PBSZT大功率压电陶瓷老化性能的研究

为探索Pb1-x-yBaxSry(Sn1/3Nb2/3)0.06(Zn1/3Nb2/3)0.06Ti0.44Zr0.44O3+0.5%MnO2+0.5%Sb2O3(质量分数)大功率铅基压电陶瓷材料的老化机理,进行了A位置换、CeO2掺杂的实验研究.实验结果表明.x(Ba)=5%和x(Sr)=5%的A位复合置换陶瓷得到较好的介电老化性能,一定老化时间内其介电常数变化率为13.9%,添加w(CeO2)=0.7%的掺杂有利于老化性能的提高,一定老化时间内其介电常数变化率为2.2%.对原体系掺杂w(Mn(NO3)22)=0.2%、w(Sb2O32)=0.5%,它们显著地优化其老化性能.     

BNKT BZN无铅压电陶瓷的制备及电学性能研究

采用传统固相法制备得到(0.8-x) Bi0.5 Na0.5TiO3-0.2Bi0.K0.5TiO3-xBi(Zn2/3 Nb1/3)O3(摩尔分数0≤x≤0.06)(简称(0.8-x)BNT-0.2BKT-xBZN)无铅压电陶瓷.利用XRD、SEM等测试技术表征了该体系陶瓷的晶体结构、表面形貌及介电和压电性能.研究结果表明,所有组分的陶瓷样品均形成典型的钙钛矿结构;同一烧结温度下,随着Bi(Zn2/3 Nb1/3)O3含量的增加,晶粒尺寸增加;在1 180℃烧结温度保温2h的条件下,组成为x=0.02的陶瓷样品经极化后,压电常数d33=48 pC/N,相对介电常数ε33T/ε0=598.9,介电损耗tan δ=0.048 45.     

B位取代钛酸铋钠基压电陶瓷的结构与性能

采用传统固相反应制备出了0.80Na0.5Bi0.5TiO3-0.20K0.5Bi0.5TiO3(NKBT)基无铅压电陶瓷材料,研究了高化合价离子(Sb5+, Nb5+,W6+) B位掺杂对NKBT基无铅压电陶瓷结构与性能的影响.结果表明,掺杂等量Sb3+、Nb5+和W6+后,NKBT基陶瓷的主晶相仍然为钙钛矿相结构,其中掺杂Sb5+和Nb5+时,陶瓷中分别出现少量Sb6O13和Nb2O5相.掺杂离子的相对原子质量越大,陶瓷的压电常数d33越大.W6+为最优掺杂离子.不同W6+含量的NKBT陶瓷的主晶相均为钙钛矿相,当W6+摩尔分数为8%时,出现焦绿石相Bi14W2O27.W6+的固然极限为4%.随着W6+摩尔分数的增加,材料的介电常数εr、d33及居里温度TC减小,介电损耗tan δ增加.当W6+的摩尔分数为1%时,陶瓷的性能达到最佳,其d33、εr、tan δ、TC分别为123 pC/N,1 352、0.042 9,318 ℃.     

注射成型制备0.94NBT 0.06BT无铅压电陶瓷研究

为了研究压电陶瓷注射成型技术,设计了一种压电陶瓷注射成型平台,对注射成型设备及注射实验材料0.94Na0.5Bi0.5TiO3-0.06BaTiO3(0.94NBT-0.06BT)陶瓷的结构及电性能进行研究。结果表明,用注射法制备的0.94NBT-0.06BT无铅压电陶瓷微观晶粒的气孔明显减少,致密度提高,晶粒尺寸增大,主要以立方形存在,电性能优于传统固相法制备的陶瓷。其密度为5.54g/cm3,压电常数d33=138pC/N,介电常数εr=1 436。     

(Na,K,Li)(Nb,Sb)O3无铅压电陶瓷的性能

采用传统的固相反应法和普通烧结工艺,制备了A位和B位复合的(Na0.5+xK0.44Li0.06–x)Nb0.95Sb0.05O3(x=0,0.006,0.012)系无铅压电陶瓷样品,并对样品的压电、机电性能进行了研究。结果表明:该陶瓷系列具有很高的压电应变常数(x=0.006时d33=243pC/N)、低的介质损耗(tanδ<2×10–2)、较高的机电耦合系数(x=0.012时,k33=0.632)、高的铁电顺电相变温度(tC约400℃)。这些性能显示了它是一种替代铅基PZT的具有很好应用前景的无铅压电陶瓷。     

