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采用热丝辅助微波电子回旋共振化学汽相沉积(MW ECR-CVD)系统制备氢化非晶硅(a-SiH)薄膜.实验证明在原有的MW ECR-CVD基础上加入热丝辅助系统能有效提高a-SiH薄膜的沉积速率并大幅改善薄膜的稳定性;薄膜的沉积速率随着沉积压强的增加和热丝温度的上升而增加.通过光致衰退实验,将样品衰退前后的红外吸收谱图进行基线拟合和高斯函数拟合,计算得到薄膜的氢含量基本不发生变化,但Si-H与Si-H2组态的相对含量改变. 相似文献
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用热丝辅助微波电子回旋共振化学气相沉积制备样品,通过红外吸收谱图和光衰退图,分析影响a-SiH薄膜光衰退稳定性的因素一方面,非晶硅网格中氢含量、氢硅键合方式以及氢的运动情况均对非晶硅材料的稳定性起着十分重要的作用,另一方面,在非晶硅的基体上生长少量微晶硅,可提高薄膜的稳定性.最终希望能通过两者的结合来探讨如何制备高光敏性和低光致衰退的非晶硅薄膜. 相似文献
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我们用热丝辅助MW ECRCVD系统,在热丝温度分别为0、1350、1400、1450、1500、1600和1700℃时制备出a-SiH薄膜.通过膜厚测定,红外光谱分析光、暗电导测量等手段,分析了其沉积速率、光敏性及光学带隙的变化规律.结果表明沉积速率和薄膜质量均得到明显的提高,沉积速率超过3nm/s,光暗电导之比提高到6×105.找到最佳辅助热丝温度为1450℃.通过对带隙值的分析,发现当带隙值在1.6~1.7范围内时,薄膜几乎都具有105以上的光暗电导之比. 相似文献
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本文采用HWA-MWECR-CVD系统制备了微晶硅薄膜。研究了氢稀释比、反应压强以及微波功率对微晶硅薄膜非晶转微晶相变及其相关性能的影响。实验结果表明:当氢稀释比为94%、反应压强为1.5Pa以及微波功率为500W时,高质量的微晶硅薄膜可以被获得,如2.86*104的高光敏性,1nm左右的沉积速率以及8.9%的光致衰退速率等。 相似文献
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采用热丝化学气相沉积法(HWCVD),在很近的热丝与衬底距离(5 mm)下沉积多晶硅薄膜,研究了热丝温度、SiH4浓度对多晶硅晶粒取向和晶粒尺寸的影响规律。结果表明:当热丝温度在1400℃~1800℃变化,衬底温度225℃~320℃时,沉积出多晶硅薄膜的择优取向随温度升高的变化规律是(111)→(220)→(111);在低的灯丝温度(≈1450℃)和低的衬底温度(≈235℃)条件下,获得了晶粒横向尺寸大于1μm、垂直尺寸大于5μm的均匀致密的多晶硅薄膜。 相似文献
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A method is proposed for estimating the parameters of a mixture of exponential and Weibull distributions for which the accuracy of preliminary estimates obtained by graphical analysis is refined in accordance with the criterion of maximum likelihood. The efficiency of the proposed method is supported by the results of statistical modeling. 相似文献
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O'Brien RS 《Radiation protection dosimetry》2003,105(1-4):95-100
Australia has several uranium mines and a large number of mineral sand mines, with associated processing facilities. Exposures resulting from these mining and processing operations usually involve intakes of mixtures of radionuclides. This work describes the development of a suite of first order, linear compartment models, based on the ICRP Publication 66 respiratory tract model, and an analytical solution to the decay equations, for assessing the consequences of such intakes. The computer programs based on these models directly compute excretion, organ retention and organ and whole-body doses for intakes of either single radionuclides or any mixture of radionuclides belonging to the same radioactive decay chain. The intake can be via inhalation, ingestion or injection, and can be acute, chronic or of limited duration. The starting concentration and degree of secular (dis)equilibrium can be specified for each radionuclide. No assumptions need to be made about the relative magnitudes of the radioactive half-lives of the different nuclides. 相似文献
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本文根据多年的实践检定经验 ,参照JJF1 0 59- 1 999《测量不确定度评定与表示》以及《测量不确定度表达 1 0讲》 ,对卧式金属罐容量的测量结果不确定度进行了评定。 相似文献
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An approximate analytical expression is derived for the velocity of the front of the wave of change of boiling modes on a
rod and on a plate. The impact of the Thomson effect and of the heater orientation in the gravity field is included. Adequate
agreement is demonstrated between the derived relations and experimental data. 相似文献
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Liebert A Wabnitz H Grosenick D Möller M Macdonald R Rinneberg H 《Applied optics》2003,42(28):5785-5792
A novel method for the determination of the optical properties of tissue from time-domain measurements is presented. The data analysis is based on the evaluation of the first moment and the second centralized moment, i.e., the mean time of flight and the variance of the measured distribution of times of flight (DTOF) of photons injected by short (picosecond) laser pulses. Analytical expressions are derived for calculation of absorption and of reduced scattering coefficients from these moments by application of diffusion theory for infinite and semi-infinite homogeneous media. The proposed method was tested on experimental data obtained with phantoms, and results for absorption and reduced scattering coefficients obtained by the proposed method are compared with those obtained by fitting of the same data with analytical solutions of the diffusion equation. Furthermore, the accuracy of the moment analysis was investigated for a range of integration limits of the DTOF. The moment analysis may serve as a comparatively fast method for evaluating optical properties with sufficient accuracy and can be used, e.g., for on-line monitoring of optical properties of biological tissue. 相似文献
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V. T. Bublik A. I. Voronin E. A. Vygovskaya V. F. Ponomarev N. Yu. Tabachkova O. V. Toropova 《Inorganic Materials》2011,47(14):1563-1568
An analysis of anisotropy of the properties of a Bi2Se0.3Te2.7 solid solution was carried out using construction of demonstrative surfaces for thermoelectric effectiveness and thermal
expansion coefficients. It is shown that the texture is an important factor forming anisotropy of properties and technological
fitness of ingots for manufacturing modules. Anisotropy of properties based on the studies of the ingot textures obtained
using the float-zone method and Bridgman method (growing thermoelectric plates in a flat cavity) was studied. 相似文献