用于单光子TOF测量的时间-幅度变换器

基于新型共源共栅电流源的积分方法,设计了一种用于单光子飞行时间(TOF)测量的时间-幅度变换器(TAC)。该方法有效简化了TAC电路结构,减小了TAC占用面积,显著提高了TOF的满量程范围(FSR)。采用0.18 μm标准CMOS工艺设计。集成TAC的单光子探测器像素单元的填充因子可达到26.8%。后仿真结果表明,该TAC在120 ns的FSR内具有230 ps的定时分辨率,微分非线性(DNL)低于0.05 LSB,积分非线性(INL)低于1.1 LSB。蒙特卡洛仿真表明,512个TAC像素间的不均匀性低于0.5 %。该TAC非常适用于高密度时间相关的单光子计数(TCSPC)探测器阵列。     

一种新型的高均匀性非制冷红外读出电路研究

针对非制冷红外探测器系统,设计了一种高均匀性的读出电路(ROIC)结构。由于非制冷红外焦平面阵列中微测辐射热计的制作工艺存在偏差导致探测器输出存在非均匀性,其中列条纹尤为明显。所提出的读出电路能有效地消除列条纹、提高均匀性。该ROIC已在0.5?m CMOS工艺下成功流片,并应用到阵列大小为320×240的非制冷微测辐射热计焦平面上。测试结果表明:固定图像噪声(FPN)仅为0.088V,无明显列条纹。该ROIC在高均匀性的非制冷红外探测器上有着广泛的应用。     

红外探测器高性能读出电路的研究

设计了一种高性能电容反馈跨阻放大器(CTIA)与相关双采样电路(CDS)相结合的红外探测器读出电路。该电路采用CTIA电路实现对微弱电流信号的高精度读出,并通过CDS电路抑制CTIA引入的固定模式噪声(FPN),最后采用失调校正技术减小CDS引入的失调,从而减小了噪声对电路的影响,提高了读出电路的精度。采用特许半导体(Chartered)0.35μm标准CMOS工艺对电路进行流片,测试结果表明:在20pA～10nA范围内该电路功能良好,读出精度可达10bit以上,线性度达97%,达到了设计要求。该读出电路可用于长线列及面阵结构红外探测系统。     

GaAs/InGaAs量子点探测器件微光读出研究

GaAs/InGaAs量子点光电探测器,在633 nm激光辐射3.5 nW条件下,器件偏压-1.4 V时,测得响应电流8.9×10-9A,电流响应率达到2.54 A/W,量子注入效率超过90%。基于GaAs/InGaAs量子点光电探测器的高量子注入效率、高灵敏度等特点,采用具有稳定的电压偏置,高注入效率和低噪声特点的CTIA(电容互阻跨导放大器)作为列放大器读出结构,输出部分采用相关双采样(CDS)结构去除系统和背景噪声。实验结果表明,在3.5 nW的微光辐射下,器件偏压为-2.5 V时,50μm×50μm像素探测器与读出电路互联后有7.14×107V/W的电压响应率。     

GaN紫外焦平面CTIA结构读出电路小面积设计及仿真

随着GaN紫外焦平面的发展,焦平面的阵列规模越来越大,单元探测器的面积越来越小,对GaN紫外焦平面的读出电路进行设计,实现读出电路单元面积为37μm×37μm,阵列规模为8×8元.本设计采用电容反馈互阻抗放大器(CITA)结构作为输入级,列共用方式的采样保持电路,源级跟随器作为输出级,用移位寄存器来控制行、列选通并控制电路工作的时序.本文的整个电路设计基于Cadence设计平台,对电路进行了Spectre仿真,面阵的工作状况良好,保持良好的线性.     

高光谱应用的带可调复位时间CDS的低噪声红外焦平面读出电路

低辐射量的高光谱应用对红外焦平面读出电路（ROIC）提出了低噪声的设计要求。相关双采样（CDS）是常用的减少噪声的结构。本文通过调节钳位和采样保持之间的时间间隔来改进CDS,可灵活消除低频噪声。采用180 nm CMOS工艺设计和制造了640×512规模、15 μm 像元中心距的读出电路。输入级集成了低噪声CTIA与本文提出的可调复位时间CDS（AICDS）,所设计的时序产生器使CDS复位时间可以延长0~270个时钟周期。通过延长复位时间减少这个时间间隔,噪声电子数可以由39 e^-减少到18.3 e^-。SPECTRE仿真结果和实验测试结果证实了提出的AICDS结构可以提升高光谱应用读出电路的噪声性能,因此可以广泛应用。     

一种像素级源跟随管共享的双列线信号传输的红外焦平面读出电路新结构（英文）

提出一种像素级源跟随管共享、双列线信号传输的红外焦平面读出电路新结构。像素的电压信号通过两条列线传递到列级,消除了列线寄生电阻带来的非均匀性和非线性。同一列的相邻四行像素共享源跟随管,增大了源跟随管的尺寸和面积,从而降低了热噪声、闪烁噪声以及工艺偏差带来的非均匀性。采用该结构并基于0.35μm 2P3M CMOS工艺设计和制造了一款640×512规格读出电路,像素中心距为15μm。测试结果表明:功耗仅30 mW,动态范围81 dB,非线性度0.11%,非均匀性小于1%。与中波红外探测器阵列互连后进行了组件测试和成像实验,组件非均匀性小于5%,NETD为18 mK,获得了高质量红外图像。     

基于双积分模拟重构大动态范围CIS系统研究

提出一种采用列共用模拟重构电路和双积分三采样工作时序的CMOS图像传感器(CIS)系统架构,可实现光电响应曲线压缩和像素固定模式噪声(FPN)消除,提高传感器动态范围到83 dB,使成像质量提高.该结构具有与单采样相同的像素阵列,仅增加很小的处理电路.改进的工作时序优化了长积分、短积分和信号处理的时序分配.系统控制由FPGA实现.功能和数模混合仿真验证表明,方案是可行的.     

基于X射线探测电路的可变增益放大器的研制

基于512元X射线探测器读出电路,对传统可变增益放大器(VGA)电路的结构和内部运放进行了优化设计,使其具有了改进相关双采样(CDS)的功能,从而使得512元整体电路得到了优化。分析了改进型VCA的电路结构、工作原理,采用Chartered 0.35μm 2P4MCMOS工艺对电路进行了仿真和流片。仿真及测试结果表明,改进型VGA模块可有效实现改进型相关双采样的功能,抑制了固定模式噪声的影响,具有低噪声(18.5 nV@1 MHz)、大宽带(44.9 Mz),能够满足系统10 bit精度的要求。以此为基础优化的前端读出电路功能正确,相对改进前的电路,面积可减小约51%,功耗降低了约27%。     

低功耗64×64 CMOS快照模式焦平面读出电路新结构

介绍了一个工作于快照模式的CMOS焦平面读出电路的低功耗新结构-OESCA(Odd-Even SnapshotCharge Amplifier)结构该结构像素电路非常简单,仅用三个NMOS管;采用两个低功耗设计的电荷放大器做列读出电路,分别用于奇偶行的读出,不但可有效消除列线寄生电容的影响,而且列读出电路的功耗可降低1 5%,因此OESCA新结构特别适于要求低功耗设计的大规模、小像素阵列焦平面读出电路采用OESCA结构和1.2μm双硅双铝标准CMOS工艺设计了一个64×64规模焦平面读出电路实验芯片,其像素尺寸为50μm×50μm,读出电路的电荷处理能力达10.37pC.详细介绍了该读出电路的体系结构、像素电路、探测器模型和工作时序,并给出了精确的SPICE仿真结果和试验芯片的测试结果.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.