原子力显微镜与X射线光电子能谱对ITO表面改性的研究

采用氧气等离子体(OP)处理对氧化铟锡(ITO)薄膜进行表面改性,通过原子力显微镜(AFM)、X射线光电子能谱(XPS)和四探针等测试手段对薄膜样品进行表征,研究了OP处理对ITO表面性质的影响.实验结果表明OP处理有效去除了ITO表面的污染物,优化了ITO表面的化学组分,降低了ITO表面的粗糙度和方块电阻,改善了ITO的表面形态.与此同时,通过XPS监测研究了OP处理后ITO表面化学组分随老化时间的变化,结果显示经过优化的化学组分随老化时间增加而逐渐退化.另外,以OP处理后经过不同老化时间的ITO样品作为空穴注入电极,制备了有机电致发光器件(OELD),通过测试器件的电压-电流-亮度特性,进一步研究了ITO表面性质对于OELD光电性能的影响.     

有机光电器件ITO阳极表面改性及其时效性研究

采用射频氧等离子体(RFOP)处理对氧化铟锡(ITO)薄膜表面进行改性,通过原子力显微镜、X射线光电子能谱、X射线衍射仪和接触角仪等测试表征,研究了改性对ITO表面性质的影响。实验结果表明,RFOP处理优化了ITO表面的化学组分,提高了ITO表面的平整度,改善了ITO表面的物理化学性质。同时,通过接触角监测和表面能计算,研究了ITO表面RFOP改性的时效性,结果证实,ITO表面优化后的物理化学性质随存放时间增加而逐渐退化。另外,采用改性后不同存放时间的ITO衬底作为阳极,制备了有机发光器件,通过测量光电特性,进一步研究了ITO表面性质对器件性能的影响。     

氧等离子体处理对氧化铟锡表面化学状态影响的ADXPS研究

利用变角X射线光电子谱对氧等离子体处理前后氧化铟锡ITO薄膜的表面化学状态进行了表征,实验发现用溶剂清洗之后的ITO薄膜表面存在一层厚度大约为0．7nm的非导电碳氢化合物污染层,氧等离子体处理方法可有效地消除C污染,而残存的少量污染C被部分氧化形成含羰基和基的化学物种,氧等离子体处理不仅提高了约5．0nm深度范围内的ITO薄膜表层中O的总体含量,更重要的是提高了膜层中O2－离子氧种的含量,改变了膜层化学结构,使得ITO薄膜表面的导电性能降低,同时改善了整个表面层化学结构的均匀性。     

PET衬底上ITO薄膜的制备及光电性能

用脉冲磁控溅射法在柔性衬底聚对苯二甲酸乙二醇酯(PET)上制备了氧化铟锡(ITO)透明导电薄膜,研究了溅射气压、时间和衬底温度等工艺条件对ITO薄膜光电性能的影响,并采用X射线衍射仪(XRD)、扫描电镜(SEM)对薄膜的物相结构与表面形貌进行了分析。结果表明:薄膜的平均晶粒尺寸随衬底温度的升高而增大;当溅射时间增加时,方块电阻与光透过率均减小;当衬底温度升高时,方块电阻减小,可见光透过率增大。     

柔性衬底ITO薄膜的制备及其光电性能研究

在室温下,采用直流反应磁控溅射法,在聚酯薄膜（PEP）衬底上镀制了高性能的ITO薄膜。为了提高薄膜与基底的结合力,溅射前采用多弧离子源对PEP表面进行了等离子体清洗。研究了溅射工艺参数对ITO薄膜的光电性能和红外发射率的影响规律,探讨了ITO膜的透光和导电机理,并分析了方块电阻与红外发射率的相互关系。实验结果表明,通过等离子体清洗,ITO薄膜的结合力和光电性能都得到了改善。ITO薄膜的红外发射率和方块电阻受制备条件的影响规律具有相似之处,红外发射率随薄膜方块电阻的增大而呈增加的趋势。     

