Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

Fast locking delay-locked loop using initial delay measurement

A delay-locked loop (DLL) architecture capable of incorporating fast locking and low jitter features simultaneously is reported. A test chip was fabricated in a 0.6 μm CMOS process to prove its functionality. The proposed DLL can align the internal clock to the external reference clock within two cycles and maintain its locking state with the aid of feedback operation     

Diagnosis and correction of multiple logic design errors in digitalcircuits

This paper presents a technique to correct multiple logic design errors in a gate-level netlist. A number of methods have been proposed for correcting single logic design errors. However, the extension of these methods to more than one error is still very limited. We direct our attention to circuits with a low multiplicity of errors. By assuming different error dependency scenarios, multiple errors are corrected by repeatedly applying a single error search and correction algorithm. Experimental results on correcting double-design errors and triple-design errors on ISCAS and MCNC benchmark circuits are included     

Characterization method of thermomechanical parameters for microelectronic materials

Reliability of thermomechanical simulations is critically linked to the accuracy of the mechanical properties that govern the behaviour of structure, like Young's modulus (E) and coefficient of thermal expansion (CTE). For many cases, the values found in literatures are dealing with bulk properties without detailed information on temperature effects. To address such issues, it is necessary to measure the materials parameters as a function of temperature. The measurement of CTE is usually accomplished by evaluating the thermal deflections of a subjected material layer deposited on a substrate, providing that E is known at a specific temperature of experiment. A bilayer method, based on theory of elasticity, is proposed to determine both E and CTE for a given temperature with a good resolution. This paper presents the theoretical analysis, the design and process of the microsystem test structures, and the main calculation results.     

End-User Computing in a CASE Environment

Computer-aided software engineering (CASE) tools are currently being used by IS professionals rather than by users. No matter how effective these tools may be, however, they will not be able to assist in the reduction of application backlogs without supporting user-driven applications. This article examines characteristics of a CASE environment from the various perspectives of decision support, identifies the advantages and limitations of end-user computing in this environment, and suggests how IS managers can realize the potentials of CASE for user applications.     

Evaluation of Monkman-Grant parameters for type 316LN and modified 9Cr-Mo stainless steels

The Monkman-Grant (M-G) and its modified parameters were evaluated for type 316LN and modified 9Cr-Mo stainless steels prepared with minor element variations. Several sets of creep data for the two alloy systems were obtained by constant-load creep tests in 550-650°C temperature range. The M-G parameters,m, m’,C, andC’ were proposed and discussed for the two alloy systems. Them value of the M-G relation was 0.90 in type 316LN steel and 0.84 in modified 9Cr-Mo steel. Them’, value of the modified relation was 0.94 in type 316LN steel and 0.89 in 9Cr-Mo steel. Although creep fracture modes and creep properties between type 316LN and modified 9Cr-Mo steels showed a basic difference, the M-G and its modified relations demonstrated linearity quite well. Them’ of modified relation almost overlapped regardless of the creep testing conditions and chemical variations in the two alloy systems, and the parameterm’ was closer to unity than that of the M-G relation.     

Nondestructive evaluation of the characteristics of degraded materials using backward radiated ultrasound

The frequency dependency of Rayleigh surface wave is investigated indirectly by measuring the angular dependency of the backward radiation of the incident ultrasonic wave in two kinds of degraded specimens by scuffing or corrosion. Then, the frequency dependency is compared with the residual stress distribution or the corrosion-fatigue characteristics for the scuffed or corroded specimens, respectively. The width of the backward radiation profile increases with the increase of the variation in residual stress distribution for the scuffed specimens. In the corroded specimens, the profile width decreases with the increase of the effective aging layer thickness and is inversely proportional to the exponent, m, in the Paris’ law that can predict the crack size increase due to fatigue. The result observed in this study demonstrates high potential of backward radiated ultrasound as a tool for nondestructive evaluation of subsurface gradient of material degradation generated by scuffing or corrosion.     

Use of polymers for cement-based structural materials

Cement-based materials are widely used in the civil infrastructure. Polymers as admixtures can improve the properties, particularly in relation to water absorption reduction, toughness enhancement, vibration damping and increase of the bond strength of cement to reinforcements. Polymeric admixtures include particles, short fibers and organic liquids. Latex in the form of an aqueous particle dispersion is most common. Other than being used as admixtures, polymers are used as partial replacement of fine aggregate, for coating, sealing and repairing concrete and for coating steel reinforcing bars for corrosion protection.     

Solution of a multidimensional inverse radiation problem by means of mode reduction

The Karhunen–Loève Galerkin procedure is employed to solve an inverse radiation problem of determining the time‐varying strength of a heat source, which mimics flames in a furnace, from temperature measurements in three‐dimensional participating media where radiation and conduction occur simultaneously. The inverse radiation problem is solved through the minimization of a performance function, which is expressed by the sum of square residuals between calculated and observed temperature, using a conjugate gradient method. Through the Karhunen–Loève Galerkin procedure, one can represent the system dynamics with a minimum degree of freedom, and consequently the amount of computation required in the solution of the inverse problem is reduced drastically when the present technique is adopted. Copyright © 2004 John Wiley & Sons, Ltd.