X-切薄膜铌酸锂高效率光栅耦合器的设计北大核心

基于X-切绝缘体上薄膜铌酸锂平台,提出并设计了一种高耦合效率的切趾一维光栅耦合器。采用非晶硅覆盖层材料,结合亚波长光子晶体等效方案和遗传算法增强光栅耦合效率。在中心波长1550 nm处,光栅的峰值耦合效率为-1.08 dB,通过引入底部金属反射镜可进一步提高至-0.53 dB,其1 dB带宽约为61 nm。     

单模光纤与SOI纳米线波导耦合设计

波导光栅在集成光学发展中扮演着重要的角色。与其他的耦合方法相比,光栅耦合器具有耦合效率高、制备封装成本低、无需芯片端面抛光、可以在任何地方实现信号输入输出等优点,成为纳米光波导最有潜力的耦合方法。本文提出利用OPTIFDTD软件仿真结合MATLAB编程的方法精确计算光栅耦合效率的新方法。仿真分析了光栅的周期、槽深、占空比、SiO2层厚度等光栅参数对耦合效率的影响,并给出了使输入光栅耦合器耦合效率达到42.6%;输出光栅耦合器的耦合效率达到72.3%的一组最佳光栅参数。     

硅基波导光栅耦合器与波导传输损耗的研究

对硅(Si)基波导光栅耦合器的设计与耦合性能进 行了研究。采用本征模展开法对光栅耦合器进行设计与 优化,通过实验测量了光栅的耦合性能,并对均匀光栅、自聚焦光栅和反射光栅等3种光栅 耦合器的耦合 性能进行了比较,耦合效率分别达到了达到47.86、56. 36和48.98%,自聚焦光栅可以有效改善光纤到 光纤的传输效果,耦合效率提高了8.5%。通过实验测量了基于耦合光 栅技术的Si基条形波导和槽型波导的 传输损耗,结果显示,条形波导和槽型波导的传输损耗分别为2.34d B/cm和6.31dB/mm。     

SOI基波导与光纤耦合的进展研究

当前以电子作为信息载体的微电子技术遭遇到发展瓶颈。光传输具有带宽大、速率高的特点,将光子载体与电子载体相结合是未来信息传输发展的必然趋势。波导与光纤的高效耦合是实现光电子集成的关键。文章介绍了国内外几种典型耦合器的最新进展,包括楔形耦合器、GRIN(渐变折射率)透镜耦合器和垂直光栅耦合器,并对它们的性能指标、优缺点进行了比较分析,对进一步提高耦合效率的可行性进行了展望。结果表明,垂直光栅耦合器具有耦合效率高、带宽大、工艺成熟、工艺容差大和耦合步骤简单的优势,在光通信与集成光电子学领域有着广阔的应用前景。     

SOI基光耦合器研究进展

文章综述了国内外光耦合器的最新研究进展,着重介绍了目前耦合效率最高(55%),且与偏振无关的双光栅辅助定向耦合器的工艺流程、结构性能以及进一步提高耦合效率的可行性.     

波导光栅耦合器

介绍了近几年国外波导光栅耦合器的研究和应用情况，重点介绍了光栅参数和波导结构对波导光栅耦耦器输入耦合效率的影响以及光栅耦合器在光盘读出头、传感器、光 谱分析等方面的应用。     

聚合物波导光栅耦合器的衍射场仿真

为了实现横截面尺寸为50 m50 m的聚硅氧烷聚合物光波导的耦合转向问题,设计了一种表面覆盖高折射率包层的多层蚀刻光栅耦合器。首先,分析了影响聚合物波导光栅耦合器耦合效率的结构因素;然后,采用在光栅表面蚀刻高折射率层的方法,提高了聚合物波导光栅耦合器的耦合效率;接着,对不同的周期（范围:100~4 000 nm）和不同的蚀刻深度（范围:0~50 000 nm）进行排列组合,形成不同的光栅结构,基于时域有限差分法编写程序,遍历所有情况,得到不同光栅结构下的光场情况以及其耦合效率,找到使耦合效率最大的周期以及蚀刻深度。最后,设计了多层蚀刻的光栅耦合器,进一步提高耦合效率。当蚀刻深度为5 000 nm,光栅周期为2 600 nm时,带高折射率层的聚硅氧烷聚合物光波导均匀光栅耦合器的耦合效率达到最大,为17.2%。采用多层蚀刻的方式,对结构进行优化,其耦合效率能达到37.4%。为聚硅氧烷聚合物光波导在光互连中的实际应用提供了理论依据。     

