Optical characterization of (GaIn)(NAs)/GaAs MQW structures

(GaIn)(NAs)/GaAs multiple quantum well (MQW) structures with high structural perfection as determined from high-resolution x-ray diffraction (XRD) analysis have been deposited by low-temperature metal organic vapor phase epitaxy (MOVPE) at 525°C using triethylgallium (TEGa) and trimethylindium (TMIn) in combination with 1,1-dimethylhydrazine (UDMHy) and tertiarybutylarsine (TBAs). The optical characteristics of as-grown MQW structures as a function of quaternary composition and of well width are established by PL spectroscopy at 300 K. With increasing N-content a reduction in PL efficiency and an increase in PL linewidth is observed. This behavior might be correlated to an increase in defect density with increasing N-content and/or to a bandstructure effect in this novel material system. For an increase in Inconcentration the tendency for a reduction in the extreme bowing of the band gap is detected. Strong quantization effects are observed for well widths below 5 nm only in this novel MQW system, which indicates significantly larger electron masses as compared to N-free (GaIn)As.     

Optical properties of Si0.8Ge0.2/Si multiple quantum wells

The optical property was studied on the Si_0.8Ge_0.2/Si strained multiple quantum well (MQW) structure grown using ultra-high vacuum chemical vapor deposition (UHV-CVD). Three peaks are observed in Raman spectrum, which are located at about 510, 410, and 300 cm⁻¹, corresponding to the vibration of Si–Si, Si–Ge, and Ge–Ge phonons, respectively. The photoluminescence (PL) spectrum originates from the radiative recombinations both from the Si substrate and the Si_0.8Ge_0.2/Si MQW. For Si_0.8Ge_0.2/Si strained MQW, the transition peaks related to the MQW region observed in the photocurrent (PC) spectrum were preliminarily assigned to electron–heavy hole (e–hh) and electron–light hole (e–lh) fundamental excitonic transitions.     

InP基应变补偿多量子阱的研究进展

介绍了InP基应变补偿MQW的研究进展 ,对应变补偿和非应变补偿MQW的特性做了对比。讨论了InP基应变补偿MQW存在的问题及如何优化InP基应变补偿MQW的生长条件。     

选择区域生长高质量InGaAsP多量子阱材料

采用 L P- MOVPE在 Si O2 掩膜的 In P衬底上实现了高质量的 In Ga As P多量子阱 (MQW)的选择区域生长(SAG) .通过改变生长温度和生长压力 ,MQW的适用范围由 C波段扩展至 L 波段 ,即 MQW的光致发光波长从15 46 nm延展至 16 2 1nm.光致发光 (PL)测试表明 :在宽达 75 nm的波长范围内 ,MQW的质量与非选择生长的MQW质量相当 ,并成功制作出电吸收调制 DFB激光器 (EML) .     

The effects of laser irradiation on InGaAs/GaAs multiple quantum wells grown by metalorganic molecular beam epitaxy

We studied the effects of Ar ion laser irradiation during the growth of InGaAs/ GaAs multiple quantum wells (MQW) structures by metalorganic molecular beam epitaxy. Structural and optical properties were characterized by Nomarski microscopy, Dektak stylus profiler, and low-temperature photoluminescence (PL) measurements. For MQW structures grown at a relatively low substrate temperature (500°C), the laser irradiation influences greatly the growth process of the In^Ga^^As well and results in a large blue shift of about 2000à in the PL peak. Such a large blue shift suggests that laser modification during growth could have some novel applications in optoelectronics. On the other hand, the laser irradiation has relatively small effects on samples grown at a higher substrate temperature (550°C).     

光互连用8×8多量子阱空间光调制器

制作了光互连用８×８多量子阱空间光调制器，测量了其耐压特性、模式均匀性、对比度和插入损耗等。使用Ｄａｍｍａｎｎ光栅分束器将半导体激光束分成等光强的６４路并将其照射到多量子阱空间光调制器上，测量了其调制特性     

红橙光InGaN/GaN量子阱的结构与光学性质研究

采用金属有机物化学气相沉积(MOCVD)技术生长了具有高In组分InGaN阱层的InGaN/GaN多量子阱(MQW)结构,高分辨X射线衍射(HRXRD)ω-2θ扫描拟合得到阱层In含量28%。比较大的表面粗糙度表明有很大的位错密度。室温下光致荧光(PL)研究发现该量子阱发射可见的红橙光,峰位波长在610 nm附近。变温PL(15～300 K)进一步揭示量子阱在低温下有两个发光机制,对应的发射峰波长分别为538 nm和610 nm。由于In分凝和载流子的局域化导致的载流子动力改变,使得量子阱PL发光峰值随温度增加呈明显的"S"变化趋势。     

