The formation of a SiOx interfacial layer on low-k SiOCH materials fabricated in ULSI application

The characterizations of SiOCH films using oxygen plasma treatment depends linearly on the O₂/CO flow rate ratio. According to the results of Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS) analyses, it was found that the carbon composition decreases with increasing O₂/CO flow rate ratio, because more carbon in the Si–O–C and Si–CH₃ bonds on the film surface would be converted by oxygen radicals. It was believed that the oxygen plasma could oxidize the SiOCH films and form a SiO_x interfacial capping layer without much porosity. Moreover, the result of FTIR analysis revealed that there was no water absorbed on the film. A SiO₂-like capping layer formed at the SiOCH film by the O₂/CO flow rate ratio of 0.75 had nearly the same dielectric properties from the result of capacitance–voltage (C–V) measurement in our research.     

Epitaxial and polycrystalline BaFe12O19 thin films grown by chemical vapour deposition

Epitaxial and polycrystalline barium hexaferrite BaFe₁₂O₁₉ thin films were prepared by metalorganic chemical vapour deposition (MOCVD). Films were grown by a liquid MOCVD technique which aim is to control precisely the precursor vapour pressures. Two kinds of substrates were used: sapphire (001) and silicon thermally oxidized. On Si/SiO₂ films are polycrystalline and the magnetization is isotropic. On Al₂O₃ (001), structural studies reveal the films to be predominantly single phase, well crystallized without annealing procedure and with the c-axis perpendicular to the film plane; epitaxial relationships between the film and the substrate were determined. The magnetic parameters, deduced from vibrating sample magnetometer measurements, show a high dependence of the magnetization with the orientation of the field with respect to the surface of the film.     

缺陷对β-Ga2O3薄膜的结构和光学特性的影响

采用射频磁控溅射技术和后期退火在蓝宝石衬底上成功制备了β-Ga₂O₃薄膜。借助于X射线衍射(XRD)、拉曼散射光谱(Raman)、X射线光电子能谱(XPS)、以及二次离子质谱(SIMS)研究了缺陷对β-Ga₂O₃薄膜的结构和光学特性的影响。结果表明,未退火的Ga₂O₃薄膜呈现非晶态,随高温退火时间逐渐增加,非晶Ga₂O₃薄膜逐步转变为沿(-201)方向择优生长的β-Ga₂O₃薄膜。所有Ga₂O₃薄膜在近紫外到可见光区的平均透过率都高达95%,β相Ga₂O₃薄膜的光学带隙比非晶态薄膜增加~0.3 eV,且随退火时间的增加,β-Ga₂O₃薄膜的光学带隙也随之变宽。此外,发现非晶Ga₂O₃薄膜富含氧空位缺陷,高温退火处理后,β-Ga₂O₃薄膜中的氧空位浓度明显降低,但蓝宝石衬底中的Al极易扩散至Ga₂O₃薄膜层,并随退火时间的增加Al浓度明显增加,氧空位的降低和Al杂质的增加是导致β-Ga₂O₃薄膜光学带隙变宽的主要原因。     

Deposition of CeO2 films including areas with the different orientation and sharp border between them

Epitaxial films from one material, with sharp borders between contacting regions having different film orientation are grown on one surface of the substrate for the first time. The main reason for the deposition of thin ceria layers with mixed (001) and (111) orientations on a (1 02) sapphire substrate is determined. We suggest that this is related to the availability of surface defects which, in thin near-surface layers, deviate from stoichiometric composition. This in turn is connected with the loss of oxygen.

A technique for influencing CeO₂ film orientation is demonstrated. This involves specific preliminary processing of the substrate, and the selection of oxygen partial pressure during the deposition process.

High quality thin (30–50 nm) “protective” (001) CeO₂ epitaxial layers are prepared on (1 02) Al₂O₃. Structures comprising two epitaxial protective CeO₂ layers, orientations (001) and (111), are made on the base of (0001) and (1 02) sapphire substrates. The interface between the epitaxial layers is <1 000 nm.

Preliminary results using this method are described, and the possibility of creating a “bi-epitaxial” transition in thin YBa₂Cu₃O_7−x layers is explored.     

