Structural and optical investigation of InGaN/GaN multiple quantum well structures with various indium compositions

We have studied the influence of indium (In) composition on the structural and optical properties of In_x Ga_1−xN/GaN multiple quantum wells (MQWs) with In compositions of more than 25% by means of high-resolution x-ray diffraction (HRXRD), photoluminescence (PL), and transmission electron microscopy (TEM). With increasing the In composition, structural quality deterioration is observed from the broadening of the full width athalf maximum of the HRXRD superlattice peak, the broad multiple emission peaks oflow temperature PL, and the increase of defect density in GaN capping layers and InGaN/GaN MQWs. V-defects, dislocations, and two types of tetragonal shape defects are observed within the MQW with 33% In composition by high resolution TEM. In addition, we found that V-defects result in different growth rates of the GaN barriers according to the degree of the bending of InGaN well layers, which changes the period thickness of the superlattice and might be the source of the multiple emission peaks observed in the In_xGa_1−xN/GaN MQWs with high in compositions.     

表面粗化高空穴浓度InGaN:Mg性能及其发光二极管应用

利用金属有机物化学气相淀积(MOCVD)技术在蓝宝石衬底上生长了InGaN:Mg薄膜,对不同源流量InGaN:Mg材料特件进行了研究.光学和电学特性观测表明,当外延生长温度在760℃,三甲基铟(TMIn)摩尔流量不变时,随CP2Mg和Ⅲ族源摩尔比([CP2Mg]/[Ⅲ])增加,当In摩尔成分增加,空穴浓度也线性增加;当...     

MOCVD生长的InGaN合金的性质

对使用MOCVD方法在蓝宝石衬底上生长的典型InGaN样品进行了光致发光(PL)、霍耳(Hall)及扫描电镜(SEM)测量．结果表明:适当的生长温度(750℃)提高了样品中In的含量和PL强度。当Ⅴ/Ⅲ族比率大约5000时,750℃生长的样品背景载流子浓度约为2.21×1018cm-3,In含量约为11.54%．其室温394nm的带边峰,半高宽约为116meV,束缚能约为32.4meV,可能与束缚激子发光相关．该样品禁带宽度随温度变化的温度系数α(dE/dT)约为0.56×10-3eV/K．较高温度(800℃和900℃)生长的样品In含量较低,PL强度较弱,且在样品表面析出了金属In滴．     

NH3流量调控Ⅴ/Ⅲ比对HVPE生长GaN薄膜的影响

氢化物气相外延(HVPE)法具有生长成本低、生长条件温和、生长速率快等优点,被认为是生长高质量GaN单晶衬底的最有潜力的方法。为了优化HVPE生长GaN的条件,通过改变NH3流量调控Ⅴ/Ⅲ比(NH3流量与HCl流量之比)。通过建立简单的生长模型,对不同Ⅴ/Ⅲ比下GaN薄膜形态变化的机理进行了分析,研究了HVPE生长过程中氮源(Ⅴ族)和镓源(Ⅲ族)不同流量比对结晶质量和表面形貌的影响。实验结果表明,低Ⅴ/Ⅲ比会导致成核密度低,岛状晶胞难以合并;高Ⅴ/Ⅲ比会降低表面Ga原子的迁移率,导致表面高度差异大,结晶质量差。与Ⅴ/Ⅲ比为15.000和28.125相比,Ⅴ/Ⅲ比为21.250时更适合GaN薄膜生长,得到的晶体质量最高。     

InGaN/GaN和InGaN/AlGaN多量子阱中应变对光致发光特性的影响

对蓝宝石衬底上的InGaN/GaN和InGaN/AlGaN多量子阱结构和经激光剥离去除衬底的InGaN/GaN和InGaN/AlGaN多量子阱结构薄膜样品,进行了光致发光谱、高分辨XRD和喇曼光谱测量.PL测量结果表明,相对于带有蓝宝石衬底的样品,InGaN/GaN多量子阱薄膜样品的PL谱峰值波长发生较小的蓝移,而InGaN/AlGaN多量子阱薄膜样品的PL谱峰值波长发生明显的红移;喇曼光谱的结果表明,激光剥离前后E2模的峰值从569.1减少到567.5cm-1.这说明激光剥离去除衬底使得外延层整体的压应力得到部分释放,但InGaN/GaN与InGaN/AlGaN多量子阱结构中阱层InGaN的应力发生了不同的变化.XRD的结果证实了这一结论.     

