低阻硅基厚膜聚酰亚胺上共面波导的损耗特性

制备了一种低阻硅基厚膜聚酰亚胺上的高性能共面波导传输线 ,并从理论上分析了传输线损耗的成因及其计算方法。聚酰亚胺膜厚 1 1 .5 μm的低阻硅 (0 .5 Ω·cm)上的共面波导传输线在 1 0 GHz下插入损耗为3 .5 d B/cm。然而 ,相同衬底上 ,无聚酰亚胺膜的共面波导传输线在 1 0 GHz下插入损耗为 5 0 d B/cm,损耗特性明显比前者差。测试结果表明聚酰亚胺层的介入能有效地改善传输线的损耗特性 ,且损耗随着聚酰亚胺膜厚的增加而降低。     

最佳端焦耦合法光波导传输损耗测量

根据最佳端焦耦合原理,建立了1.3μm波段光波导损耗测量系统,在测得系统附加透射损耗和G—PD响应特性曲线的基础上,对宽6μm的T_i扩散L_iNbO_3单模波导的传输损耗进行了测量评价,测量误差<±0.07dB/cm。     

金属膜对单介质板太赫兹波导传输特性的影响

理论分析了对称金属薄膜镀层对厚单介质板太赫兹波导TM模传输特性的影响,发现镀膜前后TM模损耗相差巨大,并且随太赫兹频率的增加TM模损耗差异会更大。对低损耗厚单介质板,金属膜对TM模损耗的影响不可忽视。进一步研究了镀膜对TM模模场分布的影响,发现镀膜前后厚单介质板内TM模模场分布显著不同。     

SOI波导弯曲损耗影响因素的分析

采用有效折射率方法EIM(effectiveindex method)和二维束传播算法(2D-BPM)对SOI(silicon-on-insulator)波导弯曲损耗的几种影响因素进行了分析.通过模拟发现弯曲损耗随弯曲半径的增大、波导宽度的增加及内外脊高比的减小而减小.同时,改进波导结构,例如在弯曲波导外侧刻槽可以减小SOI脊形波导的弯曲损耗.     

超低损耗孔助光纤弯曲性能优化设计

建立了弯曲光纤的二维轴对称有限元分析模型,对初始光纤弯曲性能进行了有限元分析,分别计算其弯曲损耗,有效模场面积和连接损耗;选取芯层到下陷层距离b,下陷层宽度c,下陷层深度t,空气孔孔径r为设计变量,以弯曲损耗和连接损耗最小为目标,利用正交试验和灰度关联分析相结合的方法对光纤弯曲性能进行了多因素多目标优化设计。研究结果表明:优化后光纤弯曲损耗从0.127 8 dB/m减小到1.749 810-4 dB/m;有效模场面积从94.741 m2减小到82.37 m2;连接损耗由0.174 3 dB减小到5.80510-4 dB。与标准单模光纤对比发现,新型光纤在弯曲半径为3 mm的情况下,有效模场面积从209.21 m2减小到82.3 m2,连接损耗从7.535 8 dB减小到5.80510-4 dB,大大地降低了光纤的连接损耗。新型光纤在小半径弯曲情况下,也能保证系统的传输质量。     

SOI波导弯曲损耗影响因素的分析

采用有效折射率方法EIM(effectiveindex method)和二维束传播算法(2D-BPM)对SOI(silicon-on-insulator)波导弯曲损耗的几种影响因素进行了分析.通过模拟发现弯曲损耗随弯曲半径的增大、波导宽度的增加及内外脊高比的减小而减小.同时,改进波导结构,例如在弯曲波导外侧刻槽可以减小SOI脊形波导的弯曲损耗.     

MDM光波导激发高阶SPP模的传输特性

研究了金属-介质-金属(MDM)型表面等离子体激元(SPP)光波导的电磁特性。理论计算结果表明,对于633nm的TM偏振入射光,当介质膜层厚度小于85nm时,波导中只能激发产生一阶SPP模(基模),其余高阶模全部截止。随着介质膜厚度增加,高阶SPP模逐渐被激发产生。当介质膜层厚度较小时,SPP模的有效折射率的实部随阶数的增加而减小,而虚部则随阶数的增加而增加,SPP基模具有最大传输距离。然而,当MDM波导中的介质层厚度超过0.555μm时,由于三阶SPP模的电磁场主要集中在离金属层相对较远的介质层中,其有效折射率的虚部具有最小值,具有最大的传输距离,而非基模。当入射光波长为633nm介质层厚度为0.9μm时,Ag/SiO2/Ag光波导中三阶SPP模的传输距离达到约150μm。     

SOI波导弯曲损耗影响因素的分析

采用有效折射率方法EIM(effective index method)和二维束传播算法（2D-BPM）对SOI (silicon-on-insulator）波导弯曲损耗的几种影响因素进行了分析. 通过模拟发现弯曲损耗随弯曲半径的增大、波导宽度的增加及内外脊高比的减小而减小. 同时，改进波导结构，例如在弯曲波导外侧刻槽可以减小SOI脊形波导的弯曲损耗.     

