花状ZnO纳米棒的合成及丙酮敏感特性的研究

利用水热法合成花状的ZnO纳米棒,并对其进行X射线衍射(X-ray diffraction,xRD)与扣描电子显微镜(scanning electron microscope,SEM)表征.以该ZnO为敏感材料制成了旁热式结构气体传感器,测试了样品在不同温度下对丙酮气体的灵敏度.结果表明样品在290℃下对于丙酮气体具有高的灵敏度、快的响应恢复速度等特点.测试了传感器对于常见干扰气体的灵敏度,表明器件具有良好的选择性.     

ZnO纳米线的制备及其气敏特性北大核心

采用水热法制备了ZnO纳米线,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和透射电子显微镜(TEM)对其物相及微观形貌进行了表征和分析。测试结果表明,ZnO纳米线的平均直径和长度分别约为250 nm和10μm。同时,研究了ZnO纳米线气体传感器对挥发性有机化合物(VOC)的气敏特性。实验结果表明,ZnO纳米线的气体传感器在最佳工作温度200℃下,对浓度5×10-7乙醇和丙酮气体的灵敏度分别可达4.58和2.63,相应的响应时间分别为9和6 s,恢复时间均为3 s。其最低检测极限为5×10-8,表明该传感器对不同环境中乙醇和丙酮气体的检测具有潜在应用前景。最后,对ZnO纳米线气体传感器的气敏机理进行了讨论。     

ZnO薄膜的丙酮气敏特性研究

用直流磁控反应溅射法,分别在Si(111)基片及Al2O3陶瓷基片上制备了ZnO薄膜,并进行TiO2、SnO2、Al2O3或CuO的掺杂和退火处理。用XRD分析了退火前后晶型的变化,利用气敏测试系统对各样品进行了气敏特性测试。结果表明:经过700℃退火后的样品,在最佳工作温度为220℃时,对丙酮有很好的选择性和很高的灵敏度(34.794)。掺杂TiO2或SnO2,可提高ZnO薄膜传感器对丙酮的灵敏度(57.963)。     

金属氧化物基丙酮气体传感器研究进展

丙酮是一种具有毒性、易挥发性以及易燃性的有机化工原料,会对人们的身体健康造成危害。在特定环境中,丙酮的含量可以通过气体传感器进行快速检测。详细介绍了金属氧化物基丙酮气体传感器的工作机理,并对以ZnO、WO₃、Co₃O₄、SnO₂四种金属氧化物为基质的半导体型气体传感器在丙酮检测方面的研究进展进行了综述,重点总结了其微观形貌、金属掺杂及复合对传感器选择性和灵敏度的影响,并对现阶段研究中可能存在的问题以及未来可能的研究方向进行了简单概述。这将有助于提高金属氧化物基丙酮气体传感器的性能,为环境监测和工业安全领域提供更可靠、更高效的丙酮检测手段。     

氧化锌纳米纤维的制备及其氨气气敏特性

采用静电纺丝技术制备了具有多孔结构的ZnO纳米纤维，通过扫描电子显微镜(SEM)、X射线衍射(XRD)和X射线能量色散谱(EDS)对ZnO纳米纤维的形貌、晶体结构和组成成分进行了表征。将上述材料制成气体传感器，对氨气进行了气敏性能测试。实验结果表明，由ZnO纳米纤维制成的气体传感器在室温下对氨气具有较高的灵敏度和较低的检测限，对300ppm氨气的响应值约为65%,响应时间和恢复时间分别为70 s和60 s,对10ppm氨气的响应值约为3.3%,并且具有良好的选择性和长期稳定性。由于ZnO纳米纤维表面形成了特殊的多孔结构，为氧化还原反应提供了更多的氧空位和活性位点，有利于气体的吸附，提高了传感器对氨气的气敏性能，使其在实际应用中极具前景。     

气体吸附对ZnO薄膜表面电导的影响

利用在氧化气氛中,ZnO薄膜的表面电导对还原气体分压具有敏感性这一特性,可望制作ZnO薄膜气体传感器。分析表明只在较高温度下,才具有实用的灵敏度及响应速度。     

掺TiO2的ZnO薄膜气敏特性研究

用直流磁控溅射法分别在Si(111)基片及陶瓷基片上制备掺有TiO2的ZnO薄膜,并进行500℃、700℃退火处理,对掺杂前后ZnO薄膜进行XRD分析,测试各掺杂样品气敏特性.500℃退火后,各掺杂样品对有机气体有较高的灵敏度,随着掺杂时间延长,气敏特性提高.700℃退火后,2 min掺杂的样品对乙醇有很高的灵敏度和很好的选择性,最佳工作温度为220℃左右.而其他掺杂量的样品对乙醇气体灵敏度低,随着掺杂时间延长,气敏特性降低.     

ZnO修饰多针-板结构负电晕放电气体传感器北大核心

基于负电晕放电原理的气体传感器利用局部高压电场将目标气体电离,根据电离特性对气体进行识别。采用MEMS技术制备硅尖阵列电极,利用电喷ZnO纳米颗粒对电极表面进行修饰,结合金平板正电极构建了多针-板结构电晕放电气体传感器。研究了电极间距对传感器负电晕放电特性的影响,综合考虑起晕电压、信号输出范围及稳定放电范围,优化电极间距为100μm。测试了在-0.70 kV放电电压下传感器对乙酸气体的敏感特性。该传感器对乙酸气体的响应灵敏度约为1.05 mV/10-6,理论检测限(三倍噪声)约为8.6×10-6,测试范围内传感器响应同乙酸气体体积分数近似呈线性关系。实验结果表明,ZnO纳米颗粒修饰减小了放电尖端曲率半径,增加了放电尖端个数,消除了硅尖阵列之间高度和顶端曲率半径的差异,从而有效降低了起晕电压,提高了传感器对乙酸气体响应灵敏度及电晕放电的稳定性。     

基于NASICON和Co_3O_4敏感电极的丙酮传感器的研究

以溶胶-凝胶法制备的NASICON为基体导电层材料,以水热法制备的纳米片状Co3O4为敏感电极材料,制备了一种检测低浓度丙酮的管式结构固体电解质型气体传感器,利用静态配气法对传感器的气敏性能进行了测试,结果表明:当工作温度为300~375℃时,传感器对体积分数为0.5×10–6~100×10–6的丙酮表现出了较好的气敏性能,其检测下限能达到0.5×10–6(体积分数),传感器电动势变化值(?V)与丙酮浓度的对数呈线性关系,在温度为350℃时,传感器对丙酮的灵敏度达到最大值–24.5 mV/decade,另外,该传感器还具有较快的响应恢复速度和较好的选择性。     

微球状ZnO纳米粉体的制备与气敏性能研究

以Zn(CH3COO)2·2H2O为原料,无表面活性剂存在时,利用水热法合成了微球状ZnO纳米粉体。采用XRD,SEM和TEM等测试手段,对其物相、结构进行了表征。结果表明:此粉体为六方晶系的ZnO,结晶良好,直径小于4μm。利用该粉体制成气敏元件,并用静态配气法测试了元件的气敏性能。研究发现:元件在180℃工作温度下,对体积分数为50×10–6的丙酮和乙醇气体的灵敏度分别达到5.9和8.6。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.