用于分析MIMO系统性能。分析中分别对三种不同角能量分布情况下的空间相关性研发快速近似计算法,并同时提出双模(Bi-Modal)角能量分布情况下的近似运算。通过分析这些新方法的近似效率,可以得到计算简单、复杂度低、而且符合实际的MIMO相关信道矩阵,对系统级的快速高效计算法的研究和系统级的评估以及误差分析具有重要的意义。     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A Versatile Mixed-Signal Pin Approach for Cost-Effective Test of Automotive ICs

Integrated circuits (ICs) intended for increasingly sophisticated automotive applications bring unique test demands. Advanced ICs for applications such as highly integrated automatic braking system (ABS) and airbag controllers combine high voltage digital channels, significant VI demands and precise timing capability. Along with continued missioncritical reliability concerns, the trend toward higher voltage operation and increased device integration requires specialized test capabilities able to extend across the wide operating ranges found in automotive applications. Among these capabilities, automotive test requirements increasingly dictate a need for a cost-effective versatile mixed-signal pin electronics with very high data rates reaching up to 50MHz with a voltage swing of-2 V to +28 V.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

Optical vibration and deviation measurement of rotating machine parts

It is of interest to get appropriate information about the dynamic behaviour of rotating machinery parts in service. This paper presents an approach of optical vibration and deviation measurement of such parts. Essential of this method is an image derotator combined with a high speed camera or a laser doppler vibrometer （LDV）.