贪婪的量测划分机制下的多传感器多机动目标跟踪算法

针对低检测概率下多机动目标的跟踪问题,该文提出一种新的交互式多传感器多目标多伯努利滤波器(IMM-MS-MeMBer)。在IMM-MS-MeMBer滤波器的预测阶段,该文利用当前的量测信息自适应地更新目标的模型概率,并利用更新后的模型概率对目标状态进行混合预测;在IMM-MS-MeMBer滤波器的更新阶段,使用贪婪的多传感器量测划分策略对多传感器量测进行划分,并利用得到的量测划分集合和IMM-MS-MeMBer滤波器对目标的后验概率密度进行更新;除此之外,IMM-MS-MeMBer滤波器能够利用目标的角度和多普勒量测信息同时实现多个机动目标的位置、速度估计。数值实验验证了该文所提IMM-MS-MeMBer滤波器的优越性能。     

贪婪的量测划分机制下的多传感器多机动目标跟踪算法

针对低检测概率下多机动目标的跟踪问题,该文提出一种新的交互式多传感器多目标多伯努利滤波器(IMM-MS-MeMBer).在IMM-MS-MeMBer滤波器的预测阶段,该文利用当前的量测信息自适应地更新目标的模型概率,并利用更新后的模型概率对目标状态进行混合预测;在IMM-MS-MeMBer滤波器的更新阶段,使用贪婪的多传感器量测划分策略对多传感器量测进行划分,并利用得到的量测划分集合和IMM-MS-MeMBer滤波器对目标的后验概率密度进行更新;除此之外,IMM-MS-MeMBer滤波器能够利用目标的角度和多普勒量测信息同时实现多个机动目标的位置、速度估计.数值实验验证了该文所提IMM-MS-MeMBer滤波器的优越性能.     

多编队目标先后出现时的无先验信息跟踪方法

针对多编队机动目标先后出现时的跟踪问题,该文提出了一种基于交互式多模型高斯混合概率假设密度滤波(IMM-GM-PHD)算法的无先验信息跟踪方法。首先,在IMM-GM-PHD算法预测过程完成的基础上,引入密度检测机制,利用相关域为所有预测高斯分量挑选有效量测,结合密度聚类(DBSCAN)算法检测是否出现新编队目标。其次,在IMM-GM-PHD算法状态更新完成的基础上,利用更新高斯分量的组成情况完成模型概率的更新。最后,在状态估计优化过程中,结合编队目标的特点,加入相似度判别技术,利用杰森-香农(JS)散度度量高斯分量间的相似度,剔除没有相似分量的高斯分量,进一步优化估计结果。仿真结果表明,该文方法能够快速有效地跟踪非同时出现的多编队机动目标,具有较好的跟踪性能。     

多传感器跟踪机动目标：数据越多估算越好吗

分析了多传感器跟踪机动目标的问题，相对给定目标的位置，参与给定目标跟踪的传感顺和数目和类型，通常是固定的。然而，在许多多传感器系统中，由于名传感器的机动性、类型和的限制，执行特定目标跟踪的传感器的数目和类型能够阴时间而变动。当跟踪机动目标时，由于目标运动模型的不确定性，传感器系统组成的这种可变性提出了重要问题。通常用瞳尔曼滤波器过滤用于估算目标的位置、速度和加速度的位置测量量。当设计卡尔曼滤波器时     

基于高斯-艾肯特滤波的机动目标跟踪算法

针对交互式多模型(IMM)算法切换滤波模型缓慢、跟踪精度低甚至发散的问题,提出了在机动目标跟踪中使用的高斯-艾肯特滤波算法。首先,该算法确定观测模型和滤波模型集,分别构造量测方程组和滤波方程组,形成总体观测矩阵;然后,针对跟踪目标的非合作机动,提出使用卡方检验来检验滤波效果,并通过滤波控制算法实时调整滤波内存长度,使用高斯-艾肯特滤波对机动目标跟踪具有很强的灵活性,实现自适应跟踪;最后,在目标跟踪仿真中与三种改进模型集的卡尔曼滤波IMM算法进行对比验证,对两类算法进行了复杂度分析。仿真结果证明了高斯-艾肯特滤波算法的有效性,在无先验信息条件下拥有更高的跟踪精度。     