Bi过量和Mn掺杂的钛酸铋钠基无铅压电陶瓷

采用传统电子陶瓷制备工艺制备(1–y)(Na0.5Bi0.5)TiO3-yBa(ZrxTi1–x)O3无铅压电陶瓷,获得了d33高达185pC/N的0.94(Na0.5Bi0.5)TiO3-0.06Ba(Zr0.055Ti0.945)O3压电陶瓷。对Bi的挥发进行了补偿,添加过量Bi2O3(摩尔分数z=0.08)的钛酸铋钠基压电陶瓷,d33高达218pC/N。研究了Mn掺杂对钛酸铋钠基陶瓷压电、介电性能和损耗的影响,获得了高性能的无铅压电陶瓷,其中d33为214pC/N,kt为0.44,k33为0.52。     

Na补偿的(Na,Bi)TiO3-Ba (Zr,Ti)O3无铅压电陶瓷

研究了(1-y)(Na0.5Bi0.5)TiO3-yBa(ZrxTi1-x)O3无铅压电陶瓷,获得压电应变常数d33高达185 pC/N的0.94(Na0.5Bi0.5)TiO3-0.06Ba(Zr0.055Ti0.945)O3压电陶瓷。添加0.04%摩尔过量Na2CO3的0.94(Na0.5Bi0.5)TiO3-0.06Ba(Zr0.055Ti0.945)O3高性能压电陶瓷d33高达195 pC/N。研究发现添加Na2CO3添加量至0.04%摩尔,Na起到软性添加物的作用,添加量超过0.04%,Na起到硬性添加物的作用.理论解释了过量Na的这一特性.为了降低介电损耗,对0.94(Na0.5Bi0.5)TiO3-0.06 Ba(Zr0.055Ti0.945)O3陶瓷进行了(Ce,Mn)掺杂改性研究。     

流延成型制备NBT基无铅压电织构陶瓷的研究

采用流延成型工艺,以片状Bi2.5Na3.5Nb5O18(BINN5)微晶为模板制备出(BiNa)0.5TiO3-BaTiO3(NBT)织构陶瓷,研究了微晶模板含量与陶瓷的微观组织结构间的关系。研究结果表明,采用流延成型工艺成功制备出晶粒定向排列的NBT无铅压电织构陶瓷。随着微晶模板质量分数的增加,陶瓷织构度增大;当烧结温度为1 225℃,微晶模板质量分数为20%时,NBT基陶瓷的织构度最大。     

PMMN-PZT四元系压电陶瓷材料的研究

研究了铌镁酸铅铌锰酸铅锆钛酸铅(PMMN-PZT)四元系统压电陶瓷材料的配方、工艺条件及对各项性能指标的影响。在相界附近研究了四种不同配方的PMMN-PZT压电陶瓷,通过SEM观察、性能测试、居里温度表征等手段,确定了较佳的配方组成、材料的烧结温度及极化制度。研究表明:所得PMMN-PZT压电陶瓷的较佳组成为0.06Pb(Mg1/3Nb2/3)O3-0.06Pb(Mn1/3Nb2/3)O3-0.44PbZrO3-0.44PbTiO3+0.2%质量分数的CeO2,适宜的烧结温度为1200,极化电场为3000V/mm,极化温度为150。所制备的压电陶瓷的相对介电常数33T/0为1100;介质损耗tg为0.004;压电常数d33为290?0-12C/N,g33为28.0?0-3Vm/N;机电耦合系数kP为0.55;机械品质因数Qm为1200。     

无铅无铋高性能压电陶瓷

本文分析了铌酸盐作为无铅无铋压电陶瓷的原因,采用适合工业生产的传统电子陶瓷工艺,制备出压电性能和居里温度都高的(Na0.5K0.5)1-x(LiSb)xNb1-xO3.其中(Na0.5K0.5)1-x(LiSb)0.052Nb0.948O3压电常数d33=286pC/N,平面机电耦合系数kp＞=0.51,损耗tan居里温度c=385℃.这些参数表明,该压电陶瓷具有很好的应用前景.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.