优点诸多缺乏推广,LED打印技术仍需普及

2011年11月,LED打印技术领导厂商OKI在北京中关村西区开设了一家官方形象店。消费者可以在这里亲身体验和试用OKI的LED打印机,感受LED打印技术的与众不同。     

Stress control of silicon nitride films deposited by plasma enhanced chemical vapor deposition

Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS.     

爱普生A3+专业照片打印机R3000评测 精彩呈现

爱普生通过R3000让自己的中/大幅面照片打印机进入了9墨盒时代,也许这能提供一种在消费比上较10墨盒更合理的选择。为了成长为摄影达人,摄影发烧友们辛苦学习摄影技巧,忍痛购买高档摄影装备。可是,很多人拍摄了精彩照片,却只能拷贝到电脑上欣赏,或者打印成小尺寸、低像素的照片。既然发烧,不妨再为自己的精彩作品配备一台足够出色的打印机。爱     

行为的道德成本

所有的道德准则都可以归结为单一主题下的各种不同的表述，但归结为一点就是：不要对其他人太恶劣。但没有人或者几乎没有人认为自己会接受道德准则的要求，从而对其他人像对自己一样。如果你过着拥有两个肾脏的正常生活，你就选择了无视那些整日遭受透析之苦而本可利用你捐出来的肾脏的成千上万病人们的苦难。我们当中的某些人会因为这些想法而略感不安，但几乎没有人会感到相当不安而真的采取行动捐献肾脏。     

Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices

Thick SU8 microstructures with high aspect ratio and good side wall quality were fabricated by ultraviolet (UV) lithography, and the processing parameters were comprehensively studied. It proves that the adhesion of SU8 on silicon (Si) substrates is influenced by Si-OH on the surface, and can be improved by the HF treatment. Cracks and delamination are caused by large internal stress during fabrication process, and are significantly influenced by soft bake and post-exposure bake processes. The internal stress is reduced by a low post-exposure bake exposure temperature of 85 °C for 40 min. A three-step soft bake enhances the reflowing of SU8 photoresist, and results in uniform surface and less air bubbles. The vertical side wall is obtained with the optimized exposure dose of 800 mJ/cm2 for the thickness of 160 µm. Using the optimized fabrication process combined with a proper structure design, dense SU8 micro pillars are achieved with the aspect ratio of 10 and the taper angle of 89.86°. Finally, some possible applications of SU8 in micro-electromechanical system (MEMS) device are developed and demonstrated.     

MEMS压电阵列振动能量收集器

近年来,随着微能源的发展,微型压电振动能量收集器得到了广泛关注,但传统d31模式PZT薄膜微型压电振动能量收集器输出电压普遍较低,难以满足应用需求。为提高微型压电振动能量收集器的输出电压,论文提出了共质量块悬臂梁阵列压电振动能量收集器新结构,该结构包含压电悬臂梁单元组成的阵列和一个质量块,悬臂梁阵列共用质量块。采用有限元方法对该结构进行了优化设计,得到压电悬臂梁单元优化尺寸为3 mm×2.4 mm×0.05 mm,硅质量块优化尺寸为8 mm×12.4mm×0.5 mm。设计了MEMS压电阵列振动能量收集器加工工艺流程,加工出原理样件。在1 gn加速度,239.7 Hz谐振频率激励下,测试得到样件输出开路电压有效值为9.16 V;在最优化负载200 kΩ下,负载输出电压有效值为5.51 V,输出功率为151.8μW。