二次电子分布函数对绝缘壁面稳态鞘层特性的影响

由于缺乏详细的理论计算和实验结果,在研究绝缘壁面稳态流体鞘层特性时,通常假设壁面出射的总二次电子服从单能分布(0)、半Maxwellian分布等.在单能电子轰击壁面的详细二次电子发射模型基础上,采用Monte Carlo方法统计发现:当入射电子服从Maxwellian分布时,绝缘壁面发射的总二次电子服从三温Maxwellian分布.进而,采用一维稳态流体鞘层模型进行对比研究,结果表明:二次电子分布函数对鞘边离子能量、壁面电势、电势及电子/离子密度分布等均具有明显影响;总二次电子服从三温Maxwellian分布时,临界空间电荷饱和鞘层无解,表明随着壁面总二次电子发射系数的增加,鞘层直接从经典鞘层结构过渡到反鞘层结构.     

Effects of Energetic Electrons on Collector and Source Potentials in a Finite Ion Temperature Plasma

Formation of the potential in a two-electron-temperature plasma region facing a floating collector was studied theoretically with a kinetic plasma-sheath model and by electrostatic particle simulation. The electrons were described by truncated full Maxwellian velocity distribution functions and the ions by an accelerated half-Maxwellian velocity distribution function. The collector potential and the plasma source sheath or presheath potential drop were evaluated as functions of the hot to cool electron temperature ratio and the hot electron density ratio using Vlasov and Poison equations. The results showed that the presheath potential drop varied continuously with electron composition ratio for lower values of the electron temperature ratio, while for higher values in a narrow composition ratio range, triple values of the potential were found. Of the two physically acceptable values, the lower was characterized by the cool electrons and the higher by the hot electrons. It is anticipated that a current-free double layer structure is formed in the plasma system between these two potential regions. The collector floating potential, as a function of electron composition ratio, is mainly dominated by the hot electrons, since already a small value of hot electron current is sufficient to compensate the ion saturation current. In order to complete the theoretical investigation we also study the hydrogen plasma system with the XPDP1 particule-in-cell simulation code composed at Berkeley. At certain plasma parameter values formation of a double layer structure was observed. The potential Values on the upper and lower side of the double layer, as well as that of the collector floating potential, corresponded very well to the calculated values. On the upper side the plasma was composed of ions, accelerated through the source sheath potential drop, and electrons consisting of cool full Maxwellian and hot truncated full Maxwellian populations. On the lower side only hot electrons and ions additionally accelerated through the double layer were found.     

两种温度电子对稳态等离子体鞘层的影响

建立包含冷热电子的无碰撞等离子体鞘层的流体模型,利用数值模拟研究含有两种温度电子时等离子体鞘层的产生.结果表明:对于含有两种不同温度电子的稳态等离子体,冷电子的温度越低或者冷电子的含量越多,鞘边离子的马赫数临界值就越小,鞘层的宽度就变得越窄,沉积器壁的离子动能流也就越少.此外,研究不同种类的等离子体(Ar、Ke、Xe),鞘层厚度和离子沉积器壁动能流受冷电子的影响.     

Fluid Model of a Sheath Formed in Front of an Electron Emitting Electrode Immersed in a Plasma with Two Electron Temperatures

The formation of a sheath in front of a negatively biased electrode (collector) that emits electrons is studied by a one‐dimensional fluid model. Electron and ion emission coefficients are introduced in the model. It is assumed that the electrode is immersed in a plasma that contains energetic electrons. The electron velocity distribution function is assumed to be a sum of two Maxwellian distributions with two different temperatures, while the ions and the emitted electrons are assumed to be monoenergetic. The condition for zero electric field at the collector is derived. Using this equation the dependence of electron and ion critical emission coefficients on various parameters ‐ like the ratio between the hot and cool electron density, the ratio between hot and cool electron temperature and the initial velocity of secondary electrons ‐ is calculated for a floating collector. A modification of the Bohm criterion due to the presence of hot and emitted electrons is also given. The transition between space charge limited and temperature limited electron emission for a current‐carrying collector is also analyzed. The critical potential, where this transition occurs, is calculated as a function of several parameters like the Richardson emission current, the ratio between the hot and cool electron density, the ratio between hot and cool electron temperature and the initial velocity of secondary electrons. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

The dust-acoustic mode in two-temperature electron plasmas with charging effects

Dust charging in an unmagnetized collisionless dusty plasma with two-temperature electrons was investigated based on the orbital motion limited theory, where the two-temperature electrons and ions are modelled by the Maxwellian distributions. Then by taking into account the effects of two-temperature electron and the associated charging fluctuations, the dispersion peculiarities of dust-acoustic waves are studied based on dust fluid dynamics. The present results show that the effect will introduce a dissipation on the mode, and the dispersion and the dissipation depend on the temperature ratio and number density ratio of hot and cold electrons.     

