温度补偿型光纤光栅位移传感器

基于等腰三角形悬臂梁和双光纤光栅结构设计并制造了一种高分辨率、温度自补偿的光纤位移传感器。采用光谱分析法对测量结果进行解调,常温下的实验结果表明,传感器的量程为0-70mm,灵敏度为21.9pm/mm,线性拟合度高达0.999,重复性误差为4.72％FS,迟滞误差为2.70％FS。而且在0-60℃温度范围内的零漂为0.41pm/℃,温度性能良好。该传感器能很好的应用于水利水电工程、工业与民用建筑等结构上裂缝或接缝开合度的长期监测。     

基于超磁致伸缩材料的光纤光栅磁场传感器

在分析光纤光栅传感原理的基础上,设计了一种基于超磁致伸缩材料的光纤光栅磁场传感器.先将一根光纤光栅粘贴在超磁致伸缩材料上;为补偿温度对磁场测量光纤光栅传感器的影响,再将另一根光纤光栅的一端固定在有机玻璃上并保持自由状态.对设计的传感器进行温度和磁场强度响应特性实验,在0~40℃的范围内,磁场测量和温度补偿光纤光栅的温度灵敏度分别为22和9.9pm/℃.在0-1200×10^-4 T范围内,传感器的磁场强度检测灵敏度约为1pm/1×10^-4 T,分辨率为1×10^-4 T,线性度为0.9963,稳定性约为±3×10^-4 T,为弱磁场的测量提供了一种新方法.     

带有温度补偿的微流传感器研究

提出一种基于双长周期光纤光栅(LPFG)的边孔光纤微流传感器。该边孔光纤(SHF)内有2个空气孔,是天然的微流体通道,该微流传感器可进行温度补偿。利用CO2激光器在边孔光纤上写入双LPFG,其共振波长分别为1 268.7 nm和1 385.8 nm。实验结果表明,当传感器置于折射率1.335~1.395的甘油水溶液中,2个LPFG共振峰的折射率灵敏度分别为88.724 nm/RIU和79.474 nm/RIU,温度灵敏度分别为52.0 pm/℃和55.7 pm/℃,利用折射率和温度灵敏度可推导出传感器的传感矩阵。该文所提出的带有温度补偿的微流传感器具有良好的线性响应度,可实现折射率和温度的同时测量,在环境监测和食品安全领域有潜在价值。     

卫星环境温度监测的光纤光栅传感器研究

针对航天行业太空环境下对卫星内部温度监测的需求,研制了一种直接测量卫星内部温度的光纤光栅温度传感器。通过对传感器的结构进行了优化设计,选择一种新型的封装工艺,解决了温度、应变交叉敏感问题。选取相同封装条件的3个光纤光栅温度传感器进行温度标定。结果表明,在0～60 ℃范围内,光纤光栅温度传感器灵敏度分别为9.26 pm/ ℃、9.60 pm/ ℃、9.47 pm/ ℃,精度为1 pm,温度分辨率达到了0.1 ℃,线性度均达到0.998以上,具有良好的重复性与一致性,可应用于卫星内部温度的实时监测。     

应用于注水井的靶式光纤布喇格光栅流量传感器

为了解决注水井下安装和维护传感器难度大和成本高的问题,设计和理论分析了一种基于杠杆-铰链结构的靶式光纤布喇格光栅（FBG）流量传感器,将传感器结构中的FBG1和FBG3分别粘贴在杠杆-铰链两端构成差动结构,使传感器具有低启动与大量程特性;通过温度补偿光栅FBG2实现了温度和流量的同时测量。对传感器的结构进行了仿真与优化,得出传感器的优化参数,并以此参数为基础进行流量测量、重复性、温度测量、温度补偿、稳定性等实验。实验结果表明,该传感器可以同时测量流体流量和温度,其温度灵敏度为17.94 pm/℃,流量分辨率为0.039 L/s。     

