| 亚稳态氖原子光刻的实验研究 |
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| 引用本文： | 霍芸生,蔡惟泉,曾庆林,鄢和明,王育竹.亚稳态氖原子光刻的实验研究[J].中国激光,2003,30(1):22-24. |
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| 作者姓名： | 霍芸生 蔡惟泉 曾庆林 鄢和明 王育竹 |
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| 作者单位： | 中国科学院上海光学精密机械研究所量子光学开放实验室,上海,201800 |
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| 基金项目： | 国家自然科学基金 (No .19774 0 6 0 )资助项目 |
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| 摘 要： | 用亚稳态氖原子束进行了原子光刻实验。用栅网作掩膜 ,以扩散泵油的有机分子在高能亚稳态氖原子作用下所生成的碳膜作抗蚀剂 ,在硅片上刻蚀出分辨率为 2 μm的微结构 ,为进一步的纳米级原子光刻技术的研究打下了基础。
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| 关 键 词： | 激光物理 原子光刻 亚稳态氖原子束 惰性气体 |
| 收稿时间： | 2001/10/29 |
Experimental Study on Metastable-neon Atom Lithography |
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| HUO Yun sheng,CAI Wei quan,ZENG Qing lin,YAN He ming,WANG Yu zhu.Experimental Study on Metastable-neon Atom Lithography[J].Chinese Journal of Lasers,2003,30(1):22-24. |
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| Authors: | HUO Yun sheng CAI Wei quan ZENG Qing lin YAN He ming WANG Yu zhu |
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| Abstract: | The atomic lithography experiments were carried out by use of a metastable neon atomic beam. Metallic meshes were used as masks, and the carbon films produced from the organic molecules of diffusion pump oil, which were adsorbed on the surface of wafers and exposed to the high energy metastable neon atomic beams. The microstructures on the silicon wafers with the resolution of microns were obtained. |
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| Keywords: | laser physics atomic lithography metastable neon atomic beam inert gas |
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