绒面掺铝氧化锌透明导电薄膜研究进展

绒面掺铝氧化锌(AZO)透明导电薄膜由于电阻率低、在可见光区域透过率高、绒面结构能有效散射入射光,提高太阳电池光电转换效率,被广泛应用于太阳电池前电极。概述了绒面AZO薄膜的制备方法,重点介绍了磁控溅射技术沉积AZO薄膜后再进行湿法刻蚀制绒面方法,制备的样品呈现"坑状"或"类月球地貌"的绒面,并讨论了工艺对薄膜结构、光电性能和刻蚀行为的影响,最后介绍了绒面AZO薄膜在硅薄膜太阳电池中的应用,进一步降低生产成本和实现大规模产业化生产是绒面AZO薄膜的发展趋势。     

ZnO∶Al替代ITO作透明导电膜的应用

研究了AZO(ZnO∶Al)替代ITO透明导电膜在GaN基LED中的应用,通过脉冲激光沉积和磁控溅射法制作了AZO薄膜,分析了AZO与p型GaN不良的欧姆接触的物理机理,并利用插入ITO薄层来改善接触电阻,实验用ITO 20nm/AZO 500nm的复合导电薄膜做透明导电薄膜,成功得到了波长为525.74nm、亮度为380.88mcd、电压为3.35V的GaN基绿光LED芯片,相当于单一ITO透明导电膜的性能,整个试验工艺中减少了ITO的使用量,降低了LED芯片的制造成本。     

AZO透明导电薄膜的制备技术、光电特性及应用

AZO透明导电薄膜是一种半导体氧化物薄膜材料,具有高的载流子浓度和较大的光学禁带宽度,因而具有优异的光电性能,极具应用价值.本文介绍了AZO透明导电薄膜的晶体结构和光电特性,综述了国内外对AZO薄膜所开展的研究工作,并简要地介绍了AZO薄膜的实际应用.     

AZO薄膜双靶PLD沉积及其光学性能分析

介绍了利用锌靶和铝靶在氧气气氛中进行掺铝氧化锌(AZO)透明导电薄膜的脉冲激光沉积(PLD)新方法，并与利用ZnO陶瓷靶沉积AZO薄膜的方法进行了对比，分析了此方法的优势和特点。描述了利用该方法在玻璃和硅片上沉积AZO薄膜的实验过程。通过透射光谱分析了沉积的透明导电膜在可见光区的透射性能，用X-射线衍射谱(XRD)研究了薄膜的结构。     

脉冲激光沉积AZO薄膜及其光学性质研究

给出了在氧气气氛中利用单束脉冲激光交替作用锌靶和铝靶进行掺铝氧化锌(AZO)透明导电薄膜的脉冲激光沉积(PLD)新方法,分析了该方法的特点与优点,并与利用ZnO陶瓷掺杂靶制备AZO薄膜的方法进行了对比。利用该方法分别在玻璃片和硅片上制备了AZO薄膜,用SEM观察了薄膜的表面型貌,用X射线衍射谱(XRD)研究厂薄膜的结构,最后通过透射光谱分析了制备的透明导电膜在可见光区的透射性能。实验结果表明:利用该方法能够制备出性能优越的AZO功能薄膜。     

掺铝氧化锌(AZO)导电薄膜的研究进展

综述透明导电薄膜的性能、种类、制备工艺、研究及应用状况,重点讨论掺铝氧化锌(AZO)薄膜的结构、导电机理、光电性能和当前的研究焦点。并指出,为了进一步提高透明导电薄膜的性能,应从以材料选择、制备工艺、多层膜光学设计等方面深入研发,以满足尖端技术的需要。     

透明导电薄膜的研究进展

综述了透明导电薄膜的性能、种类、制备工艺、研究及应用状况,重点介绍了掺铝氧化锌(AZO)薄膜的结构、导电机理、光电性能和当前的研究焦点,指出了需要进一步从材料选择、制备工艺的研究、多层膜光学设计等方面提高透明导电薄膜的综合性能,以满足尖端技术的需要.     

