Latchup-free ESD protection design with complementary substrate-triggered SCR devices

The turn-on mechanism of silicon-controlled rectifier (SCR) devices is essentially a current triggering event. While a current is applied to the base or substrate of an SCR device, it can be quickly triggered on into its latching state. In this paper, latchup-free electrostatic discharge (ESD) protection circuits, which are combined with the substrate-triggered technique and an SCR device, are proposed. A complementary circuit style with the substrate-triggered SCR device is designed to discharge both the pad-to-V/sub SS/ and pad-to-V/sub DD/ ESD stresses. The novel complementary substrate-triggered SCR devices have the advantages of controllable switching voltage, adjustable holding voltage, faster turn-on speed, and compatible to general CMOS process without extra process modification such as the silicide-blocking mask and ESD implantation. The total holding voltage of the substrate-triggered SCR device can be linearly increased by adding the stacked diode string to avoid the transient-induced latchup issue in the ESD protection circuits. The on-chip ESD protection circuits designed with the proposed complementary substrate-triggered SCR devices and stacked diode string for the input/output pad and power pad have been successfully verified in a 0.25-/spl mu/m salicided CMOS process with the human body model (machine model) ESD level of /spl sim/7.25 kV (500 V) in a small layout area.     

SCR device fabricated with dummy-gate structure to improve turn-on speed for effective ESD protection in CMOS technology

Turn-on speed is the main concern for an on-chip electrostatic discharge (ESD) protection device, especially in the nanoscale CMOS processes with ultrathin gate oxide. A novel dummy-gate-blocking silicon-controlled rectifier (SCR) device employing a substrate-triggered technique is proposed to improve the turn-on speed of an SCR device for using in an on-chip ESD protection circuit to effectively protect the much thinner gate oxide. The fabrication of the proposed SCR device with dummy-gate structure is fully process-compatible with general CMOS process, without using an extra mask layer or adding process steps. From the experimental results in a 0.25-/spl mu/m CMOS process with a gate-oxide thickness of /spl sim/50 /spl Aring/, the switching voltage, turn-on speed, turn-on resistance, and charged-device-model ESD levels of the SCR device with dummy-gate structure have been greatly improved, as compared to the normal SCR with shallow trench isolation structure.     

Substrate-triggered ESD protection circuit without extra process modification

A substrate-triggered technique is proposed to improve electrostatic discharge (ESD) protection efficiency of ESD protection circuits without extra salicide blocking and ESD-implantation process modifications in a salicided shallow-trench-isolation CMOS process. By using the layout technique, the whole ESD protection circuit can be merged into a compact device structure to enhance the substrate-triggered efficiency. This substrate-triggered design can increase ESD robustness and reduce the trigger voltage of the ESD protection device. This substrate-triggered ESD protection circuit with a field oxide device of channel width of 150 /spl mu/m can sustain a human-body-model ESD level of 3250 V without any extra process modification. Comparing to the traditional ESD protection design of gate-grounded nMOS (ggnMOS) with silicide-blocking process modification in a 0.25-/spl mu/m salicided CMOS process, the proposed substrate-triggered design without extra process modification can improve ESD robustness per unit silicon area from the original 1.2 V//spl mu/m/sup 2/ of ggnMOS to 1.73 V//spl mu/m/sup 2/.     

ESD protection design for mixed-voltage I/O buffer with substrate-triggered circuit

A substrate-triggered technique is proposed to improve the electrostatic discharge (ESD) robustness of a stacked-nMOS device in the mixed-voltage I/O circuit. The substrate-triggered technique can further lower the trigger voltage of a stacked-nMOS device to ensure effective ESD protection for mixed-voltage I/O circuits. The proposed ESD protection circuit with substrate-triggered design for a 2.5-V/3.3-V-tolerant mixed-voltage I/O circuit has been fabricated and verified in a 0.25-/spl mu/m salicided CMOS process. The substrate-triggered circuit for a mixed-voltage I/O buffer to meet the desired circuit application in different CMOS processes can be easily adjusted by using HSPICE simulation. Experimental results have confirmed that the human- body-model (HBM) ESD robustness of a mixed-voltage I/O circuit can be increased /spl sim/60% by this substrate-triggered design.     

