MEMS结构中碳纳米管的电泳沉积及其场发射特性研究

利用电泳沉积的方法在MEMS结构特定位置上组装碳纳米管薄膜,以此作为发射体研制基于碳纳米管场发射的传感器,并对其场发射进行了测试和分析.电镜观测与场发射实验结果表明,利用电泳沉积方法可以只在MEMS结构的特定位置沉积碳纳米管薄膜,对于4μm的发射间隙、该薄膜的场发射开启电压约为3.6V～4V,发射电压20V时的发射电流可至28μA.这种“post-MEMS“的碳纳米管薄膜组装方法具有工艺简单的特点,同时避免了碳纳米管生长对MEMS工艺环境以及器件的污染、破坏,实现了纳米材料组装与MEMS工艺的兼容.     

MEMS薄膜平均应力梯度及等效弹性模量在线提取方法

薄膜沿厚度方向的平均应力梯度及薄膜的弹性模量对器件性能有重要影响.提出了一种利用静电作用下悬臂梁的吸合电压提取薄膜沿厚度方向的平均应力梯度及等效弹性模量的方法,该方法的关键在于实现悬臂梁吸合电压的快速精确计算.考虑了悬臂梁由应力梯度引起的沿宽度方向的弯曲及实现其固定端接近理想固支的方法,提高了吸合电压的计算精度.实际模拟表明该测量方法计算速度快、精度高,能够应用于实际工艺过程中材料参数的在线测量.     

基于数据采集的MEMS薄膜材料参数在线测试系统

建立了一套基于数据采集的MEMS薄膜材料参数在线测试系统.该系统包括测试图形,测试信号处理电路及外围附件和专用软件,能自动完成薄膜材料参数的在线测试.测试方法和测试设备简单,能用于工艺线上的在线测试.     

MEMS薄膜热流传感器研制

基于微加工技术设计制备了一种微机电系统(MEMS)薄膜热流传感器。采用COMSOL软件,对不同结构参数MEMS薄膜热流计进行仿真模拟,通过对仿真结果对比和分析,优化热流传感器的设计参数。根据优化的设计参数利用MEMS工艺制备薄膜热流计。搭建了标定系统,对所制备的MEMS薄膜热流计进行性能测试和标定。实验结果表明:薄膜热流计的电压输出响应曲线的变化趋势和仿真结果一致,此外,薄膜热流计的输出电压和热流密度呈良好的线性关系。     

微机械薄膜热膨胀系数的测试结构

在微电子机械系统(MEMS)领域,薄膜的热膨胀系数对于微电子器件、MEMS器件,尤其是微热执行器的设计是一个十分重要的参数.本文详细介绍和分析了薄膜热膨胀系数的几种测试结构,对于微机械薄膜热膨胀系数在线测试结构的设计有一定的参考价值.     

微机械薄膜应力的在线测试结构

微机械薄膜应力对MEMS器件有较大的影响，因此应力测量对于工艺监控和MEMS器件设计是必须的。介绍了微机械薄膜应力的在线测试结构与方法，详细分析了各种方法的特点。对于MEMS薄膜应力测试结构设计有一定的参考价值。     

MEMS薄膜弹性模量及残余应力提取的数值算法

材料弹性模量、残余应力的在线提取,已成为MEMS领域中日益迫切的需要。文中首先简要介绍现有的一些主要的材料参数提取方法,然后提出了一种无需静电作用下两端固支梁吸合电压的显式解析表达式,而是利用决定静电作用固支梁弯曲挠度的微分方程直接计算吸合电压,再提取材料参数的算法。避免了在推导吸合电压的显式表达式过程中可能引入的误差,有利于保证材料参数测量的精度。模拟结果表明这种算法速度快、精度高,对实际应用有较好的参考价值。     

一种微机械加速度计的自检测特性研究

采用静电力驱动质量块产生等效加速度信号实现了微机械加速度计的自检测功能。分析了平板驱动电极的静电驱动力、吸合电压以及稳定驱动位移条件。采用光学测试技术测试了驱动电压和驱动位移的关系,吸合电压,证实了理论分析。利用理论分析公式计算了低驱动电压情况下的驱动位移。结果表明在10～15V的直流驱动电压下能产生等效于1g加速度的输出。     

基于鼓膜法的薄膜力学性能测试研究

采用自行研制的鼓膜实验装置,结合迈克尔逊激光干涉位移测量技术,获取薄膜的变形值与压力值之间的关系曲线,以实现薄膜试样力学性能的测试.对鼓膜法测试薄膜力学性能的现状做了评述;对实验原理以及装置设计进行论述;进行实验测量,并对实验结果进行有限元分析与仿真.对纯铝薄膜(纯度99.9％,厚为210 μm)进行鼓膜实验,测得其弹性模量E为68.3 GPa,与资料结果基本一致,说明研制的鼓膜实验装置测量薄膜力学性能方法切实可行.实验装置对于在微/纳机电系统(MEMS/NEMS)中广泛应用的薄膜材料的力学性能表征具有十分重要的意义.     