陷光结构在PERL太阳能电池中的应用及发展前景

陷光技术是制备高效单晶硅太阳能电池特别是钝化发射极背面定域掺杂(PERL)太阳能电池的一项关键技术。本文阐述了背面场和绒面结构在增加太阳光吸收时的物理机理,分析了背面场和绒面组成的陷光结构在提升PERL太阳能电池光电转换效率时的作用,最后展望PERL太阳能电池的发展前景。     

表面具有微纳结构的AZO薄膜制备及性能研究

采用磁控溅射法及线棒刮涂法在玻璃衬底上室温生长微纳结构铝掺杂氧化锌(AZO)薄膜,使底层AZO薄膜工作压强从1.5 Pa调整到0.1 Pa。通过扫描电子显微镜(SEM)、X线衍射(XRD)仪、霍尔效应测试系统、分光光度计及光电雾度仪研究了AZO薄膜的表面形貌、晶体结构、电学性能和光学性能。研究结果表明,降低底层AZO薄膜工作压强对微纳结构AZO薄膜光电性能有显著的影响。底层AZO薄膜工作压强0.2 Pa时,薄膜表现最低电阻率为6.17×10-4 Ω·cm,可见光波段平均光学透光率为82.3%。随着底层AZO薄膜工作压强的降低,薄膜表面形貌、生长形态和晶粒大小发生较大变化,并得到具有陷光作用、优良光电性能的微纳结构AZO薄膜。     

RF磁控溅射制备AZO透明导电薄膜及其性能

室温下采用RF磁控溅射技术在石英衬底E制备了多晶ZnO:Al(AZO)透明导电薄膜,通过XRD,AFM,AES,Hall效应及透射光谱等测试研究了RF溅射功率、氩气压强对薄膜的结构、电学和光学性能的影响.分析表明:在最优条件下(溅射功率为250W,氩气压强为1.2Pa时),180nm AZO薄膜的电阻率为2.68×10-3 Ω·cm,可见光区平均透射率为90%,适合作为发光二极管和太阳能电池的透明电极.所制备的AZO薄膜具有c轴择优取向,晶粒问界中的O原子吸附是限制薄膜电学性能的主要因素.     

Highly conductive ZnO films with high near infrared transparency

We present an approach for deposition of highly conductive nominally undoped ZnO films that are suitable for the n‐type window of low band gap solar cells. We demonstrate that low‐voltage radio frequency (RF) biasing of growing ZnO films during their deposition by non‐reactive sputtering makes them as conductive as when doped by aluminium (ρ≤1·10⁻³Ω cm). The films prepared with additional RF biasing possess lower free‐carrier concentration and higher free‐carrier mobility than Al‐doped ZnO (AZO) films of the same resistivity, which results in a substantially higher transparency in the near infrared region (NIR). Furthermore, these films exhibit good ambient stability and lower high‐temperature stability than the AZO films of the same thickness. We also present the characteristics of Cu(InGa)Se₂, CuInSe₂ and Cu₂ZnSnSe₄‐based solar cells prepared with the transparent window bilayer formed of the isolating and conductive ZnO films and compare them to their counterparts with a standard ZnO/AZO bilayer. We show that the solar cells with nominally undoped ZnO as their transparent conductive oxide layer exhibit an improved quantum efficiency for λ > 900 nm, which leads to a higher short circuit current density J_SC. This aspect is specifically beneficial in preparation of the Cu₂ZnSnSe₄ solar cells with band gap down to 0.85 eV; our champion device reached a J_SC of nearly 39 mAcm⁻², an open circuit voltage of 378mV, and a power conversion efficiency of 8.4 %. Copyright © 2015 John Wiley & Sons, Ltd.     

AZO薄膜绒面制备方法研究进展

综述了AZO透明导电薄膜绒面的间接制备方法,包括湿法腐蚀和干法刻蚀两种.对各种绒面制备方法进行了比较和总结,提出了掺铝氧化锌薄膜绒面制备工艺中需要解决的关键问题.     

