兆声清洗技术分析及应用

主要论述兆声清洗技术原理及其在微电子清洗工艺过程中的应用。采用兆声清洗法可以减少化学品和高纯水的用量,在不破坏晶圆表面特征的前提下,提高对亚微细颗粒及各种污染物的去除能力及生产效率。     

盛美半导体开发出300mm单晶圆兆声清洗设备

盛美半导体(上海)有限公司在SEMICON China 2009上展出了12英寸单片兆声波清洗设备Ultra C,用于65nm技术节点以下的12英寸高端硅片清洗。据盛美半导体CEO王晖博士介绍,盛美SAPS兆声技术可使兆声波能量在12英寸硅片上非常均匀地分布(非均匀度的一个均方差小于2%),在不损伤硅片微结构的条件下使颗粒去除效率达到99.2%。     

300 mm圆片后抛光清洗--满足纳米微粒去除的挑战

随着半导体制造关键尺寸的继续缩小,硅片表面清洗要求变得更加严格。当前这一要求包括有效地去除硅片表面的纳米微粒(<100nm),并控制主要金属杂质不超过1E+10原子/cm~2。传统的擦片机和兆声湿式批量清洗工艺面临达到这些目标的挑战。单片清洗澡机在硅片表面产生更加均匀的声强分布,更有效地去除了纳米微粒。介绍了湿式批量洗洗机和单片清洗澡机的兆声清洗效果。湿式批量浸泡术和兆声能量单片清洗机结合可以有效地去80mm磨料微粒。     

单晶圆兆声清洗技术研究及兆声喷头方案优化

基于单晶圆兆声清洗的原理,分析了针对单晶圆兆声清洗的多种方案的优缺点,提出了适合单晶圆兆声清洗的优化方案.     

兆声清洗法和离心喷射清洗法的比较

用基于改进的RCA清洗液结合兆声清洗法和离心喷射法清洗抛光的硅片，干燥后用激光扫描法测试抛光硅片表面颗粒．结果表明，改进的RCA清洗液结合兆声的清洗方法对于去除硅片表面的微小颗粒具有更高的效率．     

盛美12英寸单片清洗设备实现商用

盛美半导体12英寸单片清洗设备近日成功进入世界知名芯片制造厂商生产线。盛美半导体12英寸单片兆声波清洗设备用于65nm技术节点以下的12英寸高端硅片清洗，盛美独家具有自主知识产权技术可使兆声波能量在12英寸硅片上非常均匀地分布（非均匀度的一个均方差小于2％），该技术在不损伤硅片微结构的条件下使颗粒去除效率达到99．2％。     

盛美半导体开发出12英寸单片兆声波清洗设备

盛美半导体（上海）有限公司日前展出了12英寸单片兆声波清洗设备，本设备用于65nm技术节点以下的12英寸高端硅片清洗。盛美独家具有自主知识产权技术可使兆声波能量在12英寸硅片上非常均匀地分布（非均匀度的一个均方差小于2％），本技术在不损伤硅片微结构的条件下使颗粒去除效率达到992％。     

兆声清洗法和离心喷射清洗法的比较

用基于改进的RCA清洗液结合兆声清洗法和离心喷射法清洗抛光的硅片,干燥后用激光扫描法测试抛光硅片表面颗粒.结果表明,改进的RCA清洗液结合兆声的清洗方法对于去除硅片表面的微小颗粒具有更高的效率.     

φ300mm硅片抛光后清洗工艺的挑战--清除深亚微米颗粒的方案

随着半导体制造业的工艺进步,线宽尺寸的不断减小,对表面覆膜硅片清洗的质量要求也变得越来越严格。当前这类清洗涵盖了从硅片表面有效地去除深亚微米颗粒(<100nm)和将金属杂质数量控制在1E+10(原子)个?cm2以下这两项要求。传统的洗刷机(Scrubber)清洗方式及兆声波缸槽式湿法清洗工艺正面临这些新的不断深化的工艺技术要求的挑战。根据最新《国际半导体技术指南(ITRS)》对提高硅片表面加工水平和深亚微米颗粒去除能力要求,论证了能同时实现上述目标的清洗方法。这个方法采用以传统缸槽整批处理式湿法清洗机台和单片兆声波清洗机相结合的方案,整批处理式湿法机台的沉浸技术被应用于包括去有机膜、去原生氧化层和去金属杂质的硅片表面处理。与之相比,单片兆声波清洗通过提供一个均衡的兆声波能场,增强了去除深亚微米颗粒的能力,从而更高质量地完成硅片表面清洗。为了验证这种方法的有效性,对φ300mm再生抛光片进行上述清洗工艺的效果评定。     

FSI清洗专栏：干法清洗技术在Cu工艺中的应用

晶圆清洗是典型的湿法工艺，即用化学溶液通过化学反应去除颗粒和残余物。有时在湿法工艺中还会使用兆声清洗等物理作用提高颗粒的去除效率。许多晶圆清洗工程师并不了解干法颗粒去除技术。本专栏的目的是向大家介绍超凝态过冷动力学（CryoKinetic）技术，一种FSI国际公司专用的采用ANTARES CryoKinetic清洗系统实现的全干法无化学反应颗粒去除技术。     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.