硅基SiO_2光波导

在硅基上通过氢氧焰淀积的 Si O2 ,厚度达到了 2 0 μm;通过掺 Ge增加芯层的折射率 ,折射率比小于 1% ,并可调 ;用反应离子刻蚀工艺对波导的芯层进行刻蚀 ,刻蚀深度为 6 μm,刻蚀深宽比大于 10 ;波导传输损耗小于0 .6 d B/ cm(λ=1.5 5 μm) ,并对波导的损耗机理和测试进行了分析与研究 .另外 ,为实现光纤与波导的耦合 ,结合微电子机械系统技术 ,在波导基片上制作了光纤对准 V形槽     

飞秒激光加工光波导的工艺与传输特性研究

利用飞秒激光横向直写方式加工光波导,采用散射光测量法分析了光波导的传输损耗。为了提高光波导的传输性能,分析了不同数值孔径的聚焦物镜、加工速度和加工能量对光波导传输损耗的影响。实验结果表明,聚焦物镜数值孔径为0.25,激光功率为6 m W,加工速度在45~60μm/s时,飞秒激光加工的光波导具有较好的传输性能,其传输损耗低于-0.2 d B/cm。     

Low-loss Transmission Lines for High-power Terahertz Radiation

Applications of high-power Terahertz (THz) sources require low-loss transmission lines to minimize loss, prevent overheating and preserve the purity of the transmission mode. Concepts for THz transmission lines are reviewed with special emphasis on overmoded, metallic, corrugated transmission lines. Using the fundamental HE₁₁ mode, these transmission lines have been successfully implemented with very low-loss at high average power levels on plasma heating experiments and THz dynamic nuclear polarization (DNP) nuclear magnetic resonance (NMR) experiments. Loss in these lines occurs directly, due to ohmic loss in the fundamental mode, and indirectly, due to mode conversion into high order modes whose ohmic loss increases as the square of the mode index. An analytic expression is derived for ohmic loss in the modes of a corrugated, metallic waveguide, including loss on both the waveguide inner surfaces and grooves. Simulations of loss with the numerical code HFSS are in good agreement with the analytic expression. Experimental tests were conducted to determine the loss of the HE₁₁ mode in a 19 mm diameter, helically-tapped, three meter long brass waveguide with a design frequency of 330 GHz. The measured loss at 250 GHz was 0.029 ± 0.009 dB/m using a vector network analyzer approach and 0.047 ± 0.01 dB/m using a radiometer. The experimental results are in reasonable agreement with theory. These values of loss, amounting to about 1% or less per meter, are acceptable for the DNP NMR application. Loss in a practical transmission line may be much higher than the loss calculated for the HE₁₁ mode due to mode conversion to higher order modes caused by waveguide imperfections or miter bends.     

Wide Band Metallic Waveguide With In-Line Dielectric Rods

Conventional rectangular metallic waveguides are seldom used at frequencies higher than twice the cutoff frequency because of higher mode propagation. Single-mode propagation is available for a metallic waveguide with arrayed dielectric rods at the center of the waveguide in the frequency under twice the cutoff frequency region using the TE₂₀ mode, and in the frequency over twice the cutoff frequency region using the TE2o mode. If the metallic waveguide and dielectric loss tangent are assumed to be WR-90 (f_c ap6.55 GHz) and 3times10^-4, respectively, then the attenuation constants are smaller than 0.25 dB/m in the frequency range from 7 to 10 GHz, 15 to 16.5 GHz, and from 17.2 to 21 GHz.     

Investigation on propagation properties of terahertz waveguide hollow plastic fiber

The propagation properties of terahertz (THz) waveguide plastic hollow fiber have been investigated in this paper. The effects of radiation frequency, bore diameters and dielectric coating layers on the waveguide property have been shown and discussed. The results show that the attenuation loss of TM mode increases and that of TE mode decreases as radiation frequency increases. The attenuation loss decreases with the increasing of fiber bore diameter. The attenuation loss decreases as the refractive index of dielectric coating layer and the ratio of the refractive index of outer dielectric layer to that of inner dielectric layer increase.     

Flexible,Low-loss Waveguide Designs for Efficient Coupling to Quantum Cascade Lasers in the Far-infrared

We coupled linearly polarized and azimuthally polarized Terahertz quantum cascade lasers (QCLs) to the low-loss optical modes of hollow core waveguides having a sequence of different metallic or dielectric inner coatings. The latter waveguides have been specifically designed to force the propagation of a dominant optical mode once the thickness (d) of the inner dielectric coating is properly chosen. Our results demonstrate that both the TE01 and the TE11 modes can be easily converted to a hybrid one when d > 6 μm allowing the propagation of THz QCL beams with transmission losses as low as 1.5 dB/m, bending losses < 1.1 dB and reasonably high coupling efficiencies (87%).     