Characterization of intermetallic phases and oxides formed in annealed Ni/Al multilayer structures

Two different multilayer structures composed of ten alternating Ni and Al thin films were sputter deposited on Si (111) substrates. These multilayers with individual Ni and Al thin film thicknesses of about 25 nm and 38 nm and of 25 nm and 13 nm, respectively, have the average compositions of Ni_0.50Al_0.50 and Ni_0.75Al_0.25. The samples were heat treated in a differential scanning calorimeter instrument with a constant heating rate of 40 °C min ⁻¹ in Ar from room temperature to 550 °C. The compositions of as-deposited and heat-treated samples were studied with high-resolution Auger electron spectroscopy (AES) rotational depth profiling. X-ray photoelectron spectroscopy (XPS) analyses show an excess of Ni in both annealed samples. X-ray diffraction measurements of annealed multilayers show the formation of Ni₂Al₃ and NiAl₃ phases in the Ni_0.50Al_0.50 sample and the presence of Ni₃Al and Ni A1₃ phases with some excess of Ni in the Ni_0.75Al_0.75 sample. AES and XPS investigations of the reacted layers after 15 min annealing in air at 500 °C disclose considerably different surface oxide thin films: on the Ni_0.50Al_0.50 layer the oxide thin film consists of Al₂O₃ with a small amount of NiO, whereas that on the top of the Ni_0.75Al_0.25 layer is thicker and consists of NiO on top and some Al₂O₃ below.     

Microstructures, densification and mechanical properties of TiC–Al2O3–Al composite by field-activated combustion synthesis

Dense TiC–Al₂O₃–Al composite was prepared with Al, C and TiO₂ powders by means of electric field-activated combustion synthesis and infiltration of the molten metal (here Al) into the synthesized TiC–Al₂O₃ ceramic. An external electric field can effectively improve the adiabatic combustion temperature of the reactive system and overcome the thermodynamic limitation of reaction with x < 10 mol. Thereby, it can induce a self-sustaining combustion synthesis process. During the formation of Al₂O₃–TiC–Al composite, Al is molten first, and reacted with TiO₂ to form Al₂O₃, followed by the formation of TiC through the reaction between the displaced Ti and C. Highly dense TiC–Al₂O₃–Al with relative density of up to 92.5% was directly fabricated with the application of a 14 mol excess Al content and a 25 V cm⁻¹ field strength, in which TiC and Al₂O₃ particles possess fine-structured sizes of 0.2–1.0 μm, with uniform distribution in metal Al. The hardness, bending strength and fracture toughness of the synthesized TiC–Al₂O₃–Al composite are 56.5 GPa, 531 MPa and 10.96 MPa m^1/2, respectively.     

Growth of calcium carbonate by the atomic layer chemical vapour deposition technique

Thin films of CaCO₃ (calcite) have been grown with the atomic layer chemical vapour deposition (ALCVD) technique, using Ca(thd)₂ (Hthd=2,2,6,6-tetramethylheptan-3,5-dione), CO₂, and ozone as precursors. Pulse parameters for the ALCVD-type growth are found and self-limiting reaction conditions are established between 200 and 400 °C. Calcium carbonate films have been deposited on soda-lime glass, Si(100), -Al₂O₃(001), -Al₂O₃(012), -SiO₂(001), and MgO(100) substrates. The observed textures were: in-plane oriented films with [100](001)CaCO₃ [100](001)Al₂O₃ and [100](001)CaCO₃[110](001)Al₂O₃ on -Al₂O₃(001), amorphous films on -Al₂O₃(012) when grown at 250 °C, and columnar oriented films on soda-lime glass, Si(001), -SiO₂(001), and MgO(100) substrates with (00l) and (104) parallel to the substrate plane at 250 and 350 °C, respectively. The film topography was studied by atomic force microscopy and AC impedance characteristics were measured on as-deposited films at room temperature. The films were found to be insulating with a dielectric constant (_r) typically approximately 8. Thin films of CaO were obtained by heat treatment of the carbonate films at 670 °C in a CO₂-free atmosphere, but the thermal decomposition led to a significant increase in surface roughness.     

