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| 阵列位相环匀光器 | |
| 引用本文： | 万青松,谢常青,贾佳,潘一鸣,刘明,吴秀龙,陈军宁.阵列位相环匀光器[J].微纳电子技术,2010,47(2). |
| 作者姓名： | 万青松 谢常青 贾佳 潘一鸣 刘明 吴秀龙 陈军宁 |
| 作者单位： | 1. 中国科学院,微电子研究所,纳米加工与新器件集成技术实验室,北京,100029;安徽大学,电子技术与技术学院,合肥,230039 2. 中国科学院,微电子研究所,纳米加工与新器件集成技术实验室,北京,100029 3. 安徽大学,电子技术与技术学院,合肥,230039 |
| 基金项目： | 国家重点基础研究发展计划资助项目(2007CB935302);;国家高技术研究发展计划资助项目(2008AA8040208);;国家自然科学基金资助项目(60825403) |
| 摘 要： | 基于衍射光学中的角谱理论,针对一种分布为同心3环、相位为0.9π,0和0.9π的结构进行深入分析,提出一种10×10的3环2值位相环阵列结构,并与二元光学中的10×10的菲涅尔波带片阵列结构进行比较,应用MATLAB软件仿真632.8nm激光器的高斯光通过二者后的效果。结果表明,阵列3环2值位相环对高斯光的匀光效果要明显优于阵列菲涅尔波带片,该阵列可以对激光束在远场的衍射光场进行修正,能较大地改善高斯光的匀光效果,在光均匀性要求较高的场合具有广泛的应用前景。 |
| 关 键 词： | 光束整形 位相型衍射光学元件 阵列菲涅尔波带片 二元光学 匀光器 |
Device of Energy Uniformity Array Phase Ring |
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| Wan Qingsong,Xie Changqing,Jia Jia,Pan Yiming,Liu Ming,Wu Xiulong,Chen Junning.Device of Energy Uniformity Array Phase Ring[J].Micronanoelectronic Technology,2010,47(2). | |
| Authors: | Wan Qingsong Xie Changqing Jia Jia Pan Yiming Liu Ming Wu Xiulong Chen Junning |
| Affiliation: | 1.Key Lab of Nano-Fabrication and Novel Devices Integrated Technology;Institute of Microelectronics;Chinese Academy of Sciences;Beijing 100029;China;2.School of Electronic Science and Technology;Anhui University;Hefei 230039;China |
| Abstract: | Based on the angular spectrum theory of diffractive optics,the structure with distribution of three concentric rings and the phases of 0.9 π,0 and 0.9 π were analyzed.A 10 × 10 of phase-ring array structure with 3 rings 2 values was proposed.The structure was compared with 10 × 10 of the Fresnel zone plate array structure in binary optics.The results of Gaussian beam of 632.8 nm laser passing through both the arrays were simulated by MATLAB software.The simulation shows that the phase-ring array with 3 rings 2 values has a much better effect on Gaussian beam shaping than the Fresnel zone plate array.The array can correct the laser beam in the far-field diffraction light field and greatly improve the Gaussian shaping effect,and will be used in the field of high light uniformity. |
| Keywords: | beam shaping phase diffractive optical elements array of Fresnel zone plate binary optics device of energy uniformity |
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