新型CMOS摄像器件及其应用

一、概述 固体图像传感器分为电荷藕荷式(CCD)和CMOS型两大类,早期由于受集成电路设计和工艺水平的限制,MOS型摄像器件无法克服其灵敏度低和干扰大的缺点。而得不到广泛应用,随着电视技术的发展和集成电路制造工艺的迅速进步,为解决当初MOS型摄像器件的缺点创造了条件。到了八十年代末,英国爱丁堡大学成功地试制出了世界第一块单片CMOS型图像传感器件、为实用化打开了道路,CMOS型摄像器件是将图像传感部分和控制电路高集成在同一芯片里,使其体积不仅明显减     

应用于片上ESD防护中新式直通型MOS触发SCR器件的研究

在基于0.13μm CMOS工艺制程下,为研究片上集成电路ESD保护,对新式直通型MOS触发SCR器件和传统非直通型MOS触发SCR进行了流片验证,并对该结构各类特性进行了具体研究分析。实验采用TLP(传输线脉冲)对两类器件进行测试验证,发现新式直通型MOS触发SCR结构要比传统非直通型MOS触发SCR具有更低的触发电压、更小的导通电阻、更好的开启效率以及更高的失效电流。     

体硅CMOS FinFET结构与特性研究

建立在SOI衬底上的 FinFET结构被认为是最具全面优势的非常规MOS器件结构.本文通过合理的设计将FinFET结构迁移到普通体硅衬底上,利用平面凹槽器件的特性解决了非绝缘衬底对器件短沟道效应的影响,同时获得了一些标准集成电路工艺上的改进空间.运用标准CMOS工艺实际制作的体硅CMOS FinFET器件获得了较好的性能结果并成功地集成到CMOS反相器和环形振荡器中.结构分析与实验结果证明了体硅CMOS FinFET在未来电路中的应用前景.     

与CMOS工艺兼容的硅高速光电探测器模拟与设计

用器件模拟的方法,设计了一种与常规CMOS 工艺兼容的硅高速光电探测器,该探测器可与CMOS接收机电路单片集成,对该探测器进行了器件模拟研究,给出了该探测器的电路模型.通过MOSIS(MOS implementation support project) 0.35μm COMS工艺制做了该探测器,实际测试了该器件的频率响应和波长响应,探测器频率响应在1GHz以上,峰值波长响应在0.69μm.     

与CMOS工艺兼容的硅高速光电探测器模拟与设计

用器件模拟的方法,设计了一种与常规CMOS 工艺兼容的硅高速光电探测器,该探测器可与CMOS接收机电路单片集成,对该探测器进行了器件模拟研究,给出了该探测器的电路模型.通过MOSIS(MOS implementation support project) 0.35μm COMS工艺制做了该探测器,实际测试了该器件的频率响应和波长响应,探测器频率响应在1GHz以上,峰值波长响应在0.69μm.     

高灵敏度CMOS光电集成接收机设计

设计了一个由调节型级联跨阻抗放大器(TIA)和双光电二极管(DPD)构成的CMOS光电集成(OEIC)接收机.具体分析了这个光电集成接收机的噪声和灵敏度及其相互关系.接收机中的噪声主要是电路中电阻的热噪声和MOS器件的闪烁噪声.提出了优化接收机灵敏度的方法.通过低成本的CSMC 0.6μm CMOS工艺流片并对芯片进行了测试.从测试眼图可知,该CMOS光电集成接收机可工作在1.25GB/s的传输速率下,灵敏度为-12dBm.     

高灵敏度CMOS光电集成接收机设计

设计了一个由调节型级联跨阻抗放大器(TIA)和双光电二极管(DPD)构成的CMOS光电集成(OEIC)接收机.具体分析了这个光电集成接收机的噪声和灵敏度及其相互关系.接收机中的噪声主要是电路中电阻的热噪声和MOS器件的闪烁噪声.提出了优化接收机灵敏度的方法.通过低成本的CSMC 0.6μm CMOS工艺流片并对芯片进行了测试.从测试眼图可知,该CMOS光电集成接收机可工作在1.25GB/s的传输速率下,灵敏度为-12dBm.     

