阱内δ掺杂GaSbBi单量子阱红外发光效率的光致发光光谱研究

采用变激发功率红外光致发光(Photoluminescence,PL)光谱方法研究四个不同阱内δ掺杂面密度的GaSb_0.93Bi_0.07/GaSb单量子阱(Single Quantum Well,SQW)及其非掺杂SQW参考样品。通过分析GaSbBi SQW和GaSb势垒/衬底成分的PL强度演化,发现阱内δ掺杂导致红外辐射效率显著降低,相对下降幅度约为33%-75%。进一步分析结果表明,发光效率下降来源于界面恶化引发的“电子损失”和阱内晶格质量下降导致的“光子损失”的共同作用。这一工作有望为稀Bi红外发光器件的性能优化提供帮助。     

外场对InPBi量子阱中激子结合能的影响

在有效质量近似下运用变分法计算了InAlAs/InPBi/InAlAs量子阱中的激子结合能随阱宽、Al组分、Bi组分的变化情况,分析了外加电场和磁场对激子结合能的影响。结果表明：激子结合能随阱宽增大呈现先增大后减小的趋势;随Al、Bi组分的增大,激子结合能也逐渐增大;外加电场较小时对激子结合能的影响很小,外加电场较大时破坏了激子效应;激子结合能随外加磁场增大呈现单调增大的趋势。计算结果对InAlAs/InPBi/InAlAs量子阱在光电子器件方面的应用有一定指导意义。     

InPBi薄膜材料的结构性能和光学性能研究

室温下,InPBi表现出强而宽的光致发光光谱,其宽光谱特性来自于材料中的PIn反位深能级和与Bi相关的深能级。该特性使得InPBi有希望应用于制备光学相干层析扫描系统中的超辐射光源。文章利用透射电子显微镜和三维原子探针研究了InPBi薄膜材料的结构性能,发现Bi原子在InPBi薄膜中的分布极不均匀,在InPBi/InP界面出现了Bi的富集区,从该区域沿[001]方向出现了Bi的纳米面,此纳米面位于(110)平面上。这种Bi原子的富集分布阻碍了PIn反位参与的载流子复合过程,对InPBi的光学性能有显著的影响。研究结果可为制造光学相干层析扫描系统的超辐射发光二极管提供一定的理论基础。     

GaInNAs/GaAs量子阱的光致发光谱和光调制反射谱

研究了GaInNAs/GaAs多量子阱在不同温度和激发功率下的光致发光(PL)谱以及光调制反射(PR)谱.发现PL谱主发光峰的能量位置随温度的变化不满足Varshni关系,而是呈现出反常的S型温度依赖关系.进一步测量,特别是在较低的激发光功率密度下,发现有两个不同来源的发光峰,它们分别对应于氮引起的杂质束缚态和带间的激子复合发光.随温度变化,这两个发光峰相对强度发生变化,造成主峰(最强的峰)的位置发生切换,从而导致表观上的S型温度依赖关系.采用一个基于载流子热激发和出空过程的模型来解释氮杂质团簇引起的束缚态发光峰的温度依赖关系.     

GaInNAs/GaAs量子阱的光致发光谱和光调制反射谱

研究了GaInNAs/GaAs多量子阱在不同温度和激发功率下的光致发光(PL)谱以及光调制反射(PR)谱.发现PL谱主发光峰的能量位置随温度的变化不满足Varshni关系,而是呈现出反常的S型温度依赖关系.进一步测量,特别是在较低的激发光功率密度下,发现有两个不同来源的发光峰,它们分别对应于氮引起的杂质束缚态和带间的激子复合发光.随温度变化,这两个发光峰相对强度发生变化,造成主峰(最强的峰)的位置发生切换,从而导致表观上的S型温度依赖关系.采用一个基于载流子热激发和出空过程的模型来解释氮杂质团簇引起的束缚态发光峰的温度依赖关系.     

HVPE生长GaN厚膜光致发光特性研究

利用吸收光谱和光致发光(PL)光谱研究了氢化物气相外延(HVPE)法生长的GaN厚膜材料发光特性。研究发现当激发脉冲光源的重复频率较低时,PL光谱中仅能观察到带边发光峰,当重复频率增加时,PL光谱中不仅出现带边发光峰,还可观察到蓝带发光峰和黄带发光峰;随着光源重复频率的增加,带边发光峰与黄带发光峰、蓝带发光峰的光强之比也随着增大。分析认为蓝带发光起源于材料中碳杂质缺陷而黄带发光可能与位错等结构缺陷有关。     

光斑尺寸对GaAS1-xBix光致发光谱线型的影响

针对低激发功率密度光致发光(photoluminescence,PL)谱信噪比(signal-to-noise ratio,SNR)对GaAs_(1-x)Bi_x带尾能级探究的限制问题,基于傅里叶变换红外PL光谱实验系统对两个GaAs_(1-x)Bi_x外延膜开展变激发光斑尺寸PL光谱测试分析.结果表明,激发功率恒定时光斑直径增大导致PL峰位红移和线宽先降低后增大.这一现象是由于等效激发功率密度的降低而导致的.在保持激发功率密度为5. 1 W/mm2时,光斑增大不影响光谱线型但显著提升SNR.由此,低激发功率密度PL光谱的弱信号探测能力得以提高,有助光谱定量拟合分析.本工作表明,适当增大激发光斑尺寸有助于低激发功率密度PL光谱的SNR和弱信号分辨能力的提升.     

1W级大功率白光LED发光效率研究

研究了1W级大功率白光发光二板管(LED)发光效率随功率变化的关系.实验结果表明,功率在0～0.11W的范围里,发光效率随功率迅速增加;功率达到0.11W时,发光效率为15.6 lm/W;当功率大于0.11W时,发光效率随功率增加开始减小,功率继续增加时,发光效率降低的速度越来越快.在器件额定功率1 W附近,发光效率为13 lm/W.发光效率随功率增加而下降主要是由于芯片温度升高、电流泄漏等导致的载流子有效复合几率下降引起的.     

Ar等离子体处理对GaAs纳米线发光特性的影响

采用Ar等离子体处理GaAs纳米线,通过光致发光测试研究了等离子体偏压功率对GaAs纳米线发光性能的影响。在不同测试温度和不同激发功率密度下,研究了发光光谱各个发光峰的来源和机制。研究结果表明:随着功率增加,GaAs自由激子发光逐渐消失,束缚激子发光强度先减小后增大;当功率增加到200 W时,出现施主-受主对(DAP)发光。通过对比不同样品在283℃下的发光光谱,得到了等离子体处理过程中GaAs纳米线的结构变化:当处理功率较小时,Ar等离子体在消除表面态的同时将空位缺陷引入GaAs中;当处理功率较大时,GaAs的晶体结构遭到破坏,形成施主类型的缺陷,出现DAP发光。     

生长温度对MOCVD外延生长InGaN的影响

采用金属有机化学气相沉积(MOCVD)方法,在GaN/蓝宝石复合衬底上生长了InGaN薄膜,并研究了生长温度对InGaN薄膜的In组分、结晶品质和发光特性的影响.实验中发现随着生长温度的降低,InGaN薄膜中的In组分提高,但结晶品质显著下降.X射线衍射(XRD)联动扫描的结果显示即使在In组分增大至0.57时也没有发现相分离现象,光致发光(PL)谱测量的结果表明InGaN薄膜的PL峰位随着In组分升高而向低能方向移动,半高宽随着In组分增加而增加.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.