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41.
Dong-Soo Yoon Jae Sung Roh Sung-Man Lee Hong Koo Baik 《Journal of Electronic Materials》2003,32(8):890-898
The effect of a thin RuOx layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuOx/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si
contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuOx/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no
formation of a thin RuOx layer at the RuOx surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film
by pre-annealing leads to the formation of a thin RuOx layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity
of diffusion paths. In particular, the RuOx layer in a nonstoichiometric state is changed to the RuO2-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer.
Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the
RuOx/TiN/poly-Si/Si contact system. 相似文献
42.
ABSTRACT: Shellac and wax-based citrus coatings were applied to Fallglo, Robinson, Sunburst, Dancy and Murcott tangerines, Nova and Orlando tangelos, and Temple oranges. Flavor volatiles were measured before and after storage. Concentrations of ethyl acetate, ethyl butyrate, isopentanol and 2-methyl-3-buten-2-ol increased markedly for fruit with shellac-based coatings, and were highly correlated with ethanol content, but at different ratios for the different varieties. The concentration increases were relatively less for fruit coated with the wax-based coatings, and suggest that high-gloss shellac and resin-based coatings are not appropriate for tangerines. 相似文献
43.
This paper presents a model of heterogenous diffusion in capillary porous materials during the process of drying. The governing heat and mass transfer equations have been established using the liquid as well as vapor flow. Two models have been presented. Model 1 does not consider the heat conduction while the model 2 has been established by considering the conduction. The developed models and the numerical solutions of the resulting differential equations can take into account the moisture and temperature dependent thermophysical properties of the product. All equations have been established in spherical coordinates but the programme written for the purpose of calculations can be used for other geometries also. Numerical calculations have been performed for gas concrete and tiles using model 1, while model 2 has been used for gas concrete only because of the lack of data for thermophysical properties of the tile. For gas concrete it was seen that conduction has only marginal effect on the drying process and the numerical predictions of the drying process were reasonably accurate. 相似文献
44.
Two commercial Pt modified aluminide coatings (RT22 and MDC150L) on the same single crystal Ni-based superalloy (CMSX-4) were studied by: scanning electron microscopy; transmission electron microscopy; energy dispersive X-ray spectrometry; and gravimetry. The RT22 coating is an inward grown coating (high activity), while MDC150L is produced by outward growth (low activity). Samples were oxidised in still laboratory air at 1050 °C for various times up to 2000 h. It was found that the outward grown coating produced a slower growing oxide that was more spallation resistant. Several possible reasons for this were identified including: coating purity; coating surface topography; and ductile to brittle transition temperature. The microstructural differences between the two coatings in the as-coated condition were investigated and the development of their microstructure during heat treatment was described. A model for coating growth during heat treatment was proposed. 相似文献
46.
Si衬底上Ta-N/Cu薄膜性能研究 总被引:1,自引:0,他引:1
对Si衬底上Ta-N/Cu薄膜进行了电学和热学分析,结果发现500℃以下薄膜电随几乎不变,600-690℃下的退火引起的电阻率降低是由于Ta-N电阻的热氧化和Cu熔化扩散引起的,而690℃以上的电阻率增加是由于Cu引线传输能力减弱所致,为0.18μm以下的超大规模集成电路中的Cu引线和电阻薄膜的制作提供了有益的借鉴。 相似文献
47.
48.
采用自行开发研制的超音速电弧喷设备,在45钢表面制成了钛铝合金复合涂层。并利用金相显微镜、X射线衍射仪、扫描电镜、电子探针,对涂层的成分、相结构、显微组织及其结合强度、显微硬度进行了研究。结果表明,利用超音速电弧喷涂设备,可以在45钢表面形成 度高、孔隙率低,结合强度较好和硬度高的Ti-Al合金涂层。 相似文献
49.
The kinetics of changes in the bound water content in dietetic sucrose-free sponge cakes (DC) during storage was investigated. The effect of edible films of polymyxan, pectin, xanthan, and carboxymethylcellulose upon this kinetics was also investigated. The quantitative changes in both states of water (slightly bound water and strongly bound water) were registered by combined dynamic analysis (thermogravimetry analysis, TGA, and differential thermal analysis, DTA). The moisture changes in DC crumb were analyzed by drying out to constant mass. The rate constants were determined according the equation q = qoe-kt. The values of rate constants 'k', in day-1, concerning the different edible films were as follows: for crumb moisture is (8.00 ≤ k ≤ 12.47) × 10-3, for bound water is (3.07 ≤ kw ≤ 6.26) × 10-2, for slightly bound water is (4.22 ≤ k1 ≤ 8.49) × 10-2 and for strongly bound water is (2.02 ≤ k2 ≤ 5.62) × 10-2 as compared to 18.53 × 10-3, 7.16 × 10-2, 9.04 × 10-2, and 5.36 × 10-2 in the uncovered DC, respectively. The best water-retaining effect in respect to crumb moisture during storage was ascertained in the use of polymyxan and xanthan films. The lowest rate constant values for bound water and its two states were measured for DC covered with pectin. The relation between the kinetics of both bound water states during storage and ageing of the crumb of DC covered with different edible films and the crumb microstructure was represented. By means of scanning electron microscope was read the smallest change in crumb microstructure of pectin-covered DC on the sixth day of storage. 相似文献
50.
A new method of studying the corrosion inhibition mechanism of rare earth metal(REM) on LC4 Al alloy with the spilt cell technique was studied. The principle and experimental method of the spilt cell technique were analyzed. By measuring the change of net-electric current between the two electrodes caused by the change of the amount of oxygen in the solution and the addition of CeCl3, the influence of corrosive performance of CeCl3 on LC4 super-power aluminum alloy in the 0.1 mol·L−1 NaCl solution was investigated. Meanwhile, the conditional changes of pH values, CeCl3 solution, additire and time of performance were also studied. Finally, the features of electrode surface were revealed by using SEM and X-ray energy-dispersive spectrometry (EDS). By combining these with other electric chemical techniques, such as potential-time curve, polarization curve et al. 相似文献