飞秒激光在掺Yb~(3+)磷酸盐玻璃中刻写双线型光波导的研究

利用重复频率为50 k Hz,中心波长为790 nm,脉冲宽度为140 fs的飞秒激光脉冲在掺Yb3+磷酸盐玻璃中刻写双线型光波导。研究了双线间距,激光脉冲能量和刻写速度对波导形成的影响,并测试了不同刻写参数下波导的导光模式。实验结果表明,在双线间距为35μm,激光脉冲能量为1.0μJ,刻写速度为600μm/s的条件下写入的光波导导光性能最优;利用近场模式重建了激光诱导该波导的折射率二维分布,波导区域相对于基质的最大折射率改变为1.5×10-4,并利用散射法测试了波导的传输损耗,传输损耗为1.56 d B/cm。发现了波导具有偏振导光现象,偏振态平行于双线方向的激光可以导通,偏振态垂直于双线方向的激光不能导通。     

兆赫兹飞秒激光脉冲制备“珍珠串”光波导

对纳焦量级的高重频飞秒激光在玻璃内部制备"珍珠串"光波导进行了研究。在制备过程中向外辐射出白光连续光谱,实验结果表明飞秒激光脉冲能量和运行速度对"珍珠串"光波导的形成有较大影响,在激光脉冲能量10.5 nJ,玻璃运行速度为0.2 mm/s情况下制备的"珍珠串"光波导结构较好,"珍珠串"的横向宽度为19μm,"珍珠串"的间隔周期为20μm。制备的"珍珠串"光波导能对玻璃内传输的He-Ne激光进行有效约束。最后对玻璃内部制备"珍珠串"光波导的机制进行了分析。     

飞秒激光在钛蓝宝石晶体中刻写双线型波导的研究

钛蓝宝石晶体作为一种重要的激光介质,具有宽带的吸收光谱及宽带可调谐的发射光谱等特性,使其在集成光学中有广泛的应用前景。这里利用重复频率为1 k Hz,中心波长为800 nm,脉冲宽度为120 fs的飞秒脉冲激光在钛蓝宝石晶体中横向刻写双线型波导,系统地研究了激光写入晶体深度、刻写速度以及波导双线间距对波导导光情况的影响,在写入激光脉冲能量为2μJ,写入深度为175μm,刻写速度为90μm/s,波导双线间距为26μm的条件下,得到一组导光模式较优的双线波导并发现其具有偏振导光现象。利用波导的近场模式强度分布重构了其折射率分布图,得到最大的折射率增加量为1.9×10-4。用散射法测试了光波导的传输损耗为1.82 d B/cm。     

飞秒激光制备波导型光合波器的数值模拟

为了对飞秒激光加工微纳米尺度波导器件的可行性进行分析,采用有限差分光束传输法对余弦型Y波导合波器的耦合夹角大小对合路光场的影响进行了仿真模拟,分析了光场强度、分支角度以及损耗等之间的关系,得到当耦合夹角为0.6rad时,输入光场相互隔离,附加损耗低至0.45dB,传输效率接近90%的结果。结果表明,在石英玻璃这种高损伤阈值的材料中利用飞秒激光直写制备光合波器件时,预先对加工的微纳器件进行仿真模拟,在微纳光子集成及微纳米光波导中具有很重要的意义。     

飞秒激光刻写z切LiNbO3晶体形成通道光波导

在z切LiNbO3晶体上进行飞秒激光刻写通道光波导的实验研究.利用光学显微镜研究了光波导的微观结构;在633 nm波长下,端面耦合得到光波导的近场光强分布,波导区为飞秒激光聚焦的区域,TE和TM偏振下都形成了光波导模.研究了激光扫描速度和脉冲能量对刻写质量的影响,结果发现,激光脉冲能量在2.0μJ左右、扫描速度在0.6...     

激光直写技术制备SiO2-TiO2条形光波导工艺研究

为了研究激光直写技术在光波导制备中的应用,采用波长为1.07μm的连续光纤激光器制备了硅基SiO2-TiO2条形光波导。探讨了激光直写技术制备条形光波导的原理,研究了激光参数对条形光波导宽度的影响,最后测试了光波导的通光模场以及光传输损耗。结果表明,条形光波导的宽度随着激光功率密度的增加而增大。当激光扫描速率在0.1mm/s~1mm/s范围内变化时,条形光波导的宽度随着激光扫描速率的增加而降低;高于1mm/s时对波导宽度无明显影响。在优化的工艺参数下,激光直写得到的条形波导的厚度约为0.4μm,宽度为120μm,整条波导非常均匀、准直性很好,对于1550nm波长的光呈多模传输,最小传输损耗为1.7dB/cm。     

飞秒激光背部湿刻石英玻璃微通道的研究

为了获得飞秒激光背部湿刻石英玻璃微通道的最佳参量,通过分别改变飞秒激光的功率、刻蚀速率和显微物镜的放大倍数进行了实验。采用超景深显微镜对加工样品进行观察和测量,并分析了微通道的形貌。结果表明,在飞秒激光功率为50mW、刻蚀速率为0.010mm/s、20×显微物镜聚焦的实验条件下,可以制备出深度为1466μm、深宽比为32的石英玻璃微通道。此研究对3维结构维纳制造技术有一定的应用价值。     

飞秒激光直写透明光学材料光波导的研究进展

综述了飞秒激光直写光波导的加工过程和表征方法、可直写形成光波导的不同透明光学材料以及直写光波导应用的进展。总结了飞秒激光直写引起的折射率变化与材料有关,同时还依赖于加工的脉冲能量、脉冲宽度、偏振以及扫描速度等。指出飞秒激光微加工在光子器件领域的有很好的应用前景。     

高重复频率飞秒激光烧蚀熔融石英制作单偏振微结构波导

利用中心波长为1040nm、脉宽为190fs、重复频率在200～5000kHz之间可调的飞秒激光对熔融石英进行微加工。研究了烧蚀阈值随脉冲重复频率、扫描速度的变化规律,阐明不同参数下热扩散效应及热累积效应对烧蚀过程的主导作用。在最优化条件下,制作了双线波导,可以对1040nm激光实现圆形基模传输。进一步制作了椭圆晶胞的六角微结构波导,对1040nm激光可以输出近高斯强度分布的基模,模场面积达到247.48μm2。该微结构波导可实现单偏振传输,消光比达9.05,波导数值孔径约0.017。     

石英玻璃与硅的飞秒激光微连接及其接头性能研究

飞秒激光的低热输入、极小热影响区的特点使其在微纳米尺度材料连接领域有明显的优势。为了将石英玻璃与硅可靠地连接在一起,使用功率为4~30 m W,频率为1 k Hz,波长为800 nm的飞秒激光对石英玻璃与硅进行连接,测试了接头的剪切强度,对接头横截面进行腐蚀处理,观察截面,分析了接头断裂前后的形貌特征,研究了激光参数,如激光功率、扫描速度、聚焦物镜的数值孔径以及离焦量对接头强度的影响规律。实验结果表明,根据焊接工艺的不同,接头强度分布在7~54 MPa之间。将激光准确定位到界面处,在合适的激光功率和扫描速度下可以降低焊缝缺陷,得到剪切强度较高的接头。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.