中频交流磁控溅射制备AZO薄膜及退火工艺

以锌铝合金为靶材,采用工业生产设备,用中频交流磁控溅射法在玻璃衬底上制备出了铝掺杂氧化锌(AZO)透明导电薄膜,研究了氩氧比、退火温度、退火时间对薄膜结构、光学和电学性能的影响。结果表明,氩气和氧气体积流量比为3:1时常温下得到薄膜的方阻值最低,400℃真空退火1 h后薄膜可见光平均透过率由84.0%上升到86.7%,方阻值由5 000Ω/□下降到108Ω/□。     

Ligand‐Free Synthesis of Aluminum‐Doped Zinc Oxide Nanocrystals and their Use as Optical Spacers in Color‐Tuned Highly Efficient Organic Solar Cells

The color of polymer solar cells using an opaque electrode is given by the reflected light, which depends on the composition and thickness of each layer of the device. Metal‐oxide‐based optical spacers are intensively studied in polymer solar cells aiming to optimize the light absorption. However, the low conductivity of materials such as ZnO and TiO₂ limits the thickness of such optical spacers to tenths of nanometers. A novel synthesis route of cluster‐free Al‐doped ZnO (AZO) nanocrystals (NCs) is presented for solution processing of highly conductive layers without the need of temperature annealing, including thick optical spacers on top of polymer blends. The processing of 80 nm thick optical spacers based on AZO nanocrystal solutions on top of 200 nm thick polymer blend layer is demonstrated leading to improved photocurrent density of 17% compared to solar cells using standard active layers of 90 nm in combination with thin ZnO‐based optical spacers. These AZO NCs also open new opportunities for the processing of high‐efficiency color tuned solar cells. For the first time, it is shown that applying solution‐processed thick optical spacer with polymer blends of different thicknesses can process solar cells of similar efficiency over 7% but of different colors.     

Sensitization of zinc oxide photoanode with an indoline dye

A dye‐sensitized solar cell (DSC) made of nanoporous ZnO film on aluminum‐doped zinc oxide (ZnO/AZO) transparent substrate has higher solar‐to‐electric energy conversion efficiency than a DSC consisting of nanoporous ZnO film deposited on conventional fluorine‐doped tin oxide (ZnO/FTO) transparent substrate. The ZnO/AZO DSC gave an overall conversion efficiency of 7.2% whereas the ZnO/FTO yielded a conversion efficiency of 4.5%. The film‐substrate orientation and higher light harvesting of the nanoporous ZnO film on the AZO after heating in air are mainly attributed to the higher energy conversion efficiency of the ZnO/AZO DSC. Copyright © 2012 John Wiley & Sons, Ltd.     

AZO透明导电薄膜的制备

采用射频磁控溅射法在玻璃衬底上制备了ZnO:Al(AZO)透明导电薄膜,并借助XRD、SEM等表征方法,研究了溅射功率和衬底温度对薄膜结构、表面形貌及光电特性的影响。结果表明,制备薄膜的最佳溅射功率和衬底温度分别为180 W、200℃,在此条件下制备的AZO薄膜具有明显的c轴(002)择优取向,其最低方块电阻为18/□,在可见光范围内的平均透光率超过91%,且透明导电性能优于目前平板显示器的要求,有望取代现在市场上的主流氧化铟锡(ITO)薄膜。     

Modified textured surface MOCVD-ZnO:B transparent conductive layers for thinfilm solar cells

Modified textured surface boron-doped ZnO （ZnO：B） transparent conductive layers for thin-film solar cells were fabricated by low-pressure metal organic chemical vapor deposition （LP-MOCVD） on glass substrates. These modified textured surface ZnO：B thin films included two layers. The first ZnO：B layer, which has a pyramid- shaped texture, was deposited under conventional growth conditions, and the second layer, which has a sphere- like structure, at a relatively lower growth temperature. Typical bi-layer ZnO：B thin films exhibit a high electron mobility of 27.6 cm^2/（V.s） due to improved grain boundary states. For bi-layer ZnO：B, the haze value increases and the total transmittance decreases with the increasing film thickness of the second modification layer. When applied in hydrogenated microcrystalline silicon （μc-Si：H） thin-film solar cells, the modified textured surface ZnO：B layers present relatively higher conversion efficiency than conventional ZnO：B films.