0.5μm SOI CMOS工艺开发与器件建模

对0.5 μm SOI CMOS工艺进行了开发,得到一套完整良好的工艺流程参数.根据流片测试结果,进行SOI CMOS器件的建模;利用BSIMproPlus软件中的BSIMSOI MOS模型,根据MOS管宽长比进行器件分类和建模,得到模型参数.对于部分耗尽SOI器件的固有浮体效应和kink效应,采用体接触方法来缓解其负...     

电离辐射对集成电路的影响

本文描述了电离辐射对硅器件影响的机理。对试验后的数据进行了分析,指出电离辐射对双极电路、MOS电路、CMOS电路的影响结果。     

0.1μmSOI槽栅CMOS特性仿真

基于SOI技术对器件特性的良好改善和槽栅MOS器件在深亚微米领域抑制短沟道效应和抗热载流子效应方面的显著优势,对SOI槽栅CMOS器件在0.1 μm尺寸下的电学特性进行了模拟仿真,仿真结果表明,基于SOI衬底的槽栅CMOS器件除了拥有槽栅器件独特优势之外,还很好地抑制了栅极漏电和阈值偏高等体硅槽栅MOS所具有的特性缺陷,得到了更加理想的实验结果.     

New cut of a quartz resonator with a linear temperature/frequency characteristic

The letter describes a new cut of quartz resonator with a linear temperature/frequency characteristic used as a sensor for precise temperature measurements. The newly developed thermosensitive quartz resonator has some important advantages: obtaining comparatively easily and reproducibly a precise orientation of the piezoelement, good linearity of the temperature/frequency characteristic and a clear frequency spectrum in a wide temperature interval. The first-order temperature coefficient is 38 parts in 106/deg C and the frequency of operation on the third overtone is about 26.5 MHz at 10°C. That leads to an increase of approximately 1000Hz/deg C, with a sensitivity of 0.0001 deg C. These qualities of the thermosensitive quartz resonator make possible its use in devices for precise temperature measurements.     

电容型湿度传感器模型计算与分析

以菲克第二扩散定律为基础,建立湿度传感器器件三明治结构模型,对聚酰亚胺电容型湿度传感器进行全面数值模拟,分析其电场分布、升降湿的动态过程及响应时间,并与实验结果进行对比分析.引入了自由体积理论对湿度传感器升、降湿过程的影响,使模拟过程更加符合实际情况,结果显示模拟结果和实验数据吻合良好,并根据对模拟结果分析,发现电极宽度是制约传感器性能的关键参数.该模型能够较准确预测制备的电容型湿度传感器性能,以此来指导高性能湿度传感器研究.     

In-Situ monitoring of temperature and alloy composition of Hg1−xCdxTe using FTIR spectroscopic techniques

Optical real-time in-situ sensors play a very important role in the processing of semiconductor devices because of their noncontact remote nature and excellent compatibility with UHV systems. In this work, we report on progress in developing an in-situ temperature sensor for HgCdTe structures grown by molecular beam epitaxy (MBE). Based on the Fourier transform infrared (FTIR) spectrometer, this sensor is capable of continuous real-time monitoring of the surface temperature, thickness and alloy composition of HgCdTe epilayers. The accuracy and sensitivity of this FTIR technique were studied in all temperature ranges of interest. Also compared are two different methods of temperature determination obtained from the normalized spectral radiance. The influence of stray radiation and of sample holder rotation on the measurement accuracy have been studied. Reflectivity spectra for HgCdTe/CdZnTe(211) and HgCdTe/CdTe(211)/Si(211) structures have been analyzed in real time in order to determine the layer thickness and alloy composition for growing layers. Also discussed is a multilayer-structure optical model developed to solve the problem of composition determination at early stages of growth. The application of this model for fitting the transmission spectra is demonstrated.     

Mathematical Model of Fiber Optic Temperature Sensor Based on Optic Absorption and Experiment Testing

On the basis of analysis on the temperature monitoring methods for high voltage devices, a new type of fiber optic sensor structure with reference channel is given.And the operation principle of fiber optic sensor is analysed at large based on the absorption of semiconductor chip.The mathematical model of both devices and the whole system are also given.It is proved by the experiment that this mathematical model is reliable.     

