可调谐全固态Nd:YVO4/LBO倍频连续671nm环形激光器

描述了一种可调谐全固态Nd:YVO4/LBO倍频连续671nm环形激光器的结构参数和相关实验研究。激光器采用四镜环形腔结构,利用880nm激光二极管(LD)端面抽运YVO4-Nd:YVO4复合晶体和Ⅰ类相位匹配的LBO倍频方式,加入TGG旋光器和λ/2波片组成的光学单向器实现单向运转,通过对法布里-珀罗(F-P)标准具角度和腔镜压电晶体电压的调节实现了激光输出波长671nm附近的调频。在抽运功率为23W,吸收抽运功率为14.5W时,输出单频671nm连续红光最高功率为1.08W,光-光转换效率为7.4%;加标准具调谐时,获得了最高功率为738mW的可调谐红光输出。     

小型化可调谐外腔面发射绿光激光器

以InGaAs多量子阱为有源区材料,以对抽运光透明的AlGaAs/AlAs为后端分布布拉格反射镜材料,采用后端抽运方式,在腔内插入标准具作为滤波元件,通过腔内倍频,获得小型化可调谐的光抽运外腔面发射绿光激光器。作为滤波元件,标准具可压窄基频光的光谱半峰全宽。为了阻止倍频光返回到增益芯片,标准具镀有倍频光高反膜。激光器的基频光调谐范围超过10 nm,倍频绿光在中心波长559 nm处的调谐范围为4 nm,光谱半峰全宽为1.0 nm,最大输出功率为65 mW。     

外腔谐振倍频8.7W连续单频绿光技术研究

基于Pound-Drever-Hall外腔谐振倍频技术,实现了单频、连续1064nm基频光的高效倍频转换。精确锁定环形倍频腔腔长,利用I类非临界相位匹配三硼酸锂晶体获得了最高8.73 W的倍频绿光输出,倍频效率为68.9%。在此基础上,研究了倍频绿光的波长锁定与调谐特性,当30min内波长锁定均方根值小于3fm时,实现了输出绿光波长在532.15~532.50nm范围内的连续可调。采用自外差拍频法测量了单频绿光的光谱特性,谱线线宽为18.7kHz,光束质量因子为1.25,光束质量优异。     

连续波Nd:YVO4/LBO稳频倍频红光全固态激光器

利用激光二极管(LD)端面抽运YVO4-Nd∶YVO4复合晶体,采用四镜环形谐振腔及Ⅰ类临界相位匹配(CPM)LBO晶体进行腔内倍频,在腔中插入TGG晶体和λ/2波片组成的光学单向器,设计了满足热不灵敏条件和最佳倍频条件的谐振腔型,实现了全固态连续稳频倍频红光激光器。在19 W抽运功率下,同时获得了610 mW的671 nm单频红光输出和400 mW的单频1342 nm红外光输出。红光30 min内输出功率波动小于±0.6%。自由运转时,基频光(1342 nm)1 min频率漂移为±5 MHz,锁定后基频光1 min频率稳定性优于±1 MHz。     

周期极化LiTaO_3的准连续倍频

利用高压脉冲周期极化的LiTaO3(PPLT) ,对半导体激光抽运Nd∶YVO4 晶体 10 6 4nm准连续输出进行倍频 ,讨论了其倍频转换效率及倍频过程中的温度调谐特性 ,实验结果与理论吻合很好。在基频光输出为 193mW时 ,其外腔单通倍频转换效率达到 13 5 %。     

超窄线宽连续可调谐钛蓝宝石环行腔激光器

美国光谱物理公司在CLEO2004上展出了新开发的连续可调谐钛蓝宝石环行腔激光器。该激光器具有如下优点:线宽可窄到10skHz;低噪声的连续输出;抗微光学系统扰动;高精度的波长可调谐;快速更换光学镜片组;单频紫外355～500nm输出。钛蓝宝石激光器由光谱物理公司的MillenniaProR 532nm连续绿光激光器泵浦,在腔外使用谐振增强型外腔式倍频器WavetrainR 实现倍频输出。Wavetrain是目前效率最高的连续单频激光器的谐振增强型外腔式倍频器,采用了专利的三角腔设计,其倍频效率是通常使用的Bow-tie折叠倍频腔效率的1.5倍以上。连续可调谐钛蓝宝石…     

Ⅰ类非临界相位匹配LBO腔外倍频660nm效率的研究

报道了利用LBO晶体对Nd:YAG纳秒激光器进行腔外倍频实验的研究结果,实验中LBO晶体采用Ⅰ类非临界相位匹配(NCPM),温度调谐。实验证明,采用LBO温度调谐方式具有倍频效率高、稳定性好、易于调节等优点,当匹配温度为8.4℃、基频光功率为1.3J时,获得了855mJ的660nm倍频光输出,最高转换效率达到66%,倍频光能量稳定度小于±3%。     

单频可调谐连续1342 nm注入锁频环形激光器

为了获得高功率的单频可调谐1342 nm激光,研究了一种注入锁频Nd∶YVO_4环形激光器。以1.0 W可调谐单频连续1342 nm激光为种子光,"8"字环形谐振腔为从激光器功率腔,基于PDH(Pound-Drever-Hall)锁频技术实现了环形功率腔的锁定,获得了8.3 W的单频连续可调谐1342 nm的激光输出。     

锁模光纤激光的倍频及波长调谐实验研究

利用周期性极化铌酸锂（Periodically Poled Lithium Niobate, PPLN）晶体实现了对掺镱锁模光纤激光器输出单横模激光的倍频,产生了532nm波长附近的倍频脉冲光。基于准相位匹配（Quasi Phase Matching, QPM）技术,通过改变基频光到PPLN晶体的入射角,使不同中心波长的基频光达到准相位匹配条件,实现倍频光波长的调谐。对带宽60 nm的锁模激光倍频得到带宽1.5 nm、中心波长532nm的脉冲激光输出。以掺Yb锁模光纤激光作为基频光,调节PPLN晶体角度,获得了中心波长连续变化的倍频激光,入射角度调节范围0°~25°,对应的倍频光波长调谐范围531.8nm~535.6nm。波长变化趋势与理论分析一致。     

科技简讯

美国光谱物理公司在CLEO2004上展出了新开发的连续可调谐钛蓝宝石环行腔激光器。该激光器具有如下优点:线宽可窄到10s kHz;低噪声的连续输出;抗微光学系统扰动;高精度的波长可调谐;快速更换光学镜片组;单频紫外355～500nm 输出。钛蓝宝石激光器由光谱物理公司的Millennia Pro R 532nm连续绿光激光器泵浦,在腔外使用谐振增强型外腔式倍频器Wavetrain R 实现倍频输出。Wavetrain是目前效率最高的连续单频激光器的谐振增强型外腔式倍频器,采用了专利的三角腔设计,其倍频效率是通常使用的Bow-tie折叠倍频腔效率的1.5倍以上。连续可调谐钛蓝…     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.