InGaN-AlInGaN multiquantum-well LEDs

InGaN-GaN and InGaN-AlInGaN multiquantum-well (MQW) light-emitting diodes (LEDs) were both fabricated and their optical properties were evaluated by photoluminescence (PL) as well as electroluminescence (EL). We found that the PL peak position of the InGaN-AlInGaN MQW occurs at a much lower wavelength than that of the InGaN-GaN MQW. The PL intensity of the InGaN-AlInGaN MQW was also found to be larger. The EL intensity of the InGaN-AlInGaN MQW LED was also found to be larger than that of the InGaN-GaN MQW LED under the same amount of injection current. Furthermore, it was found that EL spectrum of the InGaN-AlInGaN MQW LED is less sensitive to the injection current. These observations all suggest that we can improve the properties of nitride-based LEDs by using AlInGaN as the barrier layer     

MOVPE growth of strained InGaAs/lnAIAs MQWs for a polarization-insensitive electroabsorption modulator

Metalorganic vapor phase epitaxial growth of a strained InGaAs/lnAIAs multiquantum well (MQW) structure was carried out for optical electroabsorption modulators. A high-quality MQW layer can be grown by introducing compressive strain into InAlAs barrier layers against tensile-strained well layers. We have also demonstrated strained InGaAs/lnAIAs MQW electroabsorption modulators with polarization insensitivity by using these layers and have obtained a highquality modulator with a low driving voltage of 1.7 V and a wide 3-dB bandwidth of over 20 GHz.     

1.55μm张应变InGaAsP/InGaAsP量子阱偏振不灵敏半导体光放大器的优化设计

优化设计了1.55μm InGaAsP/InGaAsP张应变量子阱偏振不灵敏半导体光放大器的结构.利用k*p方法计算了多量子阱的价带结构,计算中考虑了6×6有效质量哈密顿量.从阱宽、应变、注入载流子密度等方面计算了量子阱模式增益的偏振相关性.     

InGaN/GaN多量子阱纳米线发光二极管制备及研究

用SiO2纳米图形层作为模板在以蓝宝石为衬底的n-GaN单晶层上制备了InGaN/GaN多量子阱纳米线,并成功实现了其发光二极管器件(LED).场发射扫描电子显微镜(FESEM)的测量结果表明,InGaN/GaN多量子阱纳米线具有光滑的表面形貌和三角形的剖面结构.室温下阴极射线荧光谱(CL)的测试发现了位于461 nm...     

Z扫描法研究nc-Si/SiN_x多量子阱材料非线性光学特性

采用射频磁控反应溅射技术与热退火处理制备了nc-Si/SiN_x多量子阱材料.对样品进行了小角度XRD、Raman光谱、吸收光谱测试,研究了其结构和光学性质.采用皮秒脉冲激光单光束Z-扫描技术研究了样品在非共振吸收区的三阶非线性光学特性.实验结果表明,其非线性折射率为负值,非线性吸收属于双光子吸收.由实验数据计算得材料三阶非线性极化率为7.50×10~(-8)esu,该值比体硅材料的三阶非线性极化率大4个数量级.对材料光学非线性产生的机理进行了探讨,认为材料的非线性极化率的增加来源于材料量子限制效应增强.

Abstract：

The nc-Si/SiN_x multi-quantum well (MQW)was prepared by RF magnetron sputtering technique and thermal annealing. The sample was tested by low-angle XRD, Raman spectrometry and absorption spectrometry, and its structure and optical properties were studyed. Nonlinear optical properties of nc-Si/SiN_x MQW were probed by a Z-Scan Technique. The experimental results show that the nonlinear refractive index of the sample is a negative value and the nonlinear absorption is two-photon absorption. After calculating, it is obtained that X~((3)) of the sample is 7.50 10~(-8)esu, the value of nc-Si/SiN_x MQW is 4 orders of magnitude higher than that of bulk Silicon. The nonlinear mechanism of the material was discussed. The enhancement of nonlinear refractive index is mainly attributed to the enhancement of quantum confinement.     

Structural and optical investigation of InGaN/GaN multiple quantum well structures with various indium compositions

We have studied the influence of indium (In) composition on the structural and optical properties of In_x Ga_1−xN/GaN multiple quantum wells (MQWs) with In compositions of more than 25% by means of high-resolution x-ray diffraction (HRXRD), photoluminescence (PL), and transmission electron microscopy (TEM). With increasing the In composition, structural quality deterioration is observed from the broadening of the full width athalf maximum of the HRXRD superlattice peak, the broad multiple emission peaks oflow temperature PL, and the increase of defect density in GaN capping layers and InGaN/GaN MQWs. V-defects, dislocations, and two types of tetragonal shape defects are observed within the MQW with 33% In composition by high resolution TEM. In addition, we found that V-defects result in different growth rates of the GaN barriers according to the degree of the bending of InGaN well layers, which changes the period thickness of the superlattice and might be the source of the multiple emission peaks observed in the In_xGa_1−xN/GaN MQWs with high in compositions.     

