Microstructure,mechanical, tribological,and oxidizing properties of AlCrSiN/AlCrVN/AlCrNbN multilayer coatings with different modulated thicknesses

Multilayer structure design is one of the most promising methods for improving the comprehensive performance of AlCrN-based hard coatings applied to cutting tools. In this study, four types of AlCrSiN/AlCrVN/AlCrNbN multilayer coatings, with different modulated thicknesses, were deposited to investigate their microstructure, mechanical, tribological, and oxidizing properties. All multilayer coatings exhibited grain growth along the crystallographic plane of (200) with a NaCl-type face-centered cubic (FCC) structure. The results show that, as the modulation thickness decreases from ～35 nm to ～10 nm, (1) the grain refinement effect is increasingly evident; (2) all multilayer coatings show a hardness of >30 GPa and an elastic modulus of >300 GPa. Both the ability to resist elastic strain to failure and the plastic deformation of multilayer coatings increase. In addition, their resistance to cracking reduces; (3) the wear rates of these multilayer coatings reduce successively from 1.78 × 10^?16 m³ N^?1 m^?1 to 7.7 × 10^?17 m³ N^?1 m^?1. This is attributed to an increase in self-lubricating VO_x and a decrease in adhesives from the counterparts; (4) the best high-temperature oxidation resistance was obtained for the multilayer coating with a modulated thickness of ～15 nm.     

毫米波三维异质异构集成技术的进展与应用

三维异质异构集成技术是实现电子信息系统向着微型化、高效能、高整合、低功耗及低成本方向发展的最重要方法,也是决定信息化平台中微电子和微纳系统领域未来发展的一项核心高技术。文章详细介绍了毫米波频段三维异质异构集成技术的优势、近年来的发展趋势以及面临的挑战。利用硅基MEMS 光敏复合薄膜多层布线工艺可实现异质芯片的低损耗互连,同时三维集成高性能封装滤波器、高辐射效率封装天线等无源元件,还能很好地处理布线间的电磁兼容和芯片间的屏蔽问题。最后介绍了一款新型毫米波三维异质异构集成雷达及其在远距离生命体征探测方面的应用。     

积层板的制造方法

概述了积层板的开发背景、制造工艺和最近的开发动向。     

BaxSr（1—x）TiO3多层膜椭偏光谱研究

用溶胶－凝胶技术在Bi(100）衬底上制备了单层和渐变型多层的BaxSr(1-X)TiO3薄膜，其膜层组分分别为：Ba0.7Sr0.3TiO3,Ba0.8Sr0.2TiO,Ba0.9Sr0.1TiO3,BaTiO3，对生长制备出的多层BaxSr(1-X)TiO3薄膜进行了变角度椭偏光谱测量，通过椭偏光谱解谱分析研究，首次得到了BaxSr(1-X)TiO3多层膜结构不同膜层的膜厚和光学常数，其结果显示：椭偏光谱分析得到的不同膜层的膜厚与卢瑟福背向散射测量得到的结果基本相符；渐变型多层膜中BaTiO3薄膜的折射率比单层BaTiO3薄膜折射率大许多，与体BaTiO3的折射率相接近，这说明渐变型多层膜中BaTiO3薄膜的光学性质与体材料的光学性质接近。     

多层薄膜结构气敏效应研究

在SnO2气敏薄膜层上覆盖一层或多层钝化材料（SiO2,Al2O3) 薄膜，制成的多层膜气敏元件，可很好地排除大分子气体如乙醇等对小分子H2检测的干扰，使其具有单独检测H2的功能。本文还通过测量元件的升温曲线，推导出敏感体表面的氧吸附活化能；找出活化能与灵敏度、选择性的关系。根据实验现象和物性分析结果，试着探讨了元件的敏感机理。     

Display reflectance: Basics,measurement, and rating

Abstract— In this paper, methods and instruments for measurement and evaluation of reflection characteristics are reviewed as needed for research and development of electronic displays and for material and surface modeling with ray‐tracing and rendering software packages. Contrast under ambient illumination and recognizability under daylight illumination are prime development targets in the electronic‐display field, while computation and synthesis of realistic scenes and objects are pushing the need for physical data in computer graphics applications. Three categories of instruments are available for detailed reflection analysis. They are based on (1) gonioscopic (mechanical) and conoscopic (optical) directional scanning, (2) imaging approaches, and (3) on arrangements with variable source or receiver aperture. The capabilities, advantages, and limitations of these methods are introduced and discussed in order to facilitate appropriate selection of methods and instruments. For illustration purposes we present typical results obtained from commercial electronic display screens. A basis for continued widespread implementation and standardization of reflection metrology as required for objective rating and comparison of electronic‐display screen performance under ambient illumination is provided.     

Imaging the domain pattern of the canted magnetization state in Co/Pt multilayer films

The exact magnetization pattern of magnetic films close to a spin-reorientation transition is difficult to analyze due to the intrinsically three-dimensional (3d) variation of the orientation of the local magnetization. We present a technique how this can be performed, based on the analysis of high quality 2d polarization maps from a single scanning electron microscope with polarization analysis (SEMPA) measurement with tilted sample. The key tool is the statistical distribution of all occurring polarization doublets, visualized in a 2d histogram plot. From the shape of the distribution the type of transition—canted-phase, or coexisting phases—can be inferred. For the canted-phase state, the canting angle can be accurately determined from geometrical considerations. With help of the histogram the image data can be analyzed and the three components of the magnetization can be calculated for most points of the image. For a Co/Pt multilayer film we found a cone state. The magnetization forms a complex pattern consisting of out-of-plane domains while the in-plane magnetization shows a maze pattern.     

高性能片式多层氧化锌压敏电阻器材料研究

对非Bi系氧化锌压敏电阻材料进行了系统研究。研究结果表明:在ZnO基体材料中,添加适量PbO、Co2O3、Cr2O3、MnO2、ZrO2、TiO2、Sb2O3 、B2O3等非Bi系添加剂,采用传统陶瓷制备工艺和合适烧结工艺,可获得a >50、IL<1 mA、烧结温度低于1 100℃的实用非Bi系氧化锌电阻瓷料。采用该瓷料,利用MLC工艺,选用Pd30/Ag70电极浆料,制作出V1mA<30 V、a >30、IL<1 mA的片式多层压敏电阻器。     

多层介质光学膜系的误差分析——膜层厚度变化的灵敏度因子

文中推导了对于给定膜系的特定膜层的厚度变化的灵敏度因子计算公式，并给出了用计算机对不同膜系的计算实例。分析了厚度灵敏度因子对膜系透射光谱的灵敏谱段、灵敏膜层等特性的影响规律，并由此给出了确定膜层厚度允差的方法。     

片式多层电容电阻复合元件的研制

采用低温共烧陶瓷(LTCC)技术将电容、电阻元件集成在多层陶瓷基板里,构成了一种新型的片式多层复合元件,并研究了其制造工艺性能和频率特性。结果表明,片式多层电容电阻复合元件制造工艺适合批量化生产,并为片式多层LC滤波器、LTCC基板及器件的研发提供了极好的参考价值。