基于马赫-曾德尔干涉的温度和应变同时测量的光纤传感器研究

提出了一种基于马赫-曾德尔干涉的温度和应变 双参数同时测量的光纤传感器,其结构是在单模光纤(SMF)上分别熔接两 个球形结构并在SMF光纤中间熔接一段细芯光纤(TCSMF)。利用光纤的纤芯 模、包层模对温度、应变的灵 敏度差异,通过检测不同级次的干涉谷的特征波长位移变化,结合敏感矩阵实现了对温度、 应变双参数的 同时测量。实验选取位于波长1545.1nm554.8nm处的干涉谷进行温度和应变的同时测量,测 得两个波谷 的温度灵敏度分别为53.86 pm/℃和47.51pm/ ℃,两个波谷的应变灵敏度分 别为0.75 pm/με和1.39pm/με,并且不 同级次干涉波谷的波长位移量与外界温度和应变具有良好的线性度。     

一种双梁互补式光纤光栅位移传感器及在地铁隧道变形监测中的应用

本文提出了一种双梁互补式光纤光栅(fiber Bragg grating, FBG)位移传感器,实现了正负双向位移的测量。采用双“悬臂梁+楔形滑块”的结构,当一个悬臂梁受位移作用处于变形状态时,另一个悬臂梁不变形并提供温度补偿功能。传感器处于零值测点状态时,两个悬臂梁处于零弯曲状态,且双梁互为温度补偿,消除了温度影响。通过性能测试实验证明,该传感器在±50的量程内,灵敏度为29.369 pm/mm,测量重复性好。制备出8个传感器应用于某市地铁的变形安全监测,从道床沉降、道床环缝、管片环缝3个方面开展了变形测量。在长期监测期间,传感器工作稳定,被测结构变形状态稳定,表明该传感器具有良好的测量性能,适用于长期的结构健康监测。     

光纤光栅温度传感器稳定影响因素研究

提出一种可用于航天系统温度监测的光纤布拉格 光栅(FBG)温度传感器及其封装方式。通过对FBG温度传感器结构进行力学仿真,分析了FB G的预拉伸幅度、低熔点玻璃厚度对传 感器稳定性的影响;提出了优化传感器封装性能的方法,并通过实验进行了验证;对封装的 FBG传感器进 行四次稳定性实验,每次实验相隔二十天。实验结果表明:FBG传感器在各个温度点(－70℃,……, 30℃)波长的标准差小于0.57pm;FBG传感 器温度灵敏度为8.4pm/℃,温度测量标准差小于0.067℃; 在液氮环境中,FBG传感器波长的标准差为0.43pm,具有良好的低温 稳定性。     

工件特征在机测量的关键误差分析与补偿研究

针对激光在机测量工件特征时的测量精度问题,对测量系统的关键误差影响因素及补偿应用进行了研究。使用激光位移传感器作为测量工具对工件特征进行在机测量时,测量结果受激光位移传感器倾斜误差和数控机床几何误差影响。为了校正激光位移传感器在物面倾斜时引起的测量误差,设计了倾斜误差试验,利用勒让德多项式对倾斜误差进行了建模和补偿,补偿后倾斜误差可减小至±0.025 mm以内。针对不动式激光在机测量时数控机床线性轴几何误差对测量结果的影响,设计了球杆仪倾斜安装试验,利用参数化建模的方式对X轴和Y轴的几何误差进行了解耦。最后根据建立的倾斜误差与几何误差模型,对工件特征的在机测量结果进行了补偿。结果表明,对工件特征在机测量结果进行误差补偿后,线性尺寸测量误差小于0.05 mm,角度测量误差小于0.08°,相较于补偿前在机测量精度明显提高。     

基于长周期光栅滤波的光栅解调系统

基于长周期光栅的边缘滤波特性,设计了一种光纤布拉格光栅的传感解调系统,适用于布拉格光栅的静态和动态解调。系统实现了3.5 nm范围内的线性解调,波长灵敏度为0.092 nm-1,波长分辨率可以达到0.01 nm。振动测量中检测信号稳定,测量频率误差在1%以内。针对长周期光栅对温度和弯曲敏感的问题,采用了适当的温度补偿和封装技术,使长周期光栅的温度漂移系数从112 pm/℃下降到45 pm/℃,显著提高了系统的稳定性。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.