长条形空间反射镜轻量化及其支撑结构设计

为保证空间反射镜在空间应用环境中保持高位置精度和面形精度,实现良好成像,从结构材料的选择、反射镜轻量化设计及支撑结构设计三个方面对某长条形空间反射镜进行了详细的结构设计。提出了一种底面局部开口、三角形加强筋的轻量化形式,反射镜采用背部三点支撑方案,通过合理设计柔性支撑结构参数,使反射镜保证了高刚度和热尺寸稳定性要求。采用有限元法对反射镜系统进行了静、动态特性和热特性分析。分析结果表明:自重及5 ℃均匀温变载荷工况下,反射镜面形精度达到λ/10 PV,λ/50 RMS（λ=632.8 nm）;反射镜组件一阶固有频率230 Hz,具有足够高的动静态刚度和热尺寸稳定性,满足空间应用要求。     

空间相机反射镜SiC/Al 支撑板轻量化结构优化设计

在保证空间光学遥感相机反射镜组件结构刚度、位置精度、面形精度的同时,最大限度地降低反射镜支撑板的质量,是轻量化设计的一个重要内容。提出了通过拓扑优化确定反射镜用SiC/Al 材料的背部支撑板轻量化形式的方案。采用有限元分析法对获得的优化结果进行分析。分析结果表明: 重力载荷下面形精度达到/10 PV,/50 RMS（=632.8 nm）,PV 值13.3 nm,RMS 值2.9 nm,反射镜组件一阶固有频率239 Hz,均优于传统结构形式的反射镜。拓扑优化的方法获得的轻量化背部支撑板能够满足使用要求。     

单反式光端机反射镜柔性支撑参数化设计与试验

为保证单反式光端机指向捕获跟踪(Pointing, acquisition and tracking, PAT)时反射镜在恶劣空间环境下的面形精度,设计了一种底面开槽的柔性支撑结构。由于柔性支撑结构参数较多,为避免各参数之间严重耦合,采用正交优化方法对柔性支撑结构进行参数优化设计,再利用有限元方法对反射镜组件进行热力学特性分析。仿真分析结果表明,反射镜组件一阶频率为352.61 Hz,在1g重力和10℃温升(温降)共同作用下的最大面形误差RMS为λ/54.79(λ=623.8 nm),能够满足动、静态刚度和热尺寸稳定性要求。使用ZYGO干涉仪在(20±10)℃温度范围内对反射镜面形进行检测,结果表明,反射镜面形PV值优于λ/6,RMS优于λ/43,满足RMS≤λ/40的指标要求。实验结果表明,柔性支撑参数设计可靠,满足使用要求。     

大口径空间反射镜组件结构设计与分析

设计了某1.2 m口径的空间光学反射镜结构及其支撑结构系统。首先,合理选取了反射镜及其支撑结构的材料。从反射镜镜坯制作工艺、力学特性、热特性以及反射镜重量等因素考虑,最终选取基于反应烧结SiC材料的背部半开放式扇形轻量化孔的反射镜结构形式,反射镜设计重量为87.6 kg,轻量化率达到79%。其次,确定了在光轴水平状态下进行检测装调的方案,并进行其支撑结构的设计,采用3个双轴柔性铰链从背部对反射镜支撑,使大口径反射镜同时满足静态刚度、动态刚度、强度和热尺寸稳定性的要求。最后,对反射镜进行了组件级有限元分析。结果表明,反射镜在X向重力和4℃均匀温升作用下面形RMS分别为7.8 nm和9.4 nm,反射镜组件一阶固有频率为153 Hz,满足设计指标要求。     

中心支撑长条形反射镜轻型优化设计

针对轻小卫星相机质量更轻、性能更好的设计要求,对空间某中等口径的长条形反射镜提出一种基于中心支撑形式的轻型优化设计方法。选用背部中心单点支撑形式,不仅从整体上减小了反射镜及其组件的质量,而且大大简化了支撑结构的设计。采用多目标集成优化的方法,提高了反射镜在Z向重力工况下的面形精度。设计了适用于中心支撑的柔性支撑结构,克服了中心支撑刚度低、动态可靠性差的缺点。仿真分析了反射镜及其组件的综合性能,并与背部三点支撑形式进行了比较。结果表明,中心支撑的反射镜质量更轻（3.36 kg）,与实体反射镜相比,轻量化率达到了87%,组件质量也较三点支撑减小了24%;在X、Y、Z三轴方向1 g重力工况下的面形精度RMS值分别达到2.2、2.1、7.5 nm,优于三点支撑形式;4℃均匀温升载荷工况下的面形精度RMS值为2.8 nm,远小于设计要求的RMS 12 nm;反射镜组件的一阶固有频率为135 Hz,重力作用下镜面的最大刚体位移为3.96 m。该设计在极大地减小了反射镜及其组件质量的同时,保证了反射镜的面形精度和组件的动、静态刚度,满足设计要求,为同类型空间反射镜的轻型优化设计提供了一种新思路。     