基于光子晶体反射镜的刻蚀衍射光栅设计与制备

刻蚀衍射光栅作为波分复用/解复用器件,有望在光通信系统中得到广泛应用。在基于顶层硅厚度为220 nm的绝缘体上硅材料上设计并制作了一种新型刻蚀衍射光栅,该刻蚀衍射光栅引入六角晶格空气孔型光子晶体作为其反射镜。模拟结果显示,相较于传统的阶梯光栅反射镜的刻蚀衍射光栅,光子晶体反射镜的刻蚀衍射光栅在理论上可有效降低器件的制作工艺难度以及插入损耗,同时可以实现器件偏振的保持。随后仅利用一步电子束光刻工艺及一步电感耦合等离子体刻蚀工艺制作了该光子晶体反射镜的刻蚀衍射光栅。测试结果表明:该光子晶体反射镜的刻蚀衍射光栅片上损耗为9.51~11.86 dB,串扰为5.87~8.72 dB,后续可通过优化工艺条件和优化输出波导布局,进一步提高器件的性能。     

硅基光栅耦合封装结构的优化设计

为了提高硅基光栅耦合封装结构的耦合效率、增大容差范围,对光栅耦合的结构特性进行了理论分析,并采用时域有限差分法完成了仿真验证,在不改变光栅参量的基础上,对光栅耦合封装结构进行了改进,仿真建立了一款光栅上方和光纤端面分别增加透镜的优化结构,研究了影响耦合效率的因素。结果表明,增加透镜后,耦合效率有所增加,角度容差和带宽都有一定的优化;在衬底增加反射镜后,对波长1550nm的光耦合效率提高至73.809%。该研究结果可为光栅耦合的封装结构设计提供参考依据。     

掺半导体玻璃波导光栅耦合器及其功率限制作用

本文报导了在掺半导体玻璃波导上用离子刻蚀的方法制备出了表面刻蚀光栅耦合器。观察到了光栅耦合器的耦合效率随着输入激光功率增加而下降的功率限制作用。     

Polylithic Integration of Electrical and Optical Interconnect Technologies for Gigascale Fiber-to-the-Chip Communication

Polylithic integration of electrical and optical interconnect technologies is presented as a solution for merging silicon CMOS and compound semiconductor optoelectronics. In contrast to monolithic and hybrid integration technologies, polylithic integration allows for the elimination of optoelectronic and integrated optic device-related processing from silicon CMOS manufacturing. Printed wiring board-level and compound semiconductor chip-level waveguides terminated with volume grating couplers facilitate bidirectional optical communication, where fiber-to-board and board-to-chip optical coupling occurs through a two-grating (or grating-to-grating) coupling path. A 27% increase in the electrical signal I/O projected by and 33% increase in the number of substrate-level electrical signal interconnect layers implied by the International Technology Roadmap for Semiconductors (ITRS) projections for the 32-nm technology generation are required to facilitate 10 Tb/s aggregate bidirectional fiber-to-the-chip communication. Buried air-gap channels provide for the routing of chip or board-level encapsulated air-clad waveguides for minimum crosstalk and maximum interconnect density. Optical signals routed on-board communicate with on-chip volume grating couplers embedded as part of a wafer-level batch package technology exhibiting compatible electrical and optical input/output interconnects. Measurements of grating-to-grating coupling reveal 31% coupling efficiency between two slab, nonoptimized, nonfocusing volume grating couplers.     

Compact Vertically Stacked Master Oscillator Power Amplifier Based on Grating Coupled Laser Diodes

A new design of hybrid master oscillator power amplifier (MOPA) has been proposed and realized by vertically stacking laser diodes with optical coupling provided by identical in-plane integrated gratings. Low beam divergence, large emitting and input areas of the grating coupled devices simplify the assembling technique over the fabrication of MOPA devices based on edge-emitting laser diodes. The master oscillator also incorporates a dual-grating reflector providing a wavelength-selective feedback resulting in a narrow emission spectrum of 0.2 nm at a wavelength of 975.4 nm. The power amplifier is a tapered chip with two integrated grating couplers. The operational characteristics of the MOPA were evaluated in the pulse regime demonstrating an output peak power of 32 W with a total amplification factor of 9.3dB.     

