GaAs中对撞光致载流子光栅引起的能量转移和脉冲形变

GaAs中光致载流子光栅引起的瞬态能量转移是光放大,光开关等研究的基础,Smirt等人对光栅沿平行GaAs表面方向形成的情况进行了广泛而深刻的理论和实验研究,并认为两强度相同的脉冲间不存在能量转移。本文研究了光栅沿通光方向形成的光对撞光致光栅引起的能量转移和由此以及光自衍射引起的脉冲形变,给出了光栅自衍射的普适公式,理论计算了这些过程,得到了相同强度光脉冲间的能量转移,获得了与预计一致的脉冲形变。     

与波导表面垂直等量发射的线阵全息波导光互联

报道了以玻璃为基、以光致聚合物制造透射体积输出光栅的全息波导光互联,并通过实验绘制了光栅的衍射效率与曝光时间曲线。通过控制各输出光栅的衍射效率,可实现用一束与波导表面垂直的入射光,产生6束与波导表面垂直且能量相等的出射光。输出光栅的最大衍射效率仅需趋于50%。在波长为632.8nm的红光下,测出输出光偏离表面垂直方向的角度为0.43°,输出光的相对强度的最大偏差为11%。     

光致聚合物用于全息光互联光栅的研究

使用光致聚合物做记录介质,记录用于光互联的全息光栅。激光曝光后衍射效率可达5 5 %左右,用紫外光均匀照射后,在10 0℃下烘烤40分钟,衍射效率可达90 %左右。绘制了衍射效率与曝光时间和烘烤时间曲线,制作具有预期衍射效率的用于全息光互联的光栅。     

PQ-PMMA光致聚合物全息存储材料的动态特性

理想的存储材料一直是体全息技术发展的关键.光致聚合物材料具有高灵敏度,高信噪比和制造成本低廉等诸多优点,是高密度全息存储最有希望首先获得突破的材料.PQ-PMMA光聚物以其较低的曝光收缩性和较大的厚度受到了人们的广泛关注,但是人们对其光致聚合机理和全息性能的认识并不充分.分析了材料曝光后内部的光反应过程以及扩散作用对信息的永久存储造成的影响,通过光反应过程建立了适合此类材料的扩散方程.在曝光条件下,PQ分子吸收光子,形成自由基,然后该自由基引发MMA单体形成活性自由基.PQ分子与MMA分子的一对一加成是主要的反应,同时可能有少量的低聚物产生,这是由PQ引发MMA发生的链式反应引起的.通过分析光反应速率,得到了PQ的扩散方程,并将其推广为描述自由单体扩散的一维非局域方程.对该方程进行数值求解较好地描述了光栅的建立过程,通过优化方法得到了材料的主要性能参数如聚合速率,扩散速率和有效链长度等.利用上述方法,得到PQ分子扩散系数的数量级为10-21m2/s,与相关文献的报道一致.由于PO分子在常温下的扩散系数较小,曝光结束后随着放置时间的增长,PO分子的扩散作用将导致材料的光栅轮廓变模糊,折射率调制度下降.采用过曝光方法能够很好地保持存储图像的长期稳定性.在实时探测过程中,首次在光致聚合物中观察到动态自增强效应.光折变材料的动态自增强效应是由于两记录光在材料内部形成光栅,然后挡住其中一束用另一束记录光进行读出.读出的衍射光会发生增强现象.这是由于读出光与其自身的衍射光发生干涉形成的光栅加强了原光栅,使衍射增强.在文中的光致聚合物中,光栅形成机制不同于光折变材料,因此衍射效率自增强也有所不同.当两束记录光进行光栅记录的同时,由于材料的收缩效应使原光栅与光强光栅间产生偏移,相干光会继续消耗单体记录新的光栅,这使得衍射效率曲线先上升达到最大值后下降,并再次出现上升和下降过程,并最终趋于稳态.文中考虑材料在光反应过程中的收缩,利用多光栅叠加的原理对上述实验现象进行了解释.     

苯并吩噁嗪叶绿素衍生物的合成及其光动力抗肿瘤作用研究

为了发现高效的光动力药物.以焦脱镁叶绿酸a衍生物为母体,通过酰胺反应引入氨基苯并吩噁嗪盐酸盐,制得苯并吩噁嗪叶绿素衍生物(PTM);采用1 H NMR、MS对其结构进行表征;用紫外-可见光谱、荧光发射光谱对其光学性能进行表征;用DPBF法测定了单线态氧生成速率;用MTT法测定了化合物光动力抗肿瘤活性.该化合物的紫外-可...     