Influence of Mg Doping on the Morphological, Optical, and Structural Properties of InGaN/GaN Multiple Quantum Wells

In this report, the influence of magnesium doping on the characteristics of InGaN/GaN multiple quantum wells (MQWs) was investigated by means of atomic force microscopy (AFM), photoluminescence (PL), and X-ray diffraction (XRD). Five-period InGaN/GaN MQWs with different magnesium doping levels were grown by metalorganic chemical vapor deposition. The AFM measurements indicated that magnesium doping led to a smoother surface morphology. The V-defect density was observed to decrease with increasing magnesium doping concentration from ∼10⁹ cm⁻² (no doping) to ∼10⁶ cm⁻² (Cp₂Mg: 0.04 sccm) and further to 0 (Cp₂ Mg: 0.2 sccm). The PL measurements showed that magnesium doping resulted in stronger emission, which can be attributed to the screening of the polarization-induced band bending. XRD revealed that magnesium doping had no measurable effect on the indium composition and growth rate of the MQWs. These results suggest that magnesium doping in MQWs might improve the optical properties of GaN photonic devices.     

Temperature dependence of performance of InGaN/GaN MQW LEDs with different indium compositions

The temperature dependence of performance of InGaN/GaN multiple-quantum-well (MQW) light-emitting diodes (LEDs) with different indium compositions in the MQWs was investigated. With increasing In composition in the MQWs, the optical performance of the LEDs at room temperature was increased due to an increase in the localized energy states caused by In composition fluctuations in MQWs. As the temperature was increased, however, the decrease in output power for LED with a higher In composition in the MQWs was higher than that of LED with a lower In composition in the MQWs. This could be due to the increased nonradiation recombination through the high defect densities in the MQWs resulted from the increased accumulation of strain between InGaN well and GaN barrier.     

Effects of Mg-doping concentration on the characteristics of InGaN based solar cells

A major challenge in GaN based solar cell design is the lack of holes compared with electrons in the multiple quantum wells (MQWs). We find that GaN based MQW photovoltaic devices with five different Mg-doping concentrations of 0 cm-3, 5×1017 cm-3, 2×1018 cm-3, 4×1018 cm-3 and 7×1018 cm-3 in GaN barriers can lead to different hole concentrations in quantum wells (QWs). However, when the Mg-doping concentration is over 1×1018 cm-3, the crystal quality degrades, which results in the reduction of the external quantum efficiency (EQE), short circuit current density and open circuit voltage. As a result, the sample with a slight Mg-doping concentration of 5×1017 cm-3 exhibits the highest conversion efficiency.     

MOCVD生长的InGaN薄膜的离子束背散射沟道及其光致发光

采用MOCVD技术以Al2O3为衬底在GaN膜上生长了InGaN薄膜.以卢瑟福背散射/沟道（RBS/Channeling）技术和光致发光（PL）技术对InxGa1-xN/GaN/Al2O3样品进行了测试,获得了合金层的组分、厚度、元素随深度分布、结晶品质及发光性能等信息.研究表明生长温度和TMIn/TEGa比对InGaN薄膜的In组分和生长速率影响很大.在一定范围内,降低TMIn/TEGa比,InGaN膜的生长速率增大,合金的In组分反而提高.降低生长温度,InGaN膜的In组分提高,但生长速率基本不变.InGaN薄膜的结晶品质随In组分的增大而显著下降,InGaN薄膜的In组分由0.04增大到0.26,其最低沟道产额比由4.1%增至51.2%.InGaN薄膜中In原子易处于替位位置,在所测试的In组分范围,In原子的替位率均在98%以上.得到的质量良好的In0.04Ga0.96N薄膜的最低产额为4.1%.研究结果还表明用RBS技术和光致发光技术测定InGaN中In组分的结果相差很大,InGaN的PL谱要受较多因素影响,很难准确测定In组分,而以RBS技术得到的结果是可靠的.     