On-chip ESD protection design with substrate-triggered technique for mixed-Voltage I/O circuits in subquarter-micrometer CMOS Process

A new electrostatic discharge (ESD) protection design, by using the substrate-triggered stacked-nMOS device, is proposed to protect the mixed-voltage I/O circuits of CMOS ICs. The substrate-triggered technique is applied to lower the trigger voltage of the stacked-nMOS device to ensure effective ESD protection for the mixed-voltage I/O circuits. The proposed ESD protection circuit with the substrate-triggered technique is fully compatible to general CMOS process without causing the gate-oxide reliability problem. Without using the thick gate oxide, the new proposed design has been fabricated and verified for 2.5/3.3-V tolerant mixed-voltage I/O circuit in a 0.25-/spl mu/m salicided CMOS process. The experimental results have confirmed that the human-body-model ESD level of the mixed-voltage I/O buffers can be successfully improved from the original 3.4 to 5.6 kV by using this new proposed ESD protection circuit.     

ESD protection design for I/O cells with embedded SCR structure as power-rail ESD clamp device in nanoscale CMOS technology

This paper presents a new electrostatic discharge (ESD) protection design for input/output (I/O) cells with embedded silicon-controlled rectifier (SCR) structure as power-rail ESD clamp device in a 130-nm CMOS process. Two new embedded SCR structures without latchup danger are proposed to be placed between the input (or output) pMOS and nMOS devices of the I/O cells. Furthermore, the turn-on efficiency of embedded SCR can be significantly increased by substrate-triggered technique. Experimental results have verified that the human-body-model (HBM) ESD level of this new proposed I/O cells can be greater than 5 kV in a 130-nm fully salicided CMOS process. By including the efficient power-rail ESD clamp device into each I/O cell, whole-chip ESD protection scheme can be successfully achieved within a small silicon area of the I/O cell.     

Implementation of Initial-On ESD Protection Concept With PMOS-Triggered SCR Devices in Deep-Submicron CMOS Technology

In order to enhance the applications of SCR devices for deep-submicron CMOS technology, a novel SCR design with "initial-on" function is proposed to achieve the lowest trigger voltage and the highest turn-on efficiency of SCR device for effective on-chip ESD protection. Without using the special native device (NMOS with almost zero or even negative threshold voltage) or any process modification, this initial-on SCR design is implemented by PMOS-triggered SCR device, which can be realized in general CMOS processes. This initial-on SCR design has a high enough holding voltage to avoid latchup issues in a VDD operation voltage of 2.5 V. The new proposed initial-on ESD protection design with PMOS-triggered SCR device has been successfully verified in a fully-silicided 0.25-mum CMOS process     

Electrostatic discharge protection design for mixed-voltage CMOS I/O buffers

A new electrostatic discharge (ESD) protection circuit, using the stacked-nMOS triggered silicon controlled rectifier (SNTSCR) as the ESD clamp device, is designed to protect the mixed-voltage I/O buffers of CMOS ICs. The new proposed ESD protection circuit, which combines the stacked-nMOS structure with the gate-coupling circuit technique into the SCR device, is fully compatible to general CMOS processes without causing the gate-oxide reliability problem. Without using the thick gate oxide, the experimental results in a 0.35 /spl mu/m CMOS process have proven that the human-body-model ESD level of the mixed-voltage I/O buffer can be successfully increased from the original /spl sim/2 kV to >8 kV by using this proposed ESD protection circuit.     

A gate-coupled PTLSCR/NTLSCR ESD protection circuit fordeep-submicron low-voltage CMOS ICs

A novel electrostatic discharge (ESD) protection circuit, which combines complementary low-voltage-triggered lateral SCR (LVTSCR) devices and the gate-coupling technique, is proposed to effectively protect the thinner gate oxide of deep submicron CMOS ICs without adding an extra ESD-implant mask. Gate-coupling technique is used to couple the ESD-transient voltage to the gates of the PMOS-triggered/NMOS-triggered lateral silicon controlled rectifier (SCR) (PTLSCR/NTLSCR) devices to turn on the lateral SCR devices during an ESD stress. The trigger voltage of gate-coupled lateral SCR devices can be significantly reduced by the coupling capacitor. Thus, the thinner gate oxide of the input buffers in deep-submicron low-voltage CMOS ICs can be fully protected against ESD damage. Experimental results have verified that this proposed ESD protection circuit with a trigger voltage about 7 V can provide 4.8 (3.3) times human-body-model (HBM) [machine-model (MM)] ESD failure levels while occupying 47% of layout area, as compared with a conventional CMOS ESD protection circuit     

Complementary-SCR ESD protection circuit with interdigitatedfinger-type layout for input pads of submicron CMOS IC's

