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Plasma immersion ion implantation(PⅢ) overcomes the direct exposure limit of traditional beamline ion implantation, and is suitable for the treatment of complex work-piece with large size. PⅢ technology is often used for surface modification of metal, plastics and ceramics. Based on the requirement of surface modification of large size insulating material, a composite full-directional PⅢ device based on RF plasma source and metal plasma source is developed in this paper. This device can not only realize gas ion implantation, but also can realize metal ion implantation, and can also realize gas ion mixing with metal ions injection. This device has two metal plasma sources and each metal source contains three cathodes. Under the condition of keeping the vacuum unchanged, the cathode can be switched freely. The volume of the vacuum chamber is about 0.94 m~3, and maximum vacuum degree is about 5?×?10~(-4) Pa. The density of RF plasma in homogeneous region is about 10~9 cm~(-3), and plasma density in the ion implantation region is about 10~(10) cm~(-3). This device can be used for large-size sample material PⅢ treatment, the maximum size of the sample diameter up to 400 mm. The experimental results show that the plasma discharge in the device is stable and can run for a long time. It is suitable for surface treatment of insulating materials. 相似文献
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基于SIMATIC PCS7,运用CP341模块成功实现了罐区监控系统中Modbus与PCS7的通信. 相似文献
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氟硅酸(H2SiF6)的制备和应用 总被引:1,自引:0,他引:1
对氟硅酸的来源、性质、处理进行描述,介绍了一些氟硅酸值得开发利用的途径,指出氟硅酸回收利用的重要战略意义。 相似文献
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介绍了转炉二级网络控制系统的硬件结构,软件结构以及系统功能,该系统以TCP/IP为主要协议,实现了从现场设备到上层决策的通讯,控制炼钢过程的有效完成。 相似文献
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介绍了三氟化氮的主要性质、用途,对国内外三氟化氮的制备工艺及纯化方法进行了比较,同时对国内外三氟化氮市场进行了分析和预测。 相似文献
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介绍了伊东丰雄的三件建筑作品,并对其作品的建筑思想进行了阐述,对伊东丰雄的三个建筑类型的差异进行了分析,指出临时性、轻盈感、流动性是伊东丰雄建筑给人的最直观的感受。 相似文献
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