大口径空间反射镜轻量化设计及其柔性支撑

设计了空间相机1.5 m口径反射镜组件的结构系统。首先,根据反射镜材料选取原则,选用SiC作为反射镜镜坯材料。初步确定了反射镜支撑方式、镜体结构参数,并对反射镜进行轻量化设计。通过对反射镜结构参数进行优化,得到重为152.4 kg的反射镜结构,轻量化率达到83%。然后,设计了一种双轴柔性铰链结构,并找出了在装调方向柔性铰链安装位置对面形精度的影响规律,利用有限元法对反射镜组件进行了动、静态特性及热特性分析,结果表明,反射镜组件一阶固有频率为100.6 Hz,在1 g重力及4 ℃均匀温升工况下反射镜面形精度RMS值分别为7.7 nm和8.4 nm。最后,对反射镜组件进行动力学试验及面形精度检测,结果表明反射镜组件完全满足设计指标要求。     

低温反射镜组件结构设计与支撑特性分析

红外光机系统在低温环境工作能够抑制背景噪声提高探测灵敏度,也提高了反射镜组件结构设计难度。低温反射镜支撑结构设计主要问题是由反射镜与连接件热线胀系数不同导致的温度变化工况下的面形变化。对工作于240 K的?450 mm反射镜组件进行结构设计,反射镜材料为SiC,连接件材料为殷钢,采用背部中心单点支撑形式与三角形轻量化形式,并设计柔性连接件提高低温面形表现。对主要设计参数进行优化分析,得到各参数对面形的影响曲线。优化后,反射镜光轴方向重力面形为8.585 nm,径向重力面形3.710 nm,240 K低温面形5.086 nm,一阶模态277 Hz,轻量化率89.4%。     

空间引力波望远镜主镜组件的结构设计

针对空间引力波望远镜皮米量级的极高光程稳定性需求,对系统中主镜组件进行了优化设计。采用微晶玻璃（Zerodur）作为反射镜材料,支撑结构材料为铟钢（4J36）。首先,通过对反射镜参数的优化,使其在保证面形精度的同时镜体轻量化率达到了72%。然后,设计了一种双轴联杆型Bipod柔性反射镜支撑结构,并采用了侧面三点支撑的形式。以保证有效的支撑刚度及卸载效果为目的,建立了柔性铰链的数学模型,并基于Matlab对其尺寸参数进行了优化。最后,对优化设计后主镜组件进行了模态分析及振动试验,并完成了在轨分析与波前质量计算。结果显示,主镜组件的一阶固有频率为373 Hz,与试验结果的相对误差为3.5%;在轨环境下主镜面形精度达到8.9 nm（RMS）;波前精度为/5（=1 064 nm）。表明该反射镜组件满足设计指标要求。     

空间相机大口径反射镜轻量化技术及应用

空间相机反射镜尺寸和质量对系统的光学性能、机械性能和热稳定性等具有重要影响,因此对其进行轻量化设计具有重要意义。文中从材料的选择、背部基体形状、轻量化孔形式、支撑方式对某空间大口径反射镜进行了详细的结构设计,采用理论论述与有限元分析相结合的方法,提出了一种背部开放式、三角形孔的轻量化结构形式,通过合理设计反射镜支撑点数目和位置,使反射镜组件在重力工况下,镜面面形精度达到成像质量要求,即PV值不大于63.2 nm。     

空间光学遥感器长圆形反射镜组件优化设计与分析

为了减轻空间光学遥感器反射镜的镜体质量,并降低反射镜在恶劣空间环境下的面形误差,利用有限元技术对某长圆形反射镜组件进行了优化设计。首先在反射镜进行轻量化后,对其进行支撑点位置优化和结构拓扑优化;其次对柔性支撑进行优化设计,引入了一种新型柔性铰链,解决了因背板热变形导致反射镜径向变形的问题,改善了反射镜面形精度。优化后的反射镜面形RMS 最大值为14.6 nm,小于/30（=632.8 nm）,一阶固有频率大于100 Hz,满足了设计要求,证明了该优化设计方法合理可行。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.