基于高斯和均方根容积卡尔曼滤波的姿态角辅助目标跟踪算法

根据目标2维运动速度与姿态角的关系,该文提出一种姿态角辅助目标跟踪算法。在目标运动学基础上建立状态向量中包含姿态角的跟踪模型,实现姿态角对目标跟踪的辅助;针对基于模板匹配姿态角量测的噪声为非高斯情况,将均方根容积卡尔曼滤波引入到高斯和滤波框架下,提出新的高斯和均方根容积卡尔曼滤波算法,提高非线性非高斯处理能力,同时结合目标运动中姿态角的变化规律,建立姿态角分量不同的跟踪模型,通过模型切换实现机动姿态角的滤波。算法对姿态角量测进行滤波,同时实现了姿态角信息与位置信息的有效融合。仿真结果验证了该算法的有效性和正确性。     

多种跟踪算法对机动目标跟踪的应用研究

通过建立目标运动模型,对多种跟踪滤波器进行了分析仿真。仿真结果表明,混合状态估计交互式多模型算法（IMM）对机动目标跟踪效果比其它类型的滤波器好得多,并且确定了在航迹滤波与机动跟踪方面综合表现性能较高的IMMVCVA跟踪算法。通过外场实际数据验证,表明该算法对现实环境中的目标稳定跟踪具有重要的意义。     

基于LGJMS-GMPHDF的多机动目标联合检测、跟踪与分类算法

线性高斯跳变马尔可夫系统模型下的高斯混合概率假设密度滤波器(LGJMS-GMPHDF)为杂波背景下多机动目标跟踪提供了一种有效方法。该文将类别辅助信息引入LGJMS-GMPHDF,提出了一种密集杂波背景下多机动目标联合检测、跟踪与分类算法。该算法在LGJMS-GMPHDF中用属性向量扩展单目标状态向量,用位置和属性的组合测量似然函数代替单目标位置及杂波位置测量似然函数,提高了不同类目标与杂波测量间的鉴别能力,进而改善了目标数目及状态的估计精度;在更新目标状态的同时,对目标属性信息进行更新。该算法实现了时变数目的目标状态和类别估计。杂波背景下交叉和临近并行机动目标的跟踪实验验证了该文算法的联合检测、跟踪与分类性能。     

混合模型的运动目标检测与跟踪算法

针对运动目标检测与跟踪算法计算准确率低、效果差的问题,结合Kalman滤波算法,提出一种基于高斯混合模型的运动目标检测与跟踪算法。对传统的权重更新机制进行改进,以保证背景的持续更新状态。建立高斯混合模型,对运动目标图像进行处理,对图像中的参数信息进行实时更新,在Kalman滤波器的性质影响下进行目标跟踪,将获取的运动目标位置作为信息输入,完成运行并跟踪。在更新的过程中,根据运动目标的状态确定矩阵,目标遮挡也不会影响追踪的效果。结果表明,利用Kalman滤波器对运动目标进行跟踪,可以取得良好的运动目标跟踪效果。     

基于形态匹配聚类的近邻扩展目标跟踪算法

针对传统扩展目标跟踪（Extended Target Tracking, ETT）算法在处理近邻目标时面临的计算效率低下和跟踪不准确的问题,提出了一种形态匹配聚类量测集划分与高斯逆威沙特概率假设密度（Gaussian Inverse Wishart Probability Hypothesis Density, GIW-PHD）滤波器相结合的跟踪处理方法。该方法首先由GIW-PHD滤波器得到预测的目标状态,其次使用DBSCAN(Density-Based Spatial Clustering of Applications with Noise, DBSCAN)算法完成量测集的初步划分,在此基础上利用较高权重的预测分量实现对多个近邻目标混合量测簇的判断,进而使用椭圆形状约束（Elliptic Shape Constraint, ESC）的FCM(Fuzzy C-Means, FCM)算法（ESC-FCM）对混合簇进行二次划分得到更精确的划分结果,最后将划分结果合并后送入GIW-PHD滤波器完成目标状态的更新。仿真结果表明,本文所提量测集划分方法能够充分利用GIW-PHD滤波器预测步获取...     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.