Growth of InGaN and double heterojunction structure with InGaN back barrier

We study the growth of an InGaN and AIGaN/GaN/InGaN/GaN double heterojunction structure by metalorganic chemical vapor deposition (MOCVD).It is found that the crystal quality of the InGaN back barrier layer significantly affects the electronic property of the AIGaN/GaN/InGaN/GaN double heterojunction.A high crystal quality InGaN layer is obtained by optimizing the growth pressure and temperature.Due to the InGaN layer polarization field opposite to that in the AIGaN layer,an additional potential barrier is formed between the GaN and the InGaN layer,which enhances carrier confinement of the 2DEG and reduces the buffer leakage current of devices.The double heterojunction high-electron-mobility transistors with an InGaN back barrier yield a drain induced barrier lowering of 1.5 mⅤ/Ⅴ and the off-sate source-drain leakage current is as low as 2.6μA/mm at VDs = 10 Ⅴ.     

MOCVD生长源流量对p型GaN薄膜特性影响的研究

利用金属有机物化学气相淀积(MOCVD)技术在蓝宝石衬底上生长p型GaN:Mg薄膜,对不同二茂镁(CP2Mg)流量和Ⅴ族和Ⅲ族摩尔(Ⅴ/Ⅲ)比生长的p型GaN:Mg薄膜特性进行研究。研究表明,增加Ⅴ/Ⅲ比,可以降低螺旋位错密度,提高p型GaN晶体质量。当Ⅴ/Ⅲ比为3 800时,Cp2Mg流量最高为170sccm,获得p型GaN(002)面峰值半高宽(FWHM)最窄为232"。同时研究发现,单纯提高Ⅴ/Ⅲ比对降低刃型位错影响较不明显。     

生长停顿改善MOCVD生长InGaN/GaN多量子阱的特性

利用金属有机物化学气相淀积(MOCVD)生长了InGaN/GaN多量子阱(MQWs)结构,研究了生长停顿对InGaN/GaN MQWs特性的影响.结果表明,采用生长停顿,可以改善MQWs界面质量,提高MQWs的光致发光(PL)与电致发光(EL)强度;但生长停顿的时间过长,阱的厚度会变薄,界面质量变差,不仅In组分变低,富In的发光中心减少,而且会引入杂质,致使EL强度下降.     

Effects of growth interruption on the properties of InGaN/GaN MQWs grown by MOCVD

These applications normally employ an InGaN/GaN mul- tiple quantum wells (MQWs) as the active layer. But the growth of high quality MQWs is very difficult. Firstly, the growth condition is strict due to the high volatility of InN and the low thermal pyrol…     

预应变InGaN/GaN多量子阱发光特性调控研究

为了减弱InGaN/GaN量子阱内的压电极化场,在蓝紫光InGaN/GaN多量子阱激光器结构中采用了预应变InGaN插入层,通过变温电致发光和高分辨X射线衍射测量研究了预应变插入层对量子阱晶体质量和发光特性的影响。实验结果显示,常温下有预应变层的量子阱电致发光谱积分强度显著提高。模拟计算进一步表明,预应变层对量子阱内压电极化场有调制效果,有利于量子阱中的应力弛豫,可以有效减弱量子限制斯塔克效应,有助于提高量子阱的发光效率。     

利用高频Plasma CVD在蓝宝石衬底上生长 立方GaN缓冲层及其光学性质

研究了采用高频PlasmaCVD技术在较低温度下(300—400℃)生长以GaN为基的Ⅲ-Ⅴ族氮化物的可行性,在蓝宝石衬底上生长了GaN缓冲层.热处理后的光致发光谱和X光衍射表明,生长的GaN缓冲层为立方相,带边峰位于3.15eV.在作者实验的范围内,最优化的TMGa流量为0.08sccm(TMAm=10sccm时),XPS分析结果表明此时的Ga/N比为1.03.这是第一次在高Ⅴ/Ⅲ比下得到立方GaN.相同条件下石英玻璃衬底上得到的立方GaN薄膜,黄光峰很弱,晶体质量较好.     