增强现实显示衍射光波导的设计

提出了在波矢k空间中设计衍射光波导片的相关理论,系统仿真并研究了光线波长、光栅周期、光栅时钟角、波导基底折射率以及波导基底折射率色散对衍射光波导视场角以及相关设计参数的影响。设计结果表明,当使用宽光谱光源时,光谱带边缘波长的视场存在切割,对显示效果影响不大,衍射光波导片适用于宽光谱光源。波导基底折射率色散对衍射光波导设计的影响可以忽略。时钟角为40-270-140时,各个光栅区域位置及尺寸合适,适合于实际加工。本工作对衍射光波导的设计提供了积极的指导和借鉴。     

用于光场成像的超构衍射光栅阵列优化

为提高矢量光场显示亮度和视角均匀性,提出了一种应用于圆偏振光场成像的超构光栅结构。利用严格耦合波分析,逐像素对超构光栅结构进行仿真,研究了入射光偏振状态、光栅结构、入射角度对-1级光衍射效率的影响规律。仿真结果表明,圆偏振光显示可以使得光栅衍射效率稳定高效,当光栅周期为500 nm时,与基于TE和TM设计的光栅结构相比,圆偏振光设计的光栅结构衍射效率提高了18.5%和2.6%;光栅高度和占空比对衍射效率具有明显的影响。综合考虑光栅制备难度、衍射效率和视角均匀性,设计了一种高度为0.6μm,占空比为0.4的光栅阵列结构应用于圆偏振光场显示,系统衍射效率可以达到40%以上,具有较优的综合性能,对超构光栅设计制备和裸眼3D显示具有一定指导意义。     

手性偶氮苯衍生物的光致变色和全息存储特性研究

研究了手性偶氮分子N-[4-(4-十二烷氧基苯基偶氮)苯甲酰]-L-谷氨酸(C12-Azo—L-Glu)掺杂聚合物薄膜的光致变色特性。利用C12-Azo-L-Glu掺杂聚甲基丙烯酸甲酯(PMMA)薄膜的可逆光致异构过程．以线偏振的氩离子激光(488nm)作抽运光和写入光，线偏振氦氖激光(632．8nm)作再现光和读出光．探讨了光致双折射和全息光学存储过程中．衍射信号强度与氩离子激光功率的关系。实验结果表明C12-Azo-L-Glu具有响应时间快、可擦重写、耐疲劳度高的特点，可用作实时存储材料。     

一种红敏光致聚合物全息特性的研究

为了研究以丙烯酸和N,N'-亚甲基双丙稀酰胺共同作为单体的厚约180μm的光致聚合物材料的全息特性,采用记录透射型衍射光栅和进行数字全息存储实验的方法,获得了较为理想的实验结果。结果表明,该光致聚合物材料呈现出较高的衍射效率(大于40%)及较高的灵敏度(约0.01cm2/mJ),且衍射效率达最大后趋于稳定,说明所制的样品均匀性很好,在其中所记录的衍射光栅处于较为稳定的状态,未出现过调制现象及明显的噪音光栅。根据该光致聚合物材料的布喇格偏移,得出样品厚度缩皱百分比约为1.7%;并在所制的样品内进行了数字全息存储,再现图像清晰,误码率约为5.3×10-4。说明该光致聚合物适合数字全息存储。     

基于二维激光告警的闪耀光栅设计

现有光栅衍射型激光告警中,正弦光栅存在1级衍射效率较低,闪耀光栅在闪耀波长附近0级和-1级衍射效率很低,这两种光栅的缺点都降低了激光告警的可靠性。为此文中提出了一种改进型闪耀光栅。将两闪耀光栅反相对接,并且中间留一定无光栅空间,此改进可提高波长在闪耀波长附近0级和-1级的衍射效率,将有效克服传统闪耀光栅的漏报警现象。设计加工了闪耀波长为800 nm的改进型闪耀光栅,理论分析了0级和1级衍射效率;采用波长为808 nm和850 nm的光,对改进型闪耀光栅进行二维激光告警实验测试,实验结果表明,在波长为闪耀波长附近光入射时,改进型较普通闪耀光栅的0级和-1级衍射强度有很大提高,能够被CCD有效探测。该改进型闪耀光栅可有效提高二维激光告警系统的可靠性。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.