基于MEMS的远程桥梁索力监测系统设计

桥梁拉索的索力值是衡量桥梁安全性能的重要指标。研制了基于MEMS的无线索力检测系统,介绍了基于振动频谱法测量索力的原理,给出了基于MEMS索力仪的整体设计方案,最后进行了精密振动台测试与工程现场拉索的测试实验。实验表明,研制的无线传感系统能够准确地进行索力值检测,并可以扩展为在线监测系统。为桥梁安全监测提供了一种高效的索力测试系统及方法。     

Call for Papers The 6^th International Conference on Grid and Cooperative Computing

Recent years have seen rapid advances in various grid-related technologies, middleware, and applications. The GCC conference has become one of the largest scientific events worldwide in grid and cooperative computing. The 6th international conference on grid and cooperative computing (GCC2007) Sponsored by China Computer Federation (CCF),Institute of Computing Technology, Chinese Academy of Sciences (ICT) and Xinjiang University ,and in Cooperation with IEEE Computer Soceity ,is to be held from August 16 to 18, 2007 in Urumchi, Xinjiang, China.     

煤矿井下安全监控分站的设计及其仿真实现

为了设计一种具有低成本、低功耗、易操作、功能强且可靠性高的煤矿井下安全分站,针对煤矿安全生产实际,文章提出了采用MCS-51系列单片机为核心、具有CAN总线通信接口的煤矿井下安全监控分站的设计方案;首先给出煤矿井下安全监控分站的整体构架设计,然后着重阐述模拟量输入信号处理系统的设计过程,最后说明单片机最小系统及其键盘、显示、报警、通信等各个组成部分的设计;为验证设计方案的可行性与有效性,使用Proteus软件对设计内容进行仿真验证,设计的煤矿井下安全监控分站具有瓦斯、温度等模拟量参数超标报警功能和电机开停、风门开闭等开关量指示功能;仿真结果表明:设计的煤矿井下安全监控分站具有一定的实际应用价值.     

法律信息库系统

本文分析了法律数据库的结构和特点，介绍了采用面向对象设计方法和超文本数据库技术开发和实现法律信息库系统将作为重要网络资源之一为不同用户进行法律咨询服务。     

View-based model-driven architecture for enhancing maintainability of data access services

In modern service-oriented architectures, database access is done by a special type of services, the so-called data access services (DAS). Though, particularly in data-intensive applications, using and developing DAS are very common today, the link between the DAS and their implementation, e.g. a layer of data access objects (DAOs) encapsulating the database queries, still is not sufficiently elaborated, yet. As a result, as the number of DAS grows, finding the desired DAS for reuse and/or associated documentation can become an impossible task. In this paper we focus on bridging this gap between the DAS and their implementation by presenting a view-based, model-driven data access architecture (VMDA) managing models of the DAS, DAOs and database queries in a queryable manner. Our models support tailored views of different stakeholders and are scalable with all types of DAS implementations. In this paper we show that our view-based and model driven architecture approach can enhance software development productivity and maintainability by improving DAS documentation. Moreover, our VMDA opens a wide range of applications such as evaluating DAS usage for DAS performance optimization. Furthermore, we provide tool support and illustrate the applicability of our VMDA in a large-scale case study. Finally, we quantitatively prove that our approach performs with acceptable response times.     

International Journal of Automation and Computing Table of Contents

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Information for authors

正SCIENCE CHINA Information Sciences(Sci China Inf Sci),cosponsored by the Chinese Academy of Sciences and the National Natural Science Foundation of China,and published by Science China Press,is committed to publishing highquality,original results of both basic and applied research in all areas of information sciences,including computer science and technology;systems science,control science and engineering(published in Issues with odd numbers);information and communication engineering;electronic science and technology(published in Issues with even numbers).Sci China Inf Sci is published monthly in both print and electronic forms.It is indexed by Academic OneFile,Astrophysics Data System(ADS),CSA,Cabells,Current Contents/Engineering,Computing and Technology,DBLP,Digital Mathematics Registry,Earthquake Engineering Abstracts,Engineering Index,Engineered Materials Abstracts,Gale,Google,INSPEC,Journal Citation Reports/Science Edition,Mathematical Reviews,OCLC,ProQuest,SCOPUS,Science Citation Index Expanded,Summon by Serial Solutions,VINITI,Zentralblatt MATH.     

Erratum to: Fast global kernel fuzzy c-means clustering algorithm for consonant/vowel segmentation of speech signal

正Erratum to:J Zhejiang Univ-Sci C(ComputElectron)2014 15(7):551-563doi:10.1631/jzus.C1300320The original version of this article unfortunately contained mistakes.Algorithm 6 should be as follows:Algorithm 6 FGKFCM-F clustering Input:(1)X={x_1,x_2,…,x_N},,x_iR~d,i=1,2,…,N,the dataset;(2)C,1C≤N,the number of clusters;(3)ε0,the stopping criterion;     

Journal of Zhejiang University-SCIENCE C (Computers & Electronics) Total contents

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A pragmatic multi-method investigation of discrepant technological events: Coping,attributions, and ‘accidental’ learning

Discrepant technological events or situations that entail a problem, a misunderstanding or a difficulty with the Information Technology (IT) being employed, are common in the workplace, and can lead to frustration and avoidance behaviors. Little is known, however, about how individuals cope with these events. This paper examines these events by using a multi-method pragmatic approach informed by coping theory. The results of two studies – a critical incident study and an experiment – serve to build and test, respectively, a theoretical model that posits that individuals use a variety of strategies when dealing with these events: they experience negative emotions, make external attributions, and adopt engagement coping strategies directed at solving the event, eventually switching to a disengagement coping strategy when they feel they have no control over the situation. Furthermore, users’ efforts may result in ‘accidental’ learning as they try to overcome the discrepant IT events through engagement coping. The paper ends with a discussion of the results in light of existing literature, future opportunities for research, and implications for practice.