A new ESD protection circuit with complementary SCR structures and junction diodes is proposed. This complementary-SCR ESD protection circuit with interdigitated finger-type layout has been successfully fabricated and verified in a 0.6 μm CMOS SRAM technology with the LDD process. The proposed ESD protection circuit can be free of VDD-to-VSS latchup under 5 V VDD operation by means of a base-emitter shorting method. To compensate for the degradation on latching capability of lateral SCR devices in the ESD protection circuit caused by the base-emitter shorting method, the p-well to p-well spacing of lateral BJT's in the lateral SCR devices is reduced to lower its ESD-trigger voltage and to enhance turn-on speed of positive-feedback regeneration in the lateral SCR devices. This ESD protection circuit can perform at high ESD failure threshold in small layout areas, so it is very suitable for submicron CMOS VLSI/ULSI's in high-pin-count or high-density applications     

New substrate-triggered ESD protection structures in a 0.18-μm CMOS process without extra mask

In order to quickly discharge the electrostatic discharge (ESD) energy, new substrate-triggered ESD protection structures are proposed in this work. Under transmission line pulsing (TLP) stress, the trigger voltage, turn-on speed and second breakdown current can be obviously improved, as compared with the traditional protection structures. From the experimental results, the new designs have proven a more effective ESD robustness. Moreover there is no need to add any extra mask or do any process modification for the new structures. The proposed new substrate-triggered structures have been verified in foundry’s 0.18-μm CMOS process.     

0.18μm RF CMOS双向可控硅ESD防护器件的研究(英文)

基于传统双向可控硅(DDSCR)提出了两种静电放电(ESD)保护器件,可应对正、负ESD应力从而在2个方向上对电路进行保护。传统的DDSCR通过N-well与P-well之间的雪崩击穿来触发,而提出的新器件则通过嵌入的NMOS/PMOS来改变触发机制、降低触发电压。两种改进结构均在0.18μmRFCMOS下进行流片,并使用传输线脉冲测试系统进行测试。实验数据表明,这两种新器件具有低触发电压、低漏电流(～nA),抗ESD能力均超过人体模型2kV,同时具有较高的维持电压(均超过3.3V),可保证其可靠地用于1.8V、3.3V I/O端口而避免出现闩锁问题。     

应用于片上ESD防护中新式直通型MOS触发SCR器件的研究

在基于0.13μm CMOS工艺制程下,为研究片上集成电路ESD保护,对新式直通型MOS触发SCR器件和传统非直通型MOS触发SCR进行了流片验证,并对该结构各类特性进行了具体研究分析。实验采用TLP(传输线脉冲)对两类器件进行测试验证,发现新式直通型MOS触发SCR结构要比传统非直通型MOS触发SCR具有更低的触发电压、更小的导通电阻、更好的开启效率以及更高的失效电流。     

ESD protection design for CMOS RF integrated circuits using polysilicon diodes

ESD protection design for CMOS RF integrated circuits is proposed in this paper by using the stacked polysilicon diodes as the input ESD protection devices to reduce the total input capacitance and to avoid the noise coupling from the common substrate. The ESD level of the stacked polysilicon diodes on the I/O pad is restored by using the turn-on efficient power-rail ESD clamp circuit, which is constructed by substrate-triggered technique. This polysilicon diode is fully process compatible to general sub-quarter-micron CMOS processes.     

ESD implantation for subquarter-micron CMOS technology to enhance ESD robustness

A new electrostatic discharge (ESD) implantation method is proposed to significantly improve ESD robustness of CMOS integrated circuits in subquarter-micron CMOS processes, especially the machine-model (MM) ESD robustness. By using this method, the ESD current is discharged far away from the surface channel of nMOS, therefore the nMOS (both single nMOS and stacked nMOS) can sustain a much higher ESD level. The MM ESD robustness of the gate-grounded nMOS with a device dimension width/length (W/L) of 300 /spl mu/m/0.5 /spl mu/m has been successfully improved from the original 450 V to become 675 V in a 0.25-/spl mu/m CMOS process. The MM ESD robustness of the stacked nMOS in the mixed-voltage I/O circuits with a device dimension W/L of 300 /spl mu/m/0.5 /spl mu/m for each nMOS has been successfully improved from the original 350 V to become 500 V in the same CMOS process. Moreover, this new ESD implantation method with the n-type impurity can be fully merged into the general subquarter-micron CMOS processes.     

Optimization on MOS-Triggered SCR Structures for On-Chip ESD Protection

MOS-triggered silicon-controlled rectifier (SCR) devices have been reported to achieve efficient on-chip electrostatic discharge (ESD) protection in deep-submicrometer CMOS technology. The channel length of the embedded MOS transistor in the MOS-triggered SCR device dominates the trigger mechanism and current distribution to govern the trigger voltage, holding voltage, on resistance, second breakdown current, and ESD robustness of the MOS-triggered SCR device. The embedded MOS transistor in the MOS-triggered SCR device should be optimized to achieve the most efficient ESD protection in advanced CMOS technology. In addition, the layout style of the embedded MOS transistor can be adjusted to improve the MOS-triggered SCR device for ESD protection.     

