| CMOS磁敏/光敏兼容传感器集成电路的设计 |
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| 引用本文： | 郭清,韩雁,朱大中.CMOS磁敏/光敏兼容传感器集成电路的设计[J].固体电子学研究与进展,2009,29(1). |
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| 作者姓名： | 郭清 韩雁 朱大中 |
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| 作者单位： | 浙江大学信息学院微电子与光电子研究所,杭州,310027 |
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| 摘 要： | 研制了一种新型的磁敏传感器和光敏象限传感器兼容的集成电路。该传感器采用0.6μm标准CMOS工艺制造,设计并实现了磁敏传感器、光敏象限传感器及其兼容的信号处理电路的单片集成,并采用有源预处理电路和相关二次采样电路进行磁敏和光敏信号的采集和降噪处理,具有较高的磁场灵敏度(0.0361T-1)感光灵敏度(2V/lx.s),实现了在一个芯片上同时传感磁信号和光信号的功能。
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| 关 键 词： | 互补金属氧化物半导体 磁敏传感器 光敏传感器 |
Compatible CMOS Sensor IC of Magnetic Sensor and Photoelectric Quadrants Sensor |
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| GUO Qing,HAN Yan,ZHU Dazhong.Compatible CMOS Sensor IC of Magnetic Sensor and Photoelectric Quadrants Sensor[J].Research & Progress of Solid State Electronics,2009,29(1). |
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| Authors: | GUO Qing HAN Yan ZHU Dazhong |
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| Affiliation: | Institute of Microelectronics Technology & System Design;Zhejiang University;Hangzhou;310027;CHN |
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| Abstract: | A new compatible CMOS sensor integrated circuits of magnetic sensor and photoelectric quadrants sensor is designed and fabricated in a 0.6 μm standard CMOS process. It realizes the single chip integration of the magnetic sensor and photoelectric quadrants sensor with the compatible analog processing circuits,with advanced magnetic sensitivity (0.036 1 T-1) and optical sensitivity (2 V/lx·s). In the design of processing circuits,the active pre-processing circuits and the CDS (correlated double sampling) circuits are introduced to realize the signal sampling and noise elimination. |
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| Keywords: | CMOS magnetic sensor photoelectric sensor |
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