| 一种新型的CMOS集成湿度传感器 |
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| 引用本文： | 顾磊,秦明,黄庆安.一种新型的CMOS集成湿度传感器[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 顾磊 秦明 黄庆安 |
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| 作者单位： | 东南大学MEMS教育部重点实验室 江苏南京210096
(顾磊，秦明)，东南大学MEMS教育部重点实验室 江苏南京210096(黄庆安) |
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| 摘 要： | 利用MEMS技术 ,对一种新型CMOS湿度传感器进行理论分析、模拟以及结果讨论。该湿度传感器采用标准CMOS工艺制造 ,采用梳状铝电极结构、梳状多晶硅加热结构 ,衬底接地 ,感湿介质采用聚酰亚胺 ,利用商业软件Coventor进行模拟绘制出敏感电容与相对湿度的曲线图。接口电路采用开关电容电路 ,输出可测电压信号 ,利用Microsim公司的Pspice模拟电路得到相对湿度与输出电压曲线关系
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| 关 键 词： | 湿度传感器 CMOS IC 集成 MEMS |
A novel integrated humidity sensor compatible with CMOS |
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| GU Lei,QIN Ming,HUANG Qing an.A novel integrated humidity sensor compatible with CMOS[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | GU Lei QIN Ming HUANG Qing an |
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| Abstract: | A novel humidity sensor structure based on CMOS IC and MEMS technology is pre sentd . The structure of RH sensor was simulated and the result was discussed. The RH sensor consists of the comb electrode, a comb polysilicon heater while the polyimide is used as moisture sensing material. The substrate is connected with the ground. The curve of the sensing capacitance vs relative humidity is analyzed using the Coventor . The interface circuit, which gives a voltage output, is the switching capacitor circuit. Finally the curve of RH vs the voltage output is simulated by the Pspice of Microsim Corporation. |
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| Keywords: | humidity sensor CMOS IC integrated MEMS |
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