Characterization of quaternary AlInGaN epilayers and polarization-reduced InGaN/AlInGaN MQW grown by MOCVD

We have demonstrated the growth of quaternary AIlnGaN compounds at different growth temperatures and pressures with metalorganic chemical vapor deposition (MOCVD). The optical properties of the samples have been investigated by photoluminescence (PL) at different temperatures. The results show that the sample grown at higher temperature (850℃) exhibits the best optical quality for its sharp band edge luminescence and weak yellow luminescence. The AlInGaN exhibited three-dimensional (3D) growth mode at higher pressure. The band edge emission almost disappeared. With the optimization of AlInGaN growth parameters, we replaced the traditional barrier in InGaN/GaN multiple quantum wells (MQWs) with AlInGaN barriers. The peak wavelength for the InGaN/AlInGaN-MQW based light emitting diodes (LEDs) was very stable at various injection current levels because of the polarization-matched InGaN/AlInGaN MQWs.     

采用ECR-PEMOCVD方法进行立方和六方GaN单晶薄膜生长的准热力学模型和相图

基于热力学平衡理论,对在电子回旋共振等离子体增强金属有机化学气相沉积系统中的GaN薄膜生长给出了一个化学平衡模型.计算表明,GaN生长的驱动力Δp是以下生长条件的函数:Ⅲ族输入分压,输入Ⅴ/Ⅲ比,生长温度.计算了六方和立方GaN的生长相图,计算结果和我们的实验结果显示出一定的一致性.通过分析,解释了高温和高Ⅴ/Ⅲ比生长条件适合六方GaN的原因.上述模型可以延伸到用于GaN单晶薄膜生长的类似系统中.     

Quasi-Thermodynamic Model of MOVPE of InAIN

A quasi-thermodynamic model of MOVPE growth of InxAl1-xN alloy with TMAl,TMIn and ammonia as sources has been proposed. In this improved model,the effect of low decomposition rate of ammonia has been considered and the number of moles is used to express the mass conservation constraints of element N,H,Al and In. It is assumed that the alloy is synthesized by the reactions between ammonia and group Ⅲ elements. The results show that it is more difficult to grow the InxAl1-xN alloy,especially for the InxAl1-xN lattice matched the GaN. In order to enhance the incorporation of indium into InA1N,we should use the lower growth temperature,optimized input Ⅴ/Ⅲ ratio and high nitrogen fraction in the carrier gas. In addition,the decomposed fraction of ammonia should be reduced. Indium droplets would be deposited if the growth conditions have not been selected properly.     

Hot-electron induced degradations in GaN-based LEDs fabricated on nanoscale epitaxial lateral overgrown layers

We report investigations on the hot-electron hardness of GaN-based multiple quantum wells (MQWs) fabricated on nanoscale epitaxial lateral overgrown (NELO) GaN layers. This layer was deposited using a SiO₂ growth mask with nanometer-scale windows. The active regions of the devices consist of five-period GaN/InGaN MQWs. Structural analyses of the material indicate significant reduction in the threading dislocation density of the devices compared to the control which were fabricated without the use of the NELO GaN layers. The hot-electron degradation of the devices due to the application of a large dc. current was characterized by detailed examination of the electroluminescence (EL), I-V, thermoreflectance and the current noise power spectra of the devices as a function of the stress time. Significant improvements in the hot-electron hardness were observed in the device compared to the control.     

低温生长n型氮化镓插入层提高LED抗静电能力

在这篇论文里,我们通过在InGaN/GaN 多量子阱和n型氮化镓层中间插入一层低温生长的n型氮化镓显著提高了LED的抗静电能力。通过引入低温生长的氮化镓插入层使得LED抗击穿电压超过4000V的良品率从9.9%提升到74.7%。低温生长的氮化镓插入层作为后续生长的多量子阱的缓冲层,释放了量子阱中的应力并且改善了量子阱的界面质量。另外,我们证明了在氮气气氛下生长低温氮化镓插入层对于LED抗静电能力的改善要强于氢气气氛,同时也进一步证明低温插入层对量子阱中应力的释放有利于提高LED的抗静电能力。光电测试结果表明,在引入低温nGaN缓冲层后,LED的电学特性并没有衰退,并且LED的光输出功率提高了13.9%。