ESD implantations for on-chip ESD protection with layout consideration in 0.18-/spl mu/m salicided CMOS technology

One method to enhance electrostatic discharge (ESD) robustness of the on-chip ESD protection devices is through process design by adding an extra "ESD implantation" mask. In this work, ESD robustness of nMOS devices and diodes with different ESD implantation solutions in a 0.18-/spl mu/m salicided CMOS process is investigated by experimental testchips. The second breakdown current (I/sub t2/) of the nMOS devices with these different ESD implantation solutions for on-chip ESD protection are measured by a transmission line pulse generator (TLPG). The human-body-model (HBM) and machine-model (MM) ESD levels of these devices are also investigated and compared. A significant improvement in ESD robustness is observed when an nMOS device is fabricated with both boron and arsenic ESD implantations. The ESD robustness of the N-type diode under the reverse-biased stress condition can also be improved by the boron ESD implantation. The layout consideration in multifinger MOSFETs and diodes for better ESD robustness is also investigated.     

A new low-parasitic polysilicon SCR ESD protection structure for RF ICs

Robust low-parasitic electrostatic discharge (ESD) protection is highly desirable for RF ICs. This letter reports design of a new low-parasitic polysilicon silicon controlled rectifier (SCR) ESD protection structure designed and implemented in a commercial 0.35-/spl mu/m SiGe BiCMOS technology. The concept was verified by simulation and experiment with the results showing that the new structure has much lower parasitic capacitance (C/sub ESD/) and higher F-factor than that of other ESD protection devices. A small polysilicon SCR structure of 750-/spl mu/m/sup 2/ all-inclusive provides a high human body model ESD protection of 3.2 kV while featuring a high F-factor of /spl sim/42 and a low C/sub ESD/ of /spl sim/92.3 fF. The new polysilicon SCR ESD protection structure seems to be an attractive solution to high-GHz RF ICs.     

Design of 2.4-GHz T/R switch with embedded ESD protection devices in CMOS process

As CMOS processes advanced, the integration of radio-frequency (RF) integrated circuits was increasing. In order to protect the fully-integrated RF transceiver from electrostatic discharge (ESD) damage, the transmit/receive (T/R) switch of transceiver frond-end should be carefully designed to bypass the ESD current. This work presented a technique of embedded ESD protection device to enhance the ESD capability of T/R switch. The embedded ESD protection devices of diodes and silicon-controlled rectifier (SCR) are generated between the transistors in T/R switch without using additional ESD protection device. The design procedure of RF circuits without ESD protection device can be simplified. The test circuits of 2.4-GHz transceiver frond-end with T/R switch, PA, and LNA have been integrated and implemented in nanoscale CMOS process to test their performances during RF operations and ESD stresses. The test results confirm that the embedded ESD protection devices can provide sufficient ESD protection capability and it is free from degrading circuit performances.     

Lateral SCR devices with low-voltage high-current triggeringcharacteristics for output ESD protection in submicron CMOS technology

A high-current PMOS-trigger lateral SCR (HIPTSCR) device and a high-current NMOS-trigger lateral SCR (HINTSCR) device with a lower trigger voltage but a higher trigger current are proposed to improve ESD robustness of CMOS output buffer in submicron CMOS technology. The lower trigger voltage is achieved by inserting short-channel thin-oxide PMOS or NMOS devices into the lateral SCR structures. The higher trigger current is achieved by inserting the bypass diodes into the structures of the HIPTSCR and HINTSCR devices. These HIPTSCR and HINTSCR devices have a lower trigger voltage to effectively protect the output transistors in the ESD-stress conditions, but they also have a higher trigger current to avoid the unexpected triggering due to the electrical noise on the output pad when the CMOS ICs are in the normal operating conditions. Experimental results have verified that the trigger current of the proposed HIPTSCR (HINTSCR) is increased up to 225.5 mA (218.5 mA). But, the trigger voltage of the HIPTSCR (HINTSCR) remains at a lower value of 13.4 V (11.6 V). The noise margin against the overshooting (undershooting) voltage pulse on the output pad, without accidentally triggering on the HINTSCR (HIPTSCR), can be greater than VDD+12 V (VSS -12 V). These HIPTSCR and HINTSCR devices have been practically used to protect CMOS output buffers with a 4000-V (700-V) HEM (MM) ESD robustness but only within a small layout area of 37.6×60 μm² in a standard 0.6-μm CMOS technology without extra process modification