Fabrication and Characterization of Si Nanocrystals Synthesized by Electron Beam Evaporation of Si and SiO2 Mixture

Silicon nanocrystals synthesized by electron beam （e-beam） evaporation of Si and SiO2 mixture are studied. Rutherford backscattering spectrometry of the as-deposited Si-rich silicon dioxide or oxide （SRO） thin film shows that after evaporation, the Si and SiO2 concentration is well kept, indicating that the e-beam evaporation is suitable for evaporating mixtures of Si and SiO2. The SRO thin films are annealed at different temperatures for two hours to synthesize silicon nanoerystals. For the sample annealed at 1050℃, silicon nanoerystals with different sizes and the mean diameter of 4.5 nm are evidently observed by high resolution transmission electron microscopy （HRTEM）. Then the Raman scattering and photoluminescence spectra arising from silicon nanocrystals are further confirmed the above results.     

重离子治癌加速器束诊探测器运动控制系统设计

重离子医疗装置（HIMM）中需要束流诊断探测器来测量加速器束流参数,其中大部分探测器属于拦截式探测器,拦截式探测器在测量束流参数时需要将探测器探头插入束流管道中心,测试完成后将探测器拉出。另外,部分探测器需要联动控制,针对上述需求,设计了基于EtherCAT协议的拦截式探测器的运动控制系统架构,并且开发了基于OPC UA （OLE for Process Control Unified Architecture）协议的客户端/服务器软件系统,所有拦截式探测器已通过CFDA （China Food and Drug Administration）验证,自2017年起在束运行至今。使用结果表明,该系统具有较高的稳定性以及可移植性,控制精度以及控制模式均可完全满足现场应用要求。