激光再制造机器人待加工零件形貌三维重建

采用双目摄像机结合结构光组成主动视觉测量系统,并与机器人耦合,构建了一种具有视觉功能的智能激光加工机器人,能够感知各种复杂曲面轮廓,重建三维形貌。系统由六自由度机器人、双目摄像机和结构光发射器组成。机器人带动双目摄像机和结构光发射器运动,既实现多视角测量,消除测量中的"死角",重建工件的完整三维形貌,又将测量到的点云数据转换到机器人坐标系。阐述了测量原理和数学模型,进行了单摄像机内外参数的标定,双目摄像机相对关系的标定,双目摄像机与机器人之间的手眼关系标定,得到摄像机内参数矩阵,手眼关系矩阵,机器人与世界坐标系关系矩阵。对双目图像进行大步距图像分割,提取目标区域,平滑降低图像噪声,重心法提取亚像素级结构光条纹中心,根据极线约束进行左右条纹配准,三维算法得到空间点坐标,可方便地转换到世界坐标系,实现全局坐标的统一。     

双平面法标定的双目视觉三维测量系统

针对传统摄像机标定过程复杂、三维测量精度不高的问题,提出了一种基于投影直线相交的双目视觉三维测量方法,并给出了基于神经网络的标定方法。根据摄像机成像特点,利用双标定平面上的点求取投影直线方程;针对摄像机成像复杂的畸变模型,利用BP神经网络对复杂非线性映射关系的强大逼近能力,对左右两台摄像机于远近标定平面处分别进行隐式标定,得到图像像素坐标到平面模板二维物理坐标的映射关系;设计制作了试验平台,采用手工辅助的方法获得网格模板训练样本。此标定方法完全适用于大视场、近距离、高精度的双目视觉传感器。试验结果表明,系统对空间已知长度的测量结果误差约为0.109 mm,测量精度较高。     

智能坐标测量中零件位姿的单目立体识别

为了使三坐标测量机快速准确地识别出被测零件的位姿,提出了一种基于三坐标测量机平动的单目立体视觉识别方法,对该方法的原理、位姿参数的求解和识别过程进行了研究。根据双目立体视觉原理,以三坐标测量机带动摄像机沿x轴或y轴平移,在两个不同位置分别拍摄被测零件的一幅图像,经过同名像点的匹配实现单摄像机立体视觉测量,得到被测零件上各特征点在摄像机坐标系中的三维坐标;由摄像机标定参数,进一步计算出各特征点在机器坐标系中的三维坐标;再结合各特征点在零件CAD坐标系中的对应坐标,求解出被测零件的位姿参数。进行了识别实验,实验数据表明该识别方法是可行的,满足实时测量要求。     

基于双线投影与线面约束的3D扫描测量系统研究

将双目传感器和线结构光有机地结合到一起,设计了一套能够对大尺寸被测物进行无导轨三维扫描的测量系统。通过标定实现双目传感器与结构光传感器坐标系的统一。提出了一种双线投影模型,实现了双目标记点的立体匹配和标记点传感器坐标的测量。设计了基于线面约束的结构光测量模型,实现了物体表面光条三维信息的获取。采用空间几何相对不变性原则实现标记点传感器坐标和世界坐标的全局匹配,进而确定在测量位置处传感器坐标系与世界坐标系的转换关系。最终将传感器实时扫描测量的物体表面的三维点云数据转换到世界坐标系下,实现对被测物三维的扫描测量,工作距离下扫描测量精度优于0.08 mm。     