Stochastic electron heating in a capacitive RF discharge withnon-Maxwellian and time-varying distributions

In capacitively coupled radio frequency discharges, the electrons gain and lose energy by reflection from oscillating, high voltage sheaths. When time-averaged, this results in stochastic heating, which at low pressure is responsible for most of the electron heating in these discharges. Previous derivations of stochastic heating rates have generally assumed that the electron distribution is a time-invariant, single-temperature Maxwellian, and that the sheath motion is slow compared to the average electron velocity, so that electrons gain or lose a small amount of energy in each sheath reflection. Here we solve for the stochastic heating rates in the opposite limit of fast sheath motion and consider the applicability of the slow and fast sheath equations in the intermediate region. We also consider the effect of a two-temperature Maxwellian distribution on particle balance and the effect of a time-varying temperature on the heating rates and densities     

Ion acceleration during adiabatic plasma expansion: Renormalization group approach

The renormalization group approach is applied to derive an exact solution to self-consistent Vlasov kinetic equations for plasma particles in the quasineutral approximation. The solution obtained describes the one-dimensional adiabatic expansion into vacuum of a plasma bunch with arbitrary initial velocity distributions of the electrons and ions. The ion acceleration is investigated for both a Maxwellian two-temperature initial electron distribution and a super-Gaussian initial electron distribution.     

Velocity distributions in magnetron sputter

Results of the particle simulation of magnetron sputter are presented. Using a kinetic code, we obtain the spatial profiles of plasma density, potential, and velocity distribution function, along with the electron temperature, the ion density, the current density, and the deposition profiles at the anode surface. The result of simulation is compared with the Child-Langmuir law applied to the magnetron discharge and the global model. The velocity distribution function of electrons is Maxwellian, but that of ions is non-Maxwellian near the cathode with the majority in the energy range below 50 eV     

Modeling of plasma-etch processes using well stirred reactorapproximations and including complex gas-phase and surfacereactions

A 0-D or well stirred reactor model determines spatially and time-averaged species composition in plasma-etch reactors, through solution of species, mass, and electron-energy balance equations. The use of well stirred reactor approximations reduces the computational expense of detailed kinetics calculations and allows investigation of the dependence of plasma chemistry on etch-process parameters. The reactor is characterized by a chamber volume, surface area, net mass flow or residence time, pressure, energy loss to surroundings, power deposition, and inlet-gas composition. The electron-energy equation includes a detailed power balance with losses to ions and electrons through the sheath, as well as inelastic and elastic collision losses. The model employs reaction-rate coefficients for electron-impact reactions, which require an assumption of the electron energy distribution function (EEDF). We compare model results using Maxwellian EEDF's, as well as reaction-rate coefficients determined as a function of average electron energy through solution of the Boltzmann equation, for chlorine chemistry. The Boltzmann rates are determined by time-lagging the equilibration of electrons with applied electric fields. The Maxwellian reaction rates give higher ionization fractions than the Boltzmann rates, affecting the predicted electronegativity and positive ion composition for chlorine plasmas. The model also shows a strong sensitivity of the plasma composition to the assumed surface-recombination probability of atomic chlorine     

Tonks-Langmuir problem for a bi-Maxwellian plasma

An analytical solution of the Tonks-Langmuir (TL) problem with a bi-Maxwellian electron energy distribution function (EEDF) is obtained for a plasma slab. The solution shows that the ambipolar potential, the plasma density distribution, and the ion flux to the wall are mainly governed by the cold electrons, while the ionization rate and voltage drop across the wall sheath are governed by the hot electrons. The ionization rate by direct electron impact is found to be spatially rather uniform, contrary to the T-L solution where it is proportional to the plasma density distribution. The temperature of hot electrons defined by the ionization balance is found to be close to that of the T-L solution for a mono-Maxwellian EEDF, and is in reasonable agreement with experiments carried out in a low pressure capacitance RF discharge. The energy balance for cold electrons in this discharge shows that their heating by hot electrons via Coulomb interaction is equalized by the cold electrons' escape to the RF electrodes during collapse of the RF sheath     