氧等离子体处理对氧化铟锡表面化学状态影响的ADXPS研究

利用变角X射线光电子谱对氧等离子体处理前后氧化铟锡ITO薄膜的表面化学状态进行了表征.实验发现用溶剂清洗之后的ITO薄膜表面存在一层厚度大约为0.7nm的非导电碳氢化合物污染层.氧等离子体处理方法可有效地消除C污染,而残存的少量污染C被部分氧化形成含羰基和羧基的化学物种.氧等离子体处理不仅提高了约5.0nm深度范围内的ITO薄膜表层中O的总体含量,更重要的是提高了膜层中O2-离子氧种的含量,改变了膜层化学结构,使得ITO薄膜表面的导电性能降低,同时改善了整个表面层化学结构的均匀性.     

ITO薄膜直流反应磁控溅射制备及性能研究

以90wt%In和10wt%Sn铟锡合金为靶材,采用直流磁控反应溅射法在玻璃基片制备ITO透明导电薄膜.用紫外-可见光分光光度计、四探针电阻仪、XRD和SEM分别测试了ITO薄膜的紫外-可见光透射光谱、方块电阻、薄膜的结构和表面形貌.研究了氧分压对ITO薄膜性能的影响.实验结果表明,ITO薄膜随着氧分压的增加,薄膜紫外透射光谱的吸收截止边带向短波长方向漂移.随着氧分压的增大,ITO薄膜的方块电阻增加,结晶程度变好,晶粒尺寸变大.     

氧化钛薄膜表面等离子体处理引发官能团形成的研究

采用水/氧气,丙烯酸/氧气脉冲射频等离子体处理方法,对氧化钛薄膜进行表面改性.结果表明,水蒸气/氧气混合气体等离子体处理在氧化钛薄膜表面产生了吸附水及游离羟基,丙烯酸/氧气混合气体等离子体处理在氧化钛薄膜表面形成了羟基、羧基和羰基官能团.经水蒸气/氧气、丙烯酸/等离子体处理的氧化钛薄膜的水接触角分别降低了67.3和58.5°,极性分量分别增加了36.5和50.9mJ/m2,表现出很好的亲水性.     

空间太阳电池玻璃盖板表面超薄ITO防静电层的设计及制备工艺

ITO/MgF2复合薄膜既具有较好的表面导电性能又具有较高的透过率,可应用于空间太阳电池玻璃盖板表面。文章主要对ITO/MgF2复合薄膜中表层的超薄ITO薄膜进行了研究。利用TFCalc软件模拟了ITO薄膜厚度对ITO/MgF2复合薄膜光学性能的影响,根据模拟结果采用电子束蒸发法在衬底上依次沉积MgF2薄膜和氧化铟锡(ITO)薄膜,研究了ITO薄膜工艺参数(沉积速率、沉积温度和工作气压)和ITO薄膜厚度对ITO/MgF2复合薄膜光电性能及微观结构的影响。当ITO薄膜沉积速率为0.05nm/s、沉积温度为400℃、工作气压为2.3×10~(-2) Pa、厚度为10nm时,表层ITO薄膜基本连续,其方块电阻(1.94kΩ/)已符合设计需求,ITO/MgF2复合薄膜在可见光区间(400~800nm)的平均透过率达到89.00%。     

磁控溅射ITO薄膜的退火处理

采用直流磁控溅射方法在室温下玻璃基板上制备ITO(Indium tin oxide)薄膜,并在真空中不同温度(100℃~400℃)下退火处理.研究了退火对薄膜表面形貌、电光特性的影响.XRD测试发现薄膜在200℃退火后结晶,优选晶向为(222).随退火温度升高,方块电阻迅速下降,表面更加平整,薄膜在可见光范围平均透过率提高到85%.     

Estimation of Parameters of Universal Distribution of Moments of Failure of Products

A method is proposed for estimating the parameters of a mixture of exponential and Weibull distributions for which the accuracy of preliminary estimates obtained by graphical analysis is refined in accordance with the criterion of maximum likelihood. The efficiency of the proposed method is supported by the results of statistical modeling.     