Al2O3/BaZrO3双陶瓷界面微观组织演化及机理

以Al₂O₃为背层(硅溶胶为粘结剂), 电熔BaZrO₃作为面层材料(钇溶胶为粘结剂), 1550℃烧结后制成50 mm×25 mm×5 mm的Al₂O₃/BaZrO₃双陶瓷试样。通过光学显微镜(OM)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)和EDS等手段观察了BaZrO₃层和Al₂O₃/BaZrO₃界面的显微结构, 研究了BaZrO₃与Al₂O₃的界面反应。结果表明, 面层由BaZrO₃基体和分布其上的大小10 μm左右的Y稳定的ZrO₂晶粒组成; Al₂O₃/BaZrO₃界面发生反应形成厚约300 μm的过渡层, 界面反应生成物有BaOAl₂O₃、ZrO₂和BaO·Al₂O₃·2SiO₂。界面从单纯的BaZrO₃/Al₂O₃双陶瓷结构演变为BaZrO₃、ZrO₂、BaO·Al₂O₃、BaO·Al₂O₃·2SiO₂和Al₂O₃等多种物相组成的复杂结构。反应过程中Al元素基本不迁移扩散, BaZrO₃中Ba元素向Al₂O₃所在的位置扩散形成BaO·Al₂O₃, 残留物形成一层条状ZrO₂, 而BaO·Al₂O₃·2SiO₂围绕着EC95(Al₂O₃+5%SiO₂)粉体颗粒周围生成。     

原子层沉积工艺制备催化薄膜厚度对生长碳纳米管阵列的影响

通过原子层沉积(ALD)工艺在硅基底依次沉积氧化铝缓冲层薄膜和氧化铁催化薄膜, 然后利用管式炉进行水辅助化学气相沉积(WACVD)生长垂直碳纳米管阵列(VACNTs)。结果表明: ALD工艺制备的氧化铁薄膜经还原气氛热处理可形成碳纳米管阵列生长所需的纳米催化颗粒; 氧化铁薄膜厚度与纳米催化颗粒大小以及生长出的碳纳米管阵列的结构密切相关。当氧化铁薄膜厚度为1.2 nm时, 生长出的碳纳米管阵列管外径约为10 nm, 管壁层数约为5层, 阵列高度约为400 μm。增大氧化铁薄膜的厚度, 生长出的碳纳米管阵列外径和管壁数增加, 阵列高度降低。实验还在硅基底侧面观察到了VACNTs, 表明ALD工艺可在三维结构上制备催化薄膜用于生长VACNTs。     

Formation of MgAl2O4 in Al2O3-(Al-4wt.%Mg) composites

The Al₂O₃ particles are introduced into the Al-4wt.%Mg melt by the “vortex” method. After being cast, Al₂O₃-(Al-4wt.%Mg) composites are remelted at 700, 750, 800 and 850°C for different residence times to investigate the formation of MgAl₂O₄ (spinel).

The results show that MgAl₂O₄ is the unique interface of the Al₂O₃-(Al---Mg) composites held at 700–850°C. Fine MgAl₂O₄ crystals grow on the surface of the Al₂O₃ particle but, as the holding temperature and the residence time increase, some spinels will form themselves into pyramidal shape. The MgAl₂O₄ grows not only at the matrix-particle interface but also on the surface of the composite specimens. The formation reactions of interfacial MgAl₂O₄ are as follows: Mg(1) + 2Al(1) + 2O₂(g) = MgAl₂O₄(s)3Mg(1) + 4Al₂O₃(s) = 3MgAl₂O₄(s) + 2Al(1) Both of them are equally important.     

镍基高温合金定向凝固用陶瓷型壳粘砂反应

以合金表面粘砂比例和粗糙度为优化指标,采用多指标正交实验设计方法,通过极差分析研究了定向凝固用陶瓷型壳面层粒度配比和Cr2O3添加剂对铸件表面质量的影响.结果 表明,铸件表面粘砂层的主要成分为Al2O3以及少量Cr、Ni等合金元素;调整陶瓷型壳面层的粒度级配能降低陶瓷型壳面层的孔隙率,使型壳面层形成致密的结构,从而减少...     

Surface characterization of GaN and AlGaN layers grown by MOVPE

Surface properties of GaN and Al_0.17Ga_0.83N materials grown by metal organic vapor phase epitaxy (MOVPE) were systematically investigated by X-ray photoelectron spectroscopy (XPS). Air-exposed samples showed highly non-stoichiometric surfaces, which included a large amount of natural oxides. Deposition of Al on the air-exposed GaN surface caused interfacial reactions, resulting in the formation of oxide layers including Al₂O₃ and Ga oxide at the interface. A natural oxide layer of AlGaN surface possessed a complicated composition distribution in depth where the Al-oxide component was dominant on the topmost layer. Such natural oxide layers were found to be removed from GaN and AlGaN surfaces after the treatment in an NH₄OH solution at 50°C for 10 min, resulting in oxide-free and well-ordered surfaces.     