One-dimensional solution to the stable, space-charge-limited emission of secondary electrons from plasma-wall interactions

Numerical solutions to the stable, space-charge-limited emission of secondary electrons from plasma-wall interaction are found based on one-dimensional plasma moment equations that assume cold ions, Maxwellian electrons and cold secondary electrons. The numerical method finds a range of plasma parameters that permit stable emission of secondary electrons in the absence of normal electric fields to the wall. These solutions were not obtained with previous method that solves only for the marginally stable plasma sheath. Range of the ion Mach number at the sheath edge, the floating wall potential relative to the plasmas, and secondary electron emission coefficients corresponding to the vanishing normal electric fields are found for hydrogen, argon and xenon plasmas. The results show that a relatively small range of secondary electron emission coefficient exists to allow stable sheaths structures along with larger ranges of ion injection speed at the sheath edge and floating potential of the emitting wall.     

The Equilibrium Distribution for Free Electrons in a Real Gas

The equilibrium distribution for free electrons in a real gas is derived based on the existence of an interaction potential between a free electron and its nearest neighbor atom (or ion). The form of the interaction potential is inversely proportional to rl where l is a constant; and the derived distribution reduces to the Maxwellian form when the interaction is neglected. It is shown that for most physical situations this interaction potential will only contribute a miniscule change to those electron properties which are dependent upon<|vj?>, j>-3 where is the electron speed.     

Quasi-static surface modes of plasma layer with anisotropic electron temperature

Quasi-static surface wave propagation in a plasma layer with anisotropic electron temperature is considered. The case is analyzed where the electron temperature in the direction normal to the plasma boundary is considered to be zero, while in the direction along the boundary, electrons are described by the Maxwellian velocity distribution. It is shown that the modes of such a layer are described by equations for bulk plasma waves with renormalization of the electron density affecting the surface wave dispersion and damping.     

Hot Ion Production in a Modified Penning Discharge

Ions with Maxwellian energy distributions and kinetic temperatures up to seven keV have been observed in a modified Penning discharge. Investigation of the plasma revealed two distinct spoke-like concentrations of charge, consisting respectively of ions and electrons, rotating with different velocities in the sheath between the plasma and the anode ring. Theoretical expressions are derived for the frequency of the ion and electron spoke rotation, for the ion kinetic temperature resulting from the ion spoke velocity, and for the ion heating efficiency. An extensive series of experimental measurements were made to check these theoretical expressions, and approximate agreement was obtained. It is shown that the ion kinetic temperature in the modified Penning discharge scales according to the relation Vi ~ Vani1/4/B1/2 where Va is the applied anode voltage, ni is the ion density in the sheath, and B is the magnetic field strength. The observed data demonstrate that the ion heating efficiency can be as high as several tens of percent.     

Heat flow through a plasma sheath in the presence of secondary electron emission from plasma‐wall interaction

The formation of a plasma sheath in front of a negative wall emitting secondary electron is studied by a one‐dimensional fluid model. The model takes into account the effect of the ion temperature. With the secondary electron emission (SEE ) coefficient obtained by integrating over the Maxwellian electron velocity distribution for various materials such as Be, C, Mo, and W, it is found that the wall potential depends strongly on the ion temperature and the wall material. Before the occurrence of the space‐charge‐limited (SCL ) emission, the wall potential decreases with increasing ion temperature. The variation of the sheath potential caused by SEE affects the sheath energy transmission and impurity sputtering yield. If SEE is below SCL emission , the energy transmission coefficient always varies with the wall materials as a result of the effect of SEE , and it increases as the ion temperature is increased. By comparison of with and without SEE , it is found that sputtering yields have pronounced differences for low ion temperatures but are almost the same for high ion temperatures.     

