Ni(Pt) 锗硅化合物/Si1-xGex 接触电阻的测试

The electrical properties of Ni0.95Pt0.05-germanosilicide/Si1_xGex contacts on heavily doped p-type strained Sil-xGex layers as a function of composition and doping concentration for a given composition have been investigated. A four-terminal Kelvin-resistor structure has been fabricated by using the conventional com- plementary metal-oxide-semiconductor （CMOS） process to measure contact resistance. The results showed that the contact resistance of the Ni0.95Pt0.05-germanosilicide/Sil-xGex contacts slightly reduced with increasing the Ge fraction. The higher the doping concentration, the lower the contact resistivity. The contact resistance of the samples with doping concentration of 4×10^19 cm^-3 is nearly one order of magnitude lower than that of the sam- ples with doping concentration of 5 × 10^17 cm^-3. In addition, the influence of dopant segregation on the contact resistance for the lower doped samples is larger than that for the higher doped samples.     

太赫兹时域光谱系统光斑大小和位置的测量

本文利用太赫兹时域光谱系统本身的电磁波探测装置具有可测量电磁波的相位、振幅的特点,根据其获得的原始时域光谱信号,设计了一套适用于太赫兹时域光谱系统中太赫兹束光斑大小和位置的测量装置,论述其理论依据.该测量装置不需要辅助电源电路,结构简单、价格低廉、便于携带和制作且测量方法简单实用,为太赫兹时域光谱系统的现场矫正和快速调节提供了一种有效的手段.     

碳纳米管薄膜的制备及其场发射研究

为了克服用Fe（NO3）3、Mg（NO3）2体系催化剂自由生长出的碳纳米管缠绕程度较严重,分布不均匀的缺点,采用丝网印刷催化剂的方法将其印刷在石英、硅和钛三种不同的基底上,结果表明,在石英基底上,用CVD法制备的碳纳米管分布较均匀,有效地克服了团聚现象,并用其作为场发射的阴极进行场发射实验,实验表明,该阴极开启场为2．2V／μm,在电场强度为3．0V／μm下,阳极电流为46．6uA,场发射电流稳定,波动小于5％。该阴极可望应用于场致发射显示器、液晶显示的背光源、照明光源等器件。