Characterization of the Reaction Products That Develop in the Processing of Al2O3/BaZrO3 Laminated Composites

The absence of a chemical reaction at an interface is conventionally thought to be an important criterion in producing a tough ceramic matrix composite (CMC). As a result of this criterion, interphases in CMCs were chosen on the basis of their chemical reactivity. A weak interface results in crack deflection, crack bridging, and, in fiber-reinforced ceramics, fiber pullout, resulting in an increased fracture toughness. In this paper, we present microstructural observations on alumina (Al₂O₃)–barium zirconate (BaZrO₃) laminated composites wherein the reaction products that develop during processing resulted in sharp interfaces and appear to be weak enough to deflect cracks. These in situ reaction products in Al₂O₃–BaZrO₃ laminated composites were characterized with the use of a scanning electron microscope, an electron microprobe, and a transmission electron microscope. The phases that develop, ZrO₂, BaO·Al₂O₃, and BaO·6 Al₂O₃, produced sharp interfaces and are arranged in a sequence that could be predicted by using information from the phase diagram.     

Effect of volume fraction of carbon fibers on wear behavior of Al/Al2O3/C hybrid metal matrix composites

Wear behavior of Al/Al₂O₃/C hybrid metal matrix composites fabricated by squeeze casting method was characterized. The effects of volume fraction of carbon fiber on wear behavior of hybrid composites was investigated. Wear behavior of Al/Al₂O₃/C composites was characterized by the dry spindle wear test under various sliding speeds.

The wear resistance of Al/Al₂O₃/C composites was remarkably improved over Al/Al₂O₃ composites by adding carbon fibers to Al/Al₂O₃/C composites. Specifically, at the intermediate sliding speed the wear resistance of Al/Al₂O₃/C composites containing 8 vol.% carbon fiber was found to be better than that of the rest of the carbon hybrid composites. From fractographic studies, damaged sections in wear surfaces of hybrid composites at intermediate sliding speed were not observed due to the formation of solid lubrication film. The solid lubrication film which was formed as a result of adding carbon fibers improved the wear resistance of carbon hybrid composites because this film reduced the high friction force between MMCs and counter material.     

Growth of La2Mo2O9 films on porous Al2O3 substrates by radio frequency magnetron sputtering

Synthesis conditions of La₂Mo₂O₉ thin film by radio frequency (RF) sputtering technique on Al₂O₃ ceramic substrates are studied. It is found that the deposition temperature and oxygen partial pressure are the most important factors for obtaining pure La₂Mo₂O₉ films. Varying both parameters, Mo-rich, stoichiometric, and Mo-deficient films are obtained. With increasing the La:Mo ratio, films become denser. A crust layer is observed on top of the Mo-rich and the Mo-deficient films. The formation of the La₂Mo₂O₉ phase is discussed with respect to the sputtering mechanism.     

Processing, microstructure and properties of C40 Mo(Si,Al)2/Al2O3 composites

The C40 Mo(Si_0.75Al_0.25)₂/Al₂O₃ composites were prepared by spark plasma sintering (SPS) of mechanically alloyed (MA) powders. The Mo(Si_0.75Al_0.25)₂/0–20 vol.% Al₂O₃ materials, showing micron and submicron composite structure, possess a hardness of 13.9–14.6 GPa but a poor toughness of 1.78–1.80 MPa m^1/2. The addition of 30 vol.% Al₂O₃ leads to the formation of the micron C40 Mo(Si_0.75Al_0.25)₂/Al₂O₃ composite with an intergranular distribution of Al₂O₃, that results in a drop of the hardness to 10.2 GPa and an improvement of the toughness to 3.67 MPa m^1/2. The transition of the cleavage facets to the intergranular fracture with the addition of Al₂O₃ is assumed as the main toughening mechanism.     

Structure and surface termination of ZnO films grown on (0001)- and (112¯0)-oriented Al2O3

We have studied the surface termination of ZnO(0001¯) films grown on Al₂O₃ substrates with high epitaxial quality. The structural properties of the ZnO films were investigated by X-ray scattering, revealing a predominant (0001¯)ZnO out-of-plane texture with the [112¯0]_ZnO[0001]_Al2O3 and [112¯0]_ZnO[101¯0]_Al2O3 azimuthal orientations for (112¯0)Al₂O₃ and(0001)Al₂O₃ substrates, respectively. The surface termination was determined by X-ray photoemission spectroscopy (XPS) via pyridine (C₅H₅N) adsorption at the ZnO surface. XPS data recorded at different temperatures after exposure to pyridine revealed that for both orientations of the Al₂O₃ substrates the deposited ZnO films were terminated by oxygen atoms, i.e. corresponding to a ZnO (0001¯) surface.     

