基于SiC APD的日盲紫外单光子计数读出电路设计与应用

针对宽禁带半导体SiC APD紫外单光子探测器，本文提出了一种1×8线阵型单光子计数读出电路.根据光强条件并通过合适的时序控制，可选取固定门控或互补门控探测方式，实现宽动态范围紫外光子信号的探测计数.读出电路采用TSMC 0.18μm CMOS工艺制备，测试结果表明，读出电路具备单光子探测功能，性能与仿真分析预期结果吻合.最终，借助微动系统二维转台完成对日盲紫外单波长光子的探测与成像，实现对多个独立紫外光源的准确区分与目标定位.

Design and Application of SiC APD Based Single Photon Counting Readout Integrated Circuit for Solar Blind Ultraviolet Detection

Based on the wide bandgap semiconductor SiC APD ultraviolet single photon detector,a 1×8 linear array photon counting readout circuit is proposed in this paper.According to the condition of the light intensity and through suitable timing control,the unitary fixed mode or complementary gating detection mode can be selected to implement the functions of sensing and counting for the wide dynamic range ultraviolet photon signals.The readout integrated circuit is fabricated by TSMC 0.18μm CMOS process,the test results show that the readout circuit is capable of single photon detection,and the performance is in agreement with the expected prediction by the simulation results.Finally,the two-dimensional turntable of the micro-motion system is utilized to complete the solar blind single-wavelength photon detection and imaging,so as to implement accurate discrimination and target localization on the multiple independent ultraviolet light sources.