| 硅基波导光开关及开关阵列的研究进展 |
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| 引用本文： | 陈媛媛,吴静珠,余金中.硅基波导光开关及开关阵列的研究进展[J].激光与红外,2008,38(11):1073-1076. |
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| 作者姓名： | 陈媛媛 吴静珠 余金中 |
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| 作者单位： | 1. 北京工商大学信息工程学院,北京,100037
2. 中国科学院半导体研究所集成光电子国家重点实验室,北京,100083 |
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| 摘 要： | 光开关是光网络中实现光交换的核心器件.硅基波导光开关作为一类重要的开关器件,具有体积小、开关速度快、兼容性好等优点.近年来随着硅基波导制作技术的成熟,硅基波导光开关及开关阵列的研究日益受到人们的重视.文章介绍了SOI(silicon-on-insulater)光波导、聚合物光波导和SiO2光波导等三类常见的硅基波导在光开关及开关阵列方面的一些研究进展.
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| 关 键 词： | 光开关 光波导 聚合物 |
Recent Progress in Silicon-based Waveguide Optical Switches and Switch Arrays |
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| CHEN Yuan-yuan,WU Jing-zhu,YU Jin-zhong.Recent Progress in Silicon-based Waveguide Optical Switches and Switch Arrays[J].Laser & Infrared,2008,38(11):1073-1076. |
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| Authors: | CHEN Yuan-yuan WU Jing-zhu YU Jin-zhong |
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| Affiliation: | Information Engineering College,Beijing Technology and Business University,Beijing 100037,China; State Key Laboratory on Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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| Abstract: | Optical switches are key components in optical network to implement optical exchanges.Silicon-based waveguide optical switches are important switch devices because of small bulk,fast switch speed,and good compatibility.Recent years,with the maturation of facture technology of silicon-based waveguides,the research on silicon-based waveguide optical switches and switch arrays has attracted more and more attentions.In this paper,the recent developments in optical switches and switch arrays based on three kinds of silicon-based waveguides,including SOI(silicon-on-insulater),polymer and SiO2,are reviewed. |
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| Keywords: | SOI SiO2 |
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