| 离子束刻蚀计量光栅的衍射现象 |
| |
| 引用本文： | 陈洪璆,林野,曹向群.离子束刻蚀计量光栅的衍射现象[J].光学仪器,1997(Z1). |
| |
| 作者姓名： | 陈洪璆 林野 曹向群 |
| |
| 作者单位： | 浙江大学现代光学仪器国家重点实验室!杭州，310027，浙江大学现代光学仪器国家重点实验室!杭州，310027，浙江大学现代光学仪器国家重点实验室!杭州，310027 |
| |
| 基金项目： | 现代光学仪器国家重点实验室开放课题 |
| |
| 摘 要： | 介绍了计量光栅经离子束刻蚀后的衍射现象,实测了刻蚀表面的形貌特征,还对这种衍射现象进行了讨论。
|
| 关 键 词： | 离子束刻蚀 计量光栅 衍射 |
The Diffractive Phenomenon of the Metrologcal Grating Etched by Ion |
| |
| Chen Hong-qiu,Lin Ye,Cao Xiang-qun.The Diffractive Phenomenon of the Metrologcal Grating Etched by Ion[J].Optical Instruments,1997(Z1). |
| |
| Authors: | Chen Hong-qiu Lin Ye Cao Xiang-qun |
| |
| Abstract: | This paper introduces and analyses the diffractive phenomenon of the metrologcal grating etched by ion beam,furthermore,it surveys the feature of etched surface of the grating. Physics of the diffractive phenomenon also is discussed. |
| |
| Keywords: | Diffractive Phenomenon Metrologcal Grating |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《光学仪器》浏览原始摘要信息 |
|
点击此处可从《光学仪器》下载全文 |