A low cycle fatigue model of a short-fibre reinforced 6061 aluminium alloy metal matrix composite

A low cycle fatigue model has been developed to predict the fatigue life of both the unreinforced aluminium alloy and the short-fibre reinforced aluminium alloy metal-matrix composites based solely on crack propagation from microstructural features. In this approach a crack is assumed to initiate and grow from a microstructural feature on the first cycle. The model assumes that there is a fatigue-damaged zone ahead of the crack tip within which the actual degradation of the material takes place. The low-cycle fatigue crack growth and the condition for failure are controlled by the amount of cyclic plasticity generated within the fatigue-damaged zone ahead of the crack tip and by the ability of the short fibres to constrain this cyclic plasticity. The fatigue crack growth rate is directly correlated to the range of crack-tip opening displacement. The empirical Coffin–Manson and Basquin laws have been derived theoretically and applied to compare with total-strain controlled low-cycle fatigue life data obtained on the unreinforced 6061 aluminium alloy at 25 °C and on the aluminium alloy AA6061 matrix reinforced with Al₂O₃ Saffil short-fibres of a volume fraction of 20 vol.% and test temperatures from −100 to 150 °C. The proposed model can give predicted fatigue lives in good agreement with the experimental total-strain controlled fatigue data at both high strain low-cycle fatigue and low strain high-cycle fatigue regime. It is remarkable that the addition of high-strength Al₂O₃ fibres in the 6061 aluminium alloy matrix will not only strengthen the microstructure of the 6061 aluminium alloy, but also channel deformation at the tip of a crack into the matrix regions between the fibres and therefore constrain the plastic deformation in the matrix. The overall expected effect is therefore the reduction of the fatigue ductility.     

Al2O3/环氧树脂-氰酸酯复合材料反应动力学及力学性能

以双酚A型环氧树脂(E51)和双酚A型氰酸酯(BCE)为原料,研究E51改性BCE共固化反应机制。同时,以E51-BCE为基体树脂,溶胶-凝胶法(Sol-Gel)自制Al2O3为增强体,制备Al2O3改性E51-BCE (Al2O3/E51-BCE)复合材料。通过非等温DSC确定了E51-BCE体系的固化工艺及固化反应动力学,并根据Kissinger法和Ozawa法求得体系的表观活化能分别为66.13 kJ/mol和69.46 kJ/mol。利用红外光谱跟踪固化体系在起始固化温度为160℃、 180℃时的反应历程,结果表明:起始固化温度在160℃时,以E51与BCE直接反应为主;起始固化温度在180℃时, BCE反应活性提高,以BCE自聚反应为主,生成三嗪环的速率加快,少量的BCE直接与E51反应生成恶唑啉结构。对Sol-Gel法自制Al2O3进行FTIR和TEM表征,结果表明:Al2O3为短纤维状的晶体,表面含有少量羟基。SEM结果显示:Al2O3为分散相,与基体间界面模糊, Al2O3/E51-BCE复合材料的脆断面裂纹不规则,为典型的韧性断裂;当Al2O3掺杂量为3wt%时, Al2O3在基体中分散均匀, Al2O3/E51-BCE复合材料的冲击强度和弯曲模量分别为24.2 kJ/m2和2.54 GPa,比基体树脂的冲击强度和弯曲模量分别提高53.65%和22.12%,力学性能得到明显改善。     

Improvements in mechanical properties of TiB2 ceramics tool materials by the dispersion of Al2O3 particles

TiB₂–Al₂O₃ composites with Ni–Mo as sintering aid have been fabricated by a hot-press technique at a lower temperature of 1530 °C for 1 h, and the mechanical properties and microstructure were investigated. The microstructure consists of dispersed Al₂O₃ particles in a fine-grained TiB₂ matrix. The addition of Al₂O₃ increases the fracture toughness up to 6.02 MPa m^1/2 at an amount of 40 vol.% Al₂O₃ and the flexural strength up to 913.86 MPa at an amount of 10 vol.% Al₂O₃. The improved flexural strength of the composites is a result of higher density than that of monolithic TiB₂. The increase of fracture toughness is a result of crack bridging by the metal grains on the boundaries, and crack deflection by weak grain boundaries due to the bad wetting characters between Ni–Mo and Al₂O₃.