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新型光刻技术的现状与进展 总被引:1,自引:0,他引:1
大尺寸、细线宽、高精度、高效率、低成本成为IC产品发展的趋势,随着集成度的提高,芯片制造中最关键的制造工艺--光刻技术也面临着愈来愈多的难题.新兴的193 nm浸入式技术、157 nm极短紫外光刻(Euv)、电子束投影光刻(EPL)、纳米压印光刻等技术将是解决这些问题的关键.介绍了193nm浸入式技术、157nm光刻技术、电子束投影(EPL)光刻技术以及纳米压印光刻技术.指出纳米压印光刻技术具有生产效率高、成本低、工艺过程简单等优点,能实现分辨率达5 nm以下的水平,是最具发展前途的下一代光刻技术之一. 相似文献
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微纳加工技术推动着集成电路不断缩小器件尺寸和提高集成度,而电子束光刻在纳米光刻技术制作中是最好的方法之一。介绍了近年来电子束光刻技术的研究进展及其在微%纳器件研制中的重要作用。 相似文献
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自1959年集成电路发明以来,它已经对人类的生产和生活方式的很多方面产生了极其重大的影响。集成电路正以线宽每年缩小30%、集成规模增长1倍、芯片价格随之下降的惊人速度发展。光刻技术的发展始终是集成电路发展的决定因素。本文综述了深亚微米光刻和纳米光刻技术。在光学光刻部分,简要描述了光刻的历史演变,较详细综述了光学光刻的最新进展,如相移掩模、离轴照明及深紫外曝光。最后介绍了电子束曝光及X射线曝光的发展状况及SIM纳米加工的发展状况。 相似文献
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超微细图形加工技术进展 总被引:1,自引:0,他引:1
自1959年集成电路发明以来,它对人类的生产和生活方式的很多方面产生了极其重大的影响。集成电路正以线宽每年缩小30%,集成规和工1倍,芯片价格随之下降的惊人 展。光刻技术的发展始终是集成电路发展的决定因素。本文综述了深亚微米光刻和纳米光刻技术。 相似文献
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Steffen Müller-Probandt 《材料科学与工程:中英文B版...》2018,(4):161-177
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di... 相似文献
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A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils. 相似文献
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Janet Lang 《Materials and Manufacturing Processes》2017,32(7-8):857-866
ABSTRACTThe production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them. 相似文献
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Standards are the basis for production enterprises to organize production ex-factory inspection trade 《中国标准化(英文版)》2008,25(1):24-25
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.…… 相似文献
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S. K. Malhotra Paramanand Singh A. Thirunavukkarasu 《Materials and Manufacturing Processes》2006,21(7):652-657
Al2O3-ZrO2 nanocomposites were developed starting with the solgel process. Composite alumina-zirconia nanopowders were synthesized from metallorganic precursors (Aluminium secondary butoxide and zirconium Iso propoxide) using the solgel process. The parameters affecting the synthesis—solvent, concentration of precursor, R/H ratio (i.e., dilution of water in solvent)—were varied as also the temperature and pH. BET and TEM were used to measure nanosize. Diffuse reflectance spectroscopy and also qualitative optical absorption led to identical particle size estimate. The variation of process parameters was used to study the effect and interdependence of process parameters. Artificial Neural Networks was used to rigorously analyze the process. Although this led to confirmation of interdependence of parameters, the presence of a single overwhelming solvent variable was also established. Then the optimal process was used to synthesize more nanopowder. To produce bulk nanocomposite the nanopowders were sintered by varying the temperature and time period. The sintered lithoids were probed with a vickers hardness tester to measure elastic modulus, hardness, and fracture toughness. The results showed high elastic modulus, modest hardness, and very high fracture toughness. 相似文献
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The end of over unit products of more than Chinese firms have passed the quality grade certification for liquor products. These products involve distilled spirits beer wine yellow wine fruit syrup wine others cover over % of the national top-branded liquor products.…… 《中国标准化(英文版)》2008,25(1):30
The end of 2007, over 200 unit products of more than 80 Chinese firms have passed the quality grade certification for liquor products. These products involve distilled spirits, beer, wine, yellow wine, fruit syrup wine and others, and cover over 80% of the national top-branded liquor products.…… 相似文献
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Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster. 相似文献
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N.A. Odintsova N.V. Ageenko K.V. Kiselev N.M. Sanina E.Y. Kostetsky 《International Journal of Refrigeration》2006,29(3):387
We studied a combined effect of the cryoprotectants both of lipid and carbohydrate origin at the presence of DMSO or without it on cell viability and the RNA synthesis in the embryonic mollusc and echinoderm cell cultures obtained at different developmental stages. Cryoprotective properties of exogenous lipids correlated with their thermotropic behavior. Lipid extracts from marine hydrobiontes, which thermal transitions are characterized by relatively small part of calorimetric thermogram area lying at temperatures above 0 °C (6–18%), were found to possess a considerable cryoprotective activity. The results are discussed in relation to the prediction of the cryoprotective activity of lipid extracts for marine animal cells. In addition, it was found that marine invertebrate cells can be cryopreserved without DMSO at the presence of trehalose and lipid extracts of some marine hydrobiontes. 相似文献
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Friction Stir Processing Strategies for Uniform Distribution of Reinforcement in a Surface Composite
Vipin Sharma Yashpal Gupta Ujjwal Prakash 《Materials and Manufacturing Processes》2016,31(10):1384-1392
Friction stir processing (FSP) is an important technique for preparing surface composites. Fabricating defect-free surface composites with uniform particle distribution by FSP is a challenging task. In this study, silicon carbide particles reinforced AA5083 alloy surface composites was fabricated using different FSP strategies including variation in process parameters, dual-tool processing and tool offset overlapping. Material flow of the processed material with reinforcement particles demonstrated that the distribution of particles was influenced by the stirring action of the probe as well as the extrusion of the plasticized material due to the movement of the tool. Process parameters, particularly rotational speed, showed a dominant influence on the distribution of silicon carbide particles. 相似文献
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David R. Smith F. R. Fickett 《Journal of research of the National Institute of Standards and Technology》1995,100(2):119-171
Pure silver is used extensively in the preparation of high-temperature superconductor wires, tapes, films, and other configurations in which the silver not only shields the superconducting material from the surrounding materials, but also provides a degree of flexibility and strain relief, as well as stabilization and low-resistance electrical contact. Silver is relatively expensive, but at this stage of superconductor development, its unique combination of properties seems to offer the only reasonable means of achieving usable lengths of conductor. In this role, the low-temperature physical (electrical, thermal, magnetic, optical) and mechanical properties of the silver all become important. Here we present a collection of properties data extracted from the cryogenic literature and, to the extent possible, selected for reliability. 相似文献