AlGaInP/GaInP多量子阱的拉曼光谱

利用LP-MOCVD生长了不同周期的AlGaInP／GaInPMQW样品，并测量了它们的拉曼光谱。由于样品包括了掺杂的电流扩展层和欧姆接触层以及上、下限制层，拉曼光谱中观察到了与掺杂有关的耦合电子(空穴)气-纵光学声子模。根据喇曼光谱的选择定则，结合光致发光谱，发现AIP-LO／TO的相对强度比可以评定晶体AlGaInP MQW的生长质量。     

Structural and optical properties of AlxGa1-xN/AlyGa1-yN multiple quantum wells for deep ultraviolet emission

The AlxGa1-xN/AlyGa1-yN multiple quantum well (MQW) structure for deep ultraviolet emission has been grown on sapphire by metal organic chemical vapor deposition (MOCVD).High resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), and cath-odoluminescence (CL) are used to characterize the structural and optical properties of MQWs, respectively.Clear step flows can be observed in the AFM image indicating a two-dimensional growth model.There are many cracks on the surface of the MQW structure because of the high tensile stress.HRXRD shows multiple satellite peaks to the 2rid order.The HRXRD simulation shows that the MQW period is about 11.5 nm.The emission peak of AlxGa1-xN/AlyGa1-yN MQWs is about 295 nm in the deep ultraviolet region from the CL spectra.     

全固源分子束外延InAsP/InGaAsP多量子阱1.55μm激光器

利用新型全固源分子束外延技术 ,对 1 .5 5 μm波段的 In As P/ In Ga As P应变多量子阱结构的生长进行了研究。实验表明 ,较低的生长温度或较大的 / 束流比有利于提高应变多量子阱材料的结构质量 ,而生长温度对材料的光学特性有较大的影响。在此基础上生长了分别限制多量子阱激光器结构 ,制作的氧化物条形宽接触激光器实现了室温脉冲工作 ,激射波长为 1 5 63 nm,阈值电流密度为 1 .4k A/ cm2 。这是国际上首次基于全固源分子束外延的 1 .5 5 μm波段 In As P/ In Ga As P多量子阱激光器的报道     

Cu/SiO2逐层沉积增强无杂质空位诱导InGaAsP/InGaAsP量子阱混杂

研究了Cu/SiO_2逐层沉积增强的无杂质空位诱导InGaAsP/InGaAsP多量子阱混杂(QWI)行为。在多量子阱(MQW)外延片表面,采用等离子体增强的化学气相沉积(PECVD)不同厚度的SiO_2,然后溅射5 nm Cu,在不同温度下进行快速热退火(RTA)诱发量子阱混杂。通过光荧光(PL)谱表征样品在QWI前后的变化。实验结果表明,当RTA温度小于700℃时,PL谱峰值波长只有微移,且变化与其他参数关系不大;当RTA温度大于700℃时,PL谱峰值波长移动与介质层厚度和RTA时间都密切相关,当SiO_2厚度为200 nm,退火温度为750℃,时间为200 s时,可获得54.3 nm的最大波长蓝移。该种QWI方法能够诱导InGaAsP MQW带隙移动,QWI效果与InGaAsP MQW中原子互扩散激活能、互扩散原子密度以及在RTA过程中热应力有关。     

p-GaN-i-GaN/AlGaN multiple-quantum well n-AlGaN back-illuminated ultraviolet detectors

The spectral response of back-surface-illuminated p-GaN-i-GaN/AlGaN multiplequantum well (MQW)-n-AlGaN ultraviolet (UV) photodetector is reported. The structure was grown by molecular-beam epitaxy on a c-plane sapphire substrate. A MQW is introduced into the active region of the device to enhance the quantum efficiency caused by the high absorption coefficient of the two-dimensional (2-D) system. Another advantage of using MQW in the active region is the ability to tune the cutoff wavelength of the photodetector by adjusting the well width, well composition, and barrier height. The zero-bias peak responsivity was found to be 0.095 A/W at 330 nm, which corresponds to 36% quantum efficiency from as-grown p-i-n GaN/AlGaN MQW devices. An anomalous effect, occurring in responsivity as a negative photoresponse in the spectra peaked at 362 nm because of poor ohmic contact to p-type GaN, was also observed. Etching the sample in KOH for 30 sec before fabrication removed the surface contaminants and improved the surface smoothness of the as-grown sample, resulting in significant improvement in the device performance, giving a peak responsivity of 0.12 A/W. The device has a quantum efficiency of 45% at 330 nm without the anomalous negative photocurrent.     

直接耦合半导体光放大器的噪声特性

研究了直接耦合混合应变量子阱半导体光放大器(SOA)的噪声特性.实验中测定SOA在130 mA偏置电流下的噪声指数为7.7 dB,表明应变量子阱结构改善了SOA的噪声性能.理论分析指出,通过消除SOA的剩余反射,其噪声性能可以得到进一步改善.     

GaAs/GaAlAs多量子阱自电光效应光学双稳态

采用国产分子束外延系统生长的GaAs/GaAlAs多量子阱材料,成功地制备出室温自电光效应(Self Electrooptic Effect)光学双稳态器件(SEED).报道了这种器件在对称工作(S-SEED)和非对称工作时的光学双稳态特性.