PSD位移传感器测量误差的修正方法

为了提高自制位置敏感探测器(PSD)激光三角位移传感器的精度,提出一种简单、可行的数据修正方法,对传感器所采用的测量原理、敏感器件及自制工艺等进行了研究。首先,对自制的位移传感器的静态精度进行实验标定,分析其位移误差曲线。通过将位移测量误差曲线与敏感器件自身检出误差曲线进行比对,结合自制传感器的组装工艺,分析其误差来源。然后,通过调整激光三角测量原理中位移传递公式的具体参数,达到优化自制位移传感器的静态精度的目的。最后,用反复多次地,不同测量范围、测量步长下的位移数据曲线优化效果,证明这种修正方法的普适性。实验结果证明:经过该方法修正后,自制的PSD位移传感器的测量数据的误差降低约80%,其静态位移精度基本达到1%。这种修正方法能够简单、有效地提高PSD激光三角位移传感器的测量精度。     

基于AWG实现OADM：模型与方法研究

波分复用光网络系统的关键器件是波分复用和解复用器,本文提出一种简化的位相波导光栅（AWG）原理模型,分析了AWG基本原理与相关特性,比较分析了基于AWG实现光分插复用（OADM）的三种方案四种方法的串扰特性,首次提出减少串扰的第四种实现OADM方法并经过实验验证。     

Thermal management of BioMEMS: temperature control for ceramic-based PCR and DNA detection devices

Integrated microfluidic devices for amplification and detection of biological samples that employ closed-loop temperature monitoring and control have been demonstrated within a multilayer low temperature co-fired ceramics (LTCC) platform. Devices designed within this platform demonstrate a high level of integration including integrated microfluidic channels, thick-film screen-printed Ag-Pd heaters, surface mounted temperature sensors, and air-gaps for thermal isolation. In addition, thermal-fluidic finite element models have been developed using CFDRC ACE+ software which allows for optimization of such parameters as heater input power, fluid flow rate, sensor placement, and air-gap size and placement. Two examples of devices that make use of these concepts are provided. The first is a continuous flow polymerase chain reaction (PCR) device that requires three thermally isolated zones of 94/spl deg/C, 65/spl deg/C, and 72/spl deg/C, and the second is an electronic DNA detection chip which requires hybridization at 35/spl deg/C. Both devices contain integrated heaters and surface mount silicon transistors which function as temperature sensors. Closed loop feedback control is provided by an external PI controller that monitors the temperature dependant I-V relationship of the sensor and adjusts heater power accordingly. Experimental data confirms that better than /spl plusmn/0.5/spl deg/C can be maintained for these devices irrespective of changing ambient conditions. In addition, good matching with model predictions has been achieved, thus providing a powerful design tool for thermal-fluidic microsystems.     

对流水槽温度场和速度场的测量

根据室内模拟大气边界层的需要，开发了适合于水中温度场和速度场测量的快速响应设备。采用铂电阻传感器多探头测量温度场，速度场采用片光源流动显示及PTV数据处理技术。温度和速度测量设备响应快，分辨率高，为室内模拟研究提供了可靠的实验手段。文中分析了温度和速度测量的系统误差和偶然误差，并提出了速度测量改进方法。     

基于MC68HC908RF2的无线温度传感器

针对不能直接布线的旋转设备的温度检测问题,设计了一款低成本、微功耗的无线温度传感器.详细阐述了实现方法和设计要点,对系统中采用的关键元器件进行了介绍,给出了系统的硬件结构及软件流程图.设计中充分利用了各芯片的低功耗特性,有效地延长了电池的使用时间.实验证明,此传感器具有良好的可靠性和性价比,有广阔的应用前景.     

再入式光纤电流传感器及其偏振误差研究

为了提高现有光纤电流传感器的性能,提出了一种再入式光纤电流传感器。借助琼斯矩阵对再入式光纤电流传感器的偏振误差进行了研究,通过建立各主要光学器件的琼斯矩阵表达式,推出了再入式光纤电流传感器的干涉表达式,并分析了各光学器件的不完备性对其测量精确度的影响。