遗传算法在光栅面形优化设计中的应用

衍射效率高、偏振相关损耗低的衍射光栅是集成波分复用／解复用器件的一种核心元件,在光通信中具有很重要的应用价值,而一般面形的光栅很难达到此要求,为此需要在光栅衍射效率计算的基础上,利用遗传算法对光栅面形进行优化。采用二次函数来描述光栅面形,选取一定的原始样本,利用耦合波方法计算光栅的衍射效率;然后采用遗传算法中的各种算子对样本进行变换,计算变换后光栅面形的衍射效率,选择其中接近所确定条件的样本进行保留;再继续下一次变换和选择,直到满足设定的要求。通过优化最后得到衍射效率高、偏辗相关损耗小的光栅面形,这些面形的光栅衍射效率达到90％以上,而相应的偏振相关损耗小于0．1dB,已经达到光通信中的相应要求。在光栅面形设计中采用了遗传算法进行光栅面形优化为有特定要求光栅的制作提供了理论指导,可以节省一定的人力和渤力、     

线性啁啾光纤布喇格光栅反射谱的数值模拟

为了研究线性啁啾光纤布喇格光栅的特性,并进一步把它用于光纤激光器上,介绍了线性啁啾光纤布喇格光栅的耦合模理论,采用4阶Runge-Kutta法和传输矩阵法结合控制变量法,对线性啁啾光纤布喇格光栅反射率与啁啾系数、半峰全宽与光栅长度、反射率与直流纤芯折射率改变量之间的关系进行了数值模拟。结果表明,线性啁啾光纤布喇格光纤可以展宽带宽。基于这个结论,提出了利用线性啁啾光纤布喇格光栅作为光纤激光器腔镜,使输出谱线展宽,从而可作为宽带光源使用的方案。     

Improved coupled mode analysis of corrugated waveguides and lasers

Corrugated waveguides and lasers in resonant and non-resonant situations are analyzed by an improved coupled mode theory based on a set of the coupled mode equations for guided modes and radiation continuum. The distributed feedback (DFB) coefficient and the radiation loss coefficient are given in closed forms. The formulation can be applicable to arbitrarily shaped gratings and multilayer waveguide structures. The accuracy of the theory is examined by comparing it with Tamir's exact calculation for a nonresonant situation and also with Streifer's one for a DFB structure. Reasonable accuracy is obtained by the proper choice of the unperturbed waveguide parameter. The dependence of the two coefficients on the grating depth, the grating period, the guide layer thickness, and the refractive index difference between core and cladding layers is obtained for all Bragg orders up to the fourth, and for four typical grating shapes, namely, for rectangular, sinusoidal, symmetric triangular, and sawtooth gratings. Both the threshold gain of DFB lasers utilizing higher order Bragg reflection and the output coupling efficiency of grating beam couplers are also calculated for these parameters. A new multilayer structure for controlling the radiation loss is proposed and analyzed. This structure is suitable for the suppression of the radiation loss in DBR reflectors as well as for the improvement of the output coupling efficiency in grating beam couplers.     

Blazed grating couplers on LiNbO3optical channel waveguides and their applications to integrated optical circuits

Blazed grating couplers on LiNbO3optical channel waveguides have been successfully designed, fabricated, and evaluated. A reactive ion beam etching technique was used to shape the groove profile of grating couplers. A large decay factor of 600 dB/cm along optical channel waveguide was obtained. The air coupling intensity ratio of 8:1 between positive and negative light propagation directions for ion beam angle of 55° indicated a strong blaze effect. Highly efficient optical coupling from channel waveguide to Si phototransistor was also demonstrated.     

3-Dimensionally Integrated Planar Optics for 100 Gb/s Optical Packet Address Detection

We propose a novel planar optical interconnection scheme for 100 Gb/s optical packet address detection, which consists of waveguide grating couplers and a diffractive microlens integrated on a glass substrate 3-dimensionally. Length and duty cycle of the grating couplers have been determined on the bases of the ray-optic propagation-mode analysis in a slab waveguide and of the rigorous coupled-wave diffraction analysis for out-coupled radiation-modes. The 3-dimensionally integrated planar optics makes it possible to connect each address bit-signals of TE₀-waveguide mode to the detector with a power uniformity of 6.4 % and a total coupling efficiency of 72.3 %.     

Microwave Modeling of Optical Periodic Waveguides

A design procedure and experimental method is presented for modeling optical periodic waveguides by means of more convenient parallel plate microwave configurations. These models are suitable for verifying the beam-coupling properties of dielectric gratings that operate in the fundamental TE/sub 0/ surface-wave mode. In particular, blazed gratings with high coupling efficiencies have been constructed and their characteristics have been measured. The results have shown that previously developed design criteria, which are based on a simple Bragg-scattering approach, can yield highly efficient broad-band beam couplers that are not subject to critical fabrication tolerances.     

Focusing Polarization Diversity Grating Couplers in Silicon-on-Insulator

We report on compact focusing polarization diversity grating couplers in silicon-on-insulator, which can be used to overcome the polarization dependence of nanophotonic integrated circuits. The minimum fiber-to-fiber polarization dependent loss is 0.4 dB and the focusing grating couplers are as performant as standard 2-D-grating couplers without focusing. In addition, the focusing property of the gratings results in an 8-fold length reduction of the coupling structure as compared to standard nonfocusing 2-D-grating versions.