采用张量分解的四摄像机测量系统标定方法

摄像机标定是精密三维视觉测量的关键,为了实现对多摄像机测量系统的精确标定,首先分析了现有基于一维靶标的多摄像机标定方法的优缺点,并针对其不足,提出了一种基于张量分解的多相机标定方法,该方法主要包括以下三个方面的内容:(1) 利用透视投影成像模型和刚体变换理论建立多摄像机测量的数学模型;(2) 分析现有基于基本矩阵的多摄像机标定方法存在标定结果之间相互耦合的问题;(3) 将四摄像机测量系统的四焦张量引入标定过程中,利用一维标定靶标的成像点坐标求解的四摄像机测量系统的四焦张量,并根据四焦张量的简化求解方法来精炼获取摄像机矩阵。最后,通过实验验证了该方法的有效性和准确性,实验结果表明:(1) 四摄像机三维测量系统的标定可仅通过三组标定靶标图像即可实现,且标定操作效率相对于基本矩阵法更高;(2) 在4000 mm×4000 mm×2000 mm范围内,多摄像机测量系统的精度达到4 mm (3σ),相比于传统方法具有更精确的标定结果。满足室内运动目标位姿精确测量的要求。     

基于立体视觉标定方法的改进研究

摄像机标定是立体视觉研究与非接触测量的重要组成部分,是精密视觉测量的基础,传统的标定需要建立复杂的数学模型,从而描述双目视觉中三维空间物点坐标和两个摄像机像面像点坐标间的非线性关系。而神经网络可以有效地处理非线性映射问题。本文介绍一种改进的RBF神经网络,并对该网络标定法与传统标定方法及BP网络标定法的标定结果进行比较。实验结果表明:基于改进RBF神经网络的双目视觉标定方法能获得较高的标定精度。     

基于双目视觉的工件尺寸三维测量

针对传统的接触式测量方法存在测量速度慢、效率低等问题,本文基于双目视觉视差原理,采用了一种双目视觉测量方法。首先,利用双目视觉系统采集带有标志圆的靶标图像对,进行摄像机标定;然后,采用Canny自适应算子检测图像的边缘,通过椭圆拟合来确定特征点,在极线约束条件下完成图像的立体匹配,最后将图像坐标换算成世界坐标系下的三维坐标。实验结果表明,该方法对于有标志点的被测对象具有测量精度高的特点,误差在0.07mm以下。     

基于绝对相位靶的摄像机标定仿真与实验研究

摄像机标定是结构光三维传感技术中联系测量系统内外参数与三维坐标之间的重要环节.基于灰度信息提取特征点的摄像机标定方法易受图像噪声、对比度等因素的影响.提出一种基于绝对相位靶(APT)的摄像机标定方法,采用时间相位展开算法计算绝对相位,提取相位值为4π整数倍的特征点,采用局部窗口最小二乘拟合算法计算特征点的精确亚像素坐标...     

基于全局空间控制的高精度柔性视觉测量系统研究

针对传统机器人视觉测量系统中测量精度受机器人绝对定位精度限制的问题,构建了基于全局空间控制的高精度柔性视觉测量系统并研究其标定技术。通过全局空间测量定位系统实现机器人末端工具的高精度实时控制,可以突破机器人自身定位精度的限制,充分发挥其高度柔性的运动特性。为实现系统高精度测量,提出一种基于单应性矩阵的视觉传感器外参标定方法,该方法仅需对所设计的平面靶标进行一次成像,结合激光跟踪仪进行坐标转换即可实现传感器坐标系与外部参考坐标系之间坐标转换关系的精确标定。实验结果表明,基于全局空间控制的机器人视觉测量系统在其工作空间中距离测量精度优于0.2/mm,较传统的机器人视觉测量系统得到显著提高。     

基于神经网络的双目视觉摄像机标定方法的研究

摄像机标定是精密视觉测量的基础，传统的双目标定位需要建立复杂的数学模型。神经网络可以有效地处理非线性映射问题，本文介绍了一种BP神经网络，可以很好地描述双目视觉中三维空间特征点坐标和2个摄像机对应像点间的非线性关系，并且为了提高网络的学习能力引入了动态因子。将神经网络标定方法与传统的常用标定方法比较，实验结果表明，基于神经网络的双目视觉标定方法能获得较高的标定精度。     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.