Nonstationary macroparticle charging in an arc plasma jet

The charging of liquid metal macroparticles in the rarified part of a vacuum arc plasma jet is studied. The sheath in the vicinity of the macroparticle is collisionless and the problem with different Debye length to macroparticle radius ratios is analyzed. Maxwellian velocity distribution functions with different temperatures for the electrons and ions in an arbitrary ratio are allowed in the model. By solving the equation for the electric field together with the equation for ion and electron flux, the charging time and the near electric field of the macroparticles were calculated. The kinetics of the macroparticle charging are controlled by the ion and electron flux to the macroparticle, which depend on the potential distribution in the sheath. The potential falls off slower than 1/r² in the case of the large Debye length to macroparticle radius ratio, and falls off more rapidly than 1/r² in the other case. The charge which accumulates on a macroparticle at distances of about 10 cm from a 100-Å cathode is about 10^-16 C and the charging time is about 10^-5 s. The influence of the plasma drift velocity on the macroparticle charging is small. The model presented here agrees well with an experimental study of macroparticle repulsion from biased substrates     

先进燃料聚变反应性增强的新机制

采用电子回旋波加热D-^３Ｈe先进燃料聚变等离子体，使它处在高的电子温度下，一些新的物理过程(如聚变产物之间核-核弹性散射、核力与库仑相干散射及核反应的传播)变得相对重要，而高能聚变产物离子与电子的库仑相互作用相对变弱.部分本底燃料离子被高能的聚变反应产物核击出而提升到分布函数尾部成为“超热”燃料离子，从而可能提高D-^３Ｈe聚变的反应性.还计算了这些机制的能量传递. 关键词： 核-核弹性散射 核-库仑相干散射 ３Ｈe聚变')" href="#">D-^３Ｈe聚变 聚变反应性增强     

Potential Formation in Front of an Electrode Close to the Plasma Potential Studied by PIC Simulation

Potential formation in front of an electrode that has the potential which is close to the plasma potential is studied by particle‐in‐cell (PIC) simulations. The code BIT1 [D. Tskhakaya, R. Schneider, J. Comp. Phys., 225 , 829 (2007)] is used for this purpose. It is shown that this code is very appropriate for our analysis because of its ability to create charged particles by uniform volume production in the entire system and to maintain in the same time the Maxwellian electron velocity distribution function prescribed in the input file. It turns out that some modifications of the code are necessary in order to achieve small sheath potential drops and to detect the cutoff in the electron velocity distribution function. The modifications of the code are described. The small sheath potential drop is achieved by introducing a finite reflectivity of the electrons at the left electrode, while the expected cutoffs of the electron velocity distribution function are found by tracking the reflected electrons as separate particle species. The simulation results are compared to the theoretical model of Jeli? [N. Jeli?, Phys. Plasmas, 18 , 113504 (2011)]. The matching is very good and this is a sign that the PIC simulations are very appropriate tool for the analysis of this type of problems. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Kinetic theory of stochastically heated RF capacitive discharges

Stochastic sheath heating is the dominant heating mechanism at low pressures for radio frequency (RF) capacitive discharges. It produces an electron energy probability distribution function (EEPF) that approximates a two-temperature Maxwellian, as seen in both experiments and numerical simulations. We have used the fundamental kinetic equation to obtain a space- and time-averaged kinetic equation. We assume that electrons with the x component kinetic energy lower than a certain threshold Φ are prevented from interacting with the sheath heating fields. With these approximations and either a knowledge of the central density or an ansatz on Φ, we obtain a self-consistent solution for the quasiequilibrium discharge parameters valid for low pressures in argon. The results are compared to those found in experiments, yielding reasonable agreement     

Anode plasma structure in a gas discharge with neutral density depleted by ionization

We consider the anode plasma structure in a gas discharge with density of neutral atoms (neutrals) depleted by strong ionization. We obtain analytical solutions of the quasi-neutrality equation for the potential distribution and a condition for the existence of anode plasma in the one-dimensional case for arbitrary potential dependences of the neutral depletion frequency and the electron density. We consider the special cases of a constant neutral depletion frequency, ionization by Maxwellian electrons, and ionization by an intense electron beam under the conditions of collisionless ion motion and Boltzmann thermal electron distribution. The solutions for the first two cases at zero depletion parameter, i.e., at constant gas density, match those obtained in [1] by a power series expansion. In the case of ionization by Maxwellian electrons, the formation of anode plasma at reasonable working-gas flow rates is shown to be possible only at a fairly high electron temperature (if, e.g., xenon is used as the working gas, then T _e ≥ 5 eV). Steady-state solutions of the quasi-neutrality equation under ionization by an intense electron beam exist only if the ratio of the electron beam density to the maximum thermal electron density does not exceed a certain limiting value.