Effect of Discharge Power in a Plasma during Reactive-Ion Etching of Massive Substrates on the Matching of the Lower Electrode with a High-Frequency Bias Generator

Russian Microelectronics - The influence of the discharge power in plasma during the reactive-ion etching of massive substrates on the matching of the lower electrode with a high-frequency bias...     

Microprofile formation by thermal oxidation of molybdenum films

The possibility of forming a microprofile in diffractive optical elements by thermal oxidation of thin molybdenum films is analyzed. It is shown that the gain in the thickness of a starting film in the thermal oxidation process may reach a threefold value, with the optical quality of the surface preserved.     

Structure of Interphase Boundaries in Bimetallic Thin Films

The structural transformation in thin films of bimetals in the dependence on temperature and concentration of vacancies was investigated. The system Ni-Al structural transformation was realized by computer design according to the mechanism of self-sustained high(temperature synthesis. Structural transformation is characterized by the presence of dislocations, clusters of point defects and germs of intermetallic phases near interphase boundaries.     

Synthesis of nanooxides in two-phase laminar flames

This paper deals with a method for production of nanopowders of high-melting metal oxides by burning the starting metal powders in a laminar disperse flame. The method is called gas-dispersed synthesis. The combustion-zone structure for a laminar diffusion dispersed flame and for a laminar flame of premixed fuel and oxidizer was studied experimentally. Information was obtained on the temperature of combustion gases and its spatial distribution, the temperatures of the burning particles and of the condensed combustion products, and the combustion regimes of metal particles. The dependence of the properties of the resulting oxides on the flame and combustion-zone parameters and the mechanism of particle combustion is studied. Based on the results, an attempt is undertaken to reproduce the mechanisms of formation and growth of the condensed phase under conditions of laminar diffusion flames. The mass-averaged particle size of the oxide powders is estimated.Translated from Fizika Goreniya i Vzryva, Vol. 32, No. 3, pp. 24–33, May–June, 1996.