Evaluation of optical properties of highly scattering media by moments of distributions of times of flight of photons

A novel method for the determination of the optical properties of tissue from time-domain measurements is presented. The data analysis is based on the evaluation of the first moment and the second centralized moment, i.e., the mean time of flight and the variance of the measured distribution of times of flight (DTOF) of photons injected by short (picosecond) laser pulses. Analytical expressions are derived for calculation of absorption and of reduced scattering coefficients from these moments by application of diffusion theory for infinite and semi-infinite homogeneous media. The proposed method was tested on experimental data obtained with phantoms, and results for absorption and reduced scattering coefficients obtained by the proposed method are compared with those obtained by fitting of the same data with analytical solutions of the diffusion equation. Furthermore, the accuracy of the moment analysis was investigated for a range of integration limits of the DTOF. The moment analysis may serve as a comparatively fast method for evaluating optical properties with sufficient accuracy and can be used, e.g., for on-line monitoring of optical properties of biological tissue.     

Estimation of potentialities of methods of summation of direct measurement errors

Conventional methods for summation of direct measurement errors are considered. Conditions under which these methods provide consistent results are stated. It is proposed to utilize for characteristic of the total error, its interval estimator or the half-sum of the value obtained by adding up its arithmetic and geometric random errors.Translated from Izmeritel'naya Tekhnika, No. 4, pp. 10–12, April, 1995.     

空压机轴承箱蜗壳温度探头油封改造

由于空压机进气侧轴承箱蜗壳温度探头密封效果不好,使空压机及其后续管道受到油污染。后将温度探头的O形圈密封改为骨架油封,杜绝了轴承箱漏油问题。文章简介空压机的结构和技术参数,详细介绍了骨架油封的制作和优点。     

Characteristics of mechanical properties of materials in studies of conditions of attainment of marginal states

It is shown that conditions of attainment of marginal states in the material of structural components are formulated on the basis of analysis of force and deformation criteria of formation and development of destruction. The parameters of these criteria are data on types of structural materials, standard and special characteristics of their mechanical properties, structural forms of considered elements of the equipment, and their operating stress loading. In this case, the construction of a system of state equations for describing interrelation of current damage, external actions, and responses to them is based on the concept of calculating variations in properties of materials at all stages of the design life cycle.     

Determination of parameters of microstructural inhomogeneity of deformation of metals by the method of modeling

The article suggests a method of evaluating the microstructural inhomogeneity of deformation of metals by modeling. The method includes the measurement of deformations of metal according to meshes of a dividing grid with small base and the calculation of the distribution parameters of microdeformations in model representation. It is shown that the modeling method makes it possible objectively to evaluate the microinhomogeneity of deformation of metals independently of the chosen mesh size of the dividing grid. New structural characteristics are introduced: the base and wave of variation expressing the degree of crumbling or amalgamation of metal grains by inhomogeneity of deformation.Translated from Problemy Prochnosti, No. 7, pp. 40–44, July, 1991.     

Analysis of the rate of propagation of the wave of change of boiling modes

An approximate analytical expression is derived for the velocity of the front of the wave of change of boiling modes on a rod and on a plate. The impact of the Thomson effect and of the heater orientation in the gravity field is included. Adequate agreement is demonstrated between the derived relations and experimental data.     

水三相点复现的不确定度评定

水三相点是开尔文热力学温度的唯一基准点，也是ITS-90国际温标重要的定义固定点。因此，水三相点不确定度分析对整个温标的建立、温度量值传递起着至关重要的作用。近3年来，中国计量科学研究院研制出一系列高质量的水三相点容器，加强了水三相点的研究，为不确定度的分析提供了更为可靠的实验依据。同时，不确定度的分析也是客观评价新研制容器性能的一个重要指标。因此，根据实验结果对新研制容器所复现的水三相点进行了不确定度评定。评定结果表明，其扩展不确定度为0．16mK(k=2．69，P=0．99)。