Implementation of delta—sigma analog‐to‐digital converter in LTPS process

Abstract— An on‐panel delta—sigma analog‐to‐digital converter (ADC) has been implemented and verified for 3‐μm low‐temperature polysilicon (LTPS) technology with two basic blocks: a delta—sigma modulator and a decimation filter. From the experimental results, the digital output from the delta—sigma modulator is correctly matched with the analog input voltage ratio such that the digital output can be converted into 8‐bit digital code successfully under a supply voltage of 10 V from the decimation filter. The implemented on‐panel delta—sigma ADC can be used for the application of temperature‐to‐digital converter on glass substrate.     

高纯多晶硅在线制备技术及发展趋势

对在线高纯多晶硅生产制备技术——改良西门子法和硅烷法的制备工艺进行了概述,比较了两种在线技术的优缺点,对两种在线技术的发展趋势进行了展望。     

Preparation and Tribological Investigation of Rare Earth Nanofilm on Single-Crystal Silicon Substrate

The self-assembled silicon substrate. The resultant contact angle meter and atomic method was introduced to successfully obtain film was characterized by means of X-ray rare earth（RE） nanofilm on a single-crystal photoelectron spectroscopy （XPS）, ellipsometer, force microscopy （AFM）. The scratch experiment was performed for interfacial adhesion measurement of the RE film. The friction and wear behavior of RE nanofilm was examined on a DF-PM reciprocating friction and wear tester. The results indicate the RE nanofilm is of low coefficient of friction （COF） and high wear resistance. These desirable characteristics of RE nanofilm together with its nanometer thickness, strong bonding to the substrate and low surface energy make it a promising choice as a solid lubricant film in micro electromechanical system （MEMS） devices.     

硫化镉纳米膜的电化学制备方法

采用电沉积方法在表面活性剂和电解液的界面制备了硫化镉纳米膜.通过对不同电解液体系和表面活性剂体系中纳米硫化镉膜沉积情况进行比较发现,相同条件下采用硫代乙酰胺体系为电解液,蓖麻油类为表面活性剂可以在液/液界面制备硫化镉纳米膜.考察了表面活性剂种类、电解液浓度和温度及溶液的pH值对制备硫化镉纳米膜的影响,确立了制备纳米膜的最佳工艺条件:氯化镉浓度为4 mmol·L-1,硫代乙酰胺浓度为12 mmol·L-1,槽压5 V,pH值为4.8,蓖麻油/十六醇的用量为0.06 ml·cm-2.实验表明,最佳工艺条件下制备的硫化镉纳米膜晶粒粒径均匀、平均粒径在30 nm左右,近似球形,将在非线性光学材料领域有特殊的应用前景.     

用于器件描述和电路仿真的新型多晶硅TFT直流模型

提出一种新型的多晶硅薄膜晶体管电流-电压物理模型.考虑了陷阱态密度的V形指数分布,运用Lambert W函数推出了表面势的显式求解方法,大大提高了运算效率,在电路仿真中发挥了重要作用.基于指数的陷阱态密度和计算的表面势,描述了亚阈值区和强反型区的漏电流特性.推导了完整、统一的漏电流表达式,包括翘曲效应.在很广的沟道长度范围和工作区内,模型和实验数据一致.     

Seeded growth fabrication of Cu-on-Si electrodes for in situ ATR-SEIRAS applications

A seeded-growth approach has been developed to fabricate a Cu nanoparticle film (simplified hereafter with nanofilm) on Si for electrochemical ATR surface-enhanced infrared absorption spectroscopy (ATR-SEIRAS). The approach comprises an initial activation of the reflecting plane of hemicylindrical Si prism by introducing a Cu seed layer in a CuSO₄-HF solution and the subsequent electroless deposition of the Cu nanofilms from an electroless Cu plating bath. The as-deposited Cu nanofilm exhibited strong SEIRA effect for the CO probe and interfacial free H₂O. ATR-SEIRAS was also applied to characterize the adsorbed geometries of pyridine at the Cu/electrolyte interface. Only vibrational bands assignable to the A₁ symmetry modes were detected in the entire potential window investigated, suggestive of an end-on adsorption via the ring N-atom on a Cu electrode.     

传热过程对多晶硅真空定向凝固过程的凝固界面及热应力的影响

以实验室10 t/a VODS型多晶炉为原型,对其凝固过程的热场、固液界面和热应力进行了瞬态模拟与实验验证。结果表明:在坩埚底部有水冷热交换块的真空定向凝固系统中硅料凝固会产生较大的热应力,增加环形保温结构使热区封闭后可改变炉内换热过程,从而改变硅料凝固情况;硅料在坩埚底部为石墨热交换块的系统中凝固时产生的热应力相对较小,但固液界面的形状会发生较大的改变,影响晶粒的生长。炉膛内径适当变宽有利于炉内热区温度分布更合理,使得硅料凝固时的固液界面更加理想。通过实验验证了多晶硅在坩埚底部无需进行水冷换热情况下进行真空定向凝固能达到冶金法生产太阳能级多晶硅的要求,这为提高冶金法制备太阳能级多晶硅质量、降低系统能耗具有一定的指导意义。     

多晶硅厂循环冷却水系统水质稳定性分析与优化运行

针对多晶硅厂循环冷却水系统水质不稳定造成生产设备事故频发的问题,采用Puckorius指数理论分析水质稳定性,研究了循环冷却水对设备腐蚀结垢的影响,结合现场实际提出可行的水处理指导。经一年运行监测表明水质指标稳定,设备运行情况平稳。     

Study of influencing factors and the mechanism of preparing triazinedithiol polymeric nanofilms on aluminum surfaces

Triazinedithiol polymeric nanofilm was prepared on a pure aluminum surface by electrochemical polymerization of AF17N. The mechanism of the process was proposed and electrochemical polymerization parameters were investigated. The triazinedithiol polymeric nanofilm had notable lubricity, high dielectric property and superhydrophobic property due to the allyl and fluoro alkyl groups in the AF17N monomer. The chemical structure of poly (6-(N-allyl-1,1,2,2-tetrahydroperfluorodecyl)amino-1,3,5-triazine-2,4-dithiol monosodium) nanofilm (PAF17) was investigated by analysis of FT-IR spectra and X-ray photoelectron spectroscopy (XPS). The optimal conditions for the preparation process were based on the data of film weight and thickness. The optimal parameters of monomer concentration, electropolymerization time and temperature were 5 mM, 6 min and 15 °C, respectively. The electropolymerization mechanism was a radical polymerization reaction. It is expected that this technique will be applied in industrial fields for aluminum and aluminum alloy to achieve functional surfaces.     

四氯化硅氢化研究进展

综述了四氯化硅热氢化法、氯氢化法和等离子体氢化法制备三氯氢硅的最新进展,并对这3种技术进行了对比。