Design and Analysis of an Ultra-Compact and Ultra-Wideband Polarization Beam Splitter Based on Coupled Plasmonic Waveguide Arrays

We present the design of an ultra-compact polarization beam splitter where three symmetrical dielectric channel waveguides are hybrid integrated with Au plasmonic waveguide arrays. Ultra-wideband operation over 50 THz with the insertion loss less than 2 dB for both transverse electric and transverse magnetic mode are predicted. The extinction ratio is better than 15 dB for both polarizations and it is realizable on a chip size as small as 0.93times4.2 mum².     

太赫兹矩形波导与共面波导耦合结构设计

太赫兹（THz）波位于微波与红外光波之间,现有微波和光波段波导技术应用正在向THz波段拓展。但是,由于水汽对THz波的强吸收及制造工艺等原因,THz器件主要是平面结构,而THz源及其传输需要用矩形波导。因此,矩形波导与共面波导之间的转换结构成为决定元件和系统性能的关键部分。该设计利用脊波导进行阻抗匹配及电磁场模式转换,实现THz波矩形波导到共面波导的高效率耦合。结果表明,在0.2~0.4 THz频段内,该转换结构的传输系数(S₂₁)高于?3 dB,可以对THz电磁场进行高效率转换。该结果可用于太赫兹分子探测、太赫兹通信等领域,为0.2 THz以上太赫兹的模式转换提供了一种可行方案。     

太赫兹光子晶体光纤与天线设计

以聚甲基丙烯酸甲酯(PMMA)材料为基质,设计了一种空芯多孔包层结构的太赫兹光纤,中心的大孔缺陷用于传输太赫兹波,周围四层小孔可以将太赫兹波的传播限制在缺陷内部。利用COMSOL软件对光纤的损耗特性进行仿真分析发现,光纤在0.6 THz的泄露损耗低于0.1 dB/m,具有良好的传输特性。和金属波导口可以当作天线辐射电磁波的原理相似,光纤的端面也可以作为天线将内部传输的太赫兹波向外辐射,通过仿真分析,天线在0.59~0.61 THz的回波损耗低于-25 dB,方向性系数大于20 dB,半功率波束宽度约为13。     

Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength

Signal propagation delays dominate over gate delays in the ever-shrinking ultra large scale integrated (ULSI) circuits. Consequently, silicon-based monolithic optoelectronic circuits (SMOE) with their light speed signal propagation can provide unique advantages for future generations of microprocessors. For such SMOE circuits, we need optical interconnects compatible with silicon technology. Strip waveguides consisting of polycrystalline silicon (polySi) clad with SiO₂ offer excellent optical confinement and ease of fabrication that are ideal for such interconnect applications. One major challenge with using this material system, however, is its insertion loss. In this paper we provide techniques for minimizing optical transmission losses in polySi strip waveguides. Our previous work using polySi strip waveguides, showed an optical transmission loss of 15 dB/cm at λ=1.55 μm, which is a communication wavelength of choice in optical fibers because it represents an absorption minimum. Similar measurements in crystalline silicon strip waveguides¹ yielded transmission losses of less than 1 dB/cm. Hitherto, in decreasing loss from 77 dB/cm to 15 dB/cm, we had minimized loss from surface scattering by improving the film surface morphology, and decreased bulk absorption with hydrogen passivation. In this paper we report a further reduction in the residual bulk loss from 15 dB/cm to 9 dB/cm. By experimenting with different waveguide core dimensions, we find that the contribution of bulk loss towards net transmission loss decreases with waveguide core thickness. Additionally, high temperature treatment provides strain relief in the polySi, decreasing transmission loss. Annealing in an oxygen ambient is not recommended because it always increases transmission loss. Hydrogen passivation improves transmission, attributable to passivation of light-absorbing dangling bond defect sites present at polySi grain boundaries. Together, these methods have resulted in the lowest measured loss value of 9 dB/cm at λ=1.55 μm. Since integrated SiGe and Ge photodetectors are more efficient at shorter wavelengths like λ=1.32 μm, transmission loss is also measured at λ=1.32 μm. Losses at the two wavelengths (1.32 μm and 1.55 μm) are similar when defects and stress in the waveguides are minimized.     

0.22 THz Waveguide Bandpass Filter with High Stop-Band Suppression

A terahertz (THz) waveguide band-pass filter using an iris inductive window coupled structure was designed and fabricated. The filter was designed at 0.22 THz with a pass band of 20 GHz. The measured results show that the center frequency is 0.218 THz with a pass band of 0.205 THz to 0.231 THz, the minimum insertion loss is 1.26 dB at 0.224 THz, and the return loss is less than 13.1 dB. The stop-band suppression is 65.6 dB at 0.193 THz and 51.8 dB at 0.243 THz, respectively, which means a good performance of high stop-band suppression. A good agreement exists between the measured S-parameters and the simulated ones, especially in the upper band. The proposed THz waveguide filter has potential applications in THz communications.