共查询到20条相似文献，搜索用时 18 毫秒
1.
为了解决夹持器小型集成化、夹持力可控的问题，本文采用体硅加工技术成功的研制了一种基于单晶硅的、具有微力检测功能的新型四臂式MEMS微夹持器。以压阻检测技术为基础，利用MEMS侧面压阻刻蚀工艺将力传感器集成在微夹持器的夹持臂末端，实现夹持力的微力检测。采用有限元软件对微夹持器机构和传感器弹性体进行分析。S型柔性梁结构的设计将梳齿驱动的直线运动转化为夹持臂末段的转动，结合四臂式的末段结构，有效的扩展了夹持器的夹持范围。利用硅玻璃键合技术实现夹持臂的电隔离，通过施加80V电压，夹持臂的单臂运动范围为25靘，夹持器的夹持范围30-130靘。实验标定出传感器的最大量程在1mN以上，分辨率为3霳，可以实现夹持力的有效反馈。 相似文献
2.
述国外光学冷加工工艺概况 期卫·······································..········,·····,·……(1 .1)综国外大规模集成电路最近发展动向····,········································……(3.1)国外模拟集成电路的现状及趋势································,···············……(3.6)显示器件概述·······················,···············… 相似文献
3.
栏目·题录期·页·综述·自动衡器的几个问题············,····························································································……‘…“··4…1一1电子称重技术的发展动向·························································,·············································… 相似文献
4.
大批量定制—21世纪的主流生产方式·······························································……荣烈润 基于静山汤的抓取器研究······，·······························，··················……马奎董卫军戴辉 智能化网‘洛应用催生网络能源一体化··································································……丁满 … 相似文献
5.
理目作者期第五届全国摩擦学学术会议纪要·················································································……(1)CIMT’%宣传工作研讨会暨机床工具期刊网’92年会会议纪要··············,···························……(l)第三届中国国际机床展览会······························································… 相似文献
6.
题目作者期页中国机械工程学会摩擦学专业学会常务理事扩大会议纪要··········································……2(2)加强润滑管理,提高设备科学管理水平·························································……王世湖2(7)国际摩擦学研究的新动向·················································································… 相似文献
7.
·综述·从几个转子断裂事故看断裂力学方法的可靠性及应注意的问题················……~……(总4)从电站带缺陷转子的安全运行看断裂力学方法的可靠性······················,··········……(总4)声发射技术的基本知识和应用概述····························································……(总5)声发射技术的应用···············································… 相似文献
8.
(l)新产品 1、BZ0213A玻璃钻孔套料机·············································……佛山北江机械厂2、BzM4一312玻璃直线磨边机··········································……佛山北江机械厂 3、BS07玻璃喷砂机············································,············……佛山北江机械厂4、BFM2424双台式玻璃仿形磨边机·······················… 相似文献
9.
栏目与题录期一页·专题报告· 一九九七年第二季度电子计价秤产品质量国家监督抽查情况分析报告··············································……6一l·展望· 静态轨道衡的现状和发展前景探讨·························································································……2一l·综述· 现代称重系统与治金工业自动化························,… 相似文献
10.
第一期空气静压导轨的精度研究································································,·······……庄夔510广Bao一La:08一R二O。系统玻璃的光吸收·······································,··……王青民熔制工艺因素对LaF74‘/.“玻璃光吸收的影响··········································……王青民照相物镜三维像质评价的探讨············… 相似文献
11.
期.页团结起来,争取更大的胜利 ·《人民日报》、((红旗杂志》、《解放军报》一九七二年元旦社论·········……1 .1 〔科研与生产〕我国电子工业在迅速发展···································!····················……”·”·”“’“1·5长江印片机······················································································……1.8同心透镜的多片整盘加工·… 相似文献
12.
国内外液压气动技术现状及发展动向····················,··········································……杨尔庄引进设备中气动元件及系统应用现状和国产化对策研究······……上海市机电工业,理局裸妞小组开发高压柱塞泵及马达为工程机械国产化服务···················································……郭文意 压系统固体污染物的大小及其分布的分析··························… 相似文献
13.
期一页新年献词·······································································4········一10专访专论Speciai Inte川ew&ReportS提高企业核心竞争力的思考··················································……里一11Think onri吕ing enterprise,5 eore eomPetenee机床制造业一位成功者的观点··········································… 相似文献
14.
第期新型强光单色仪·····························································································……陈捷光(1)光学一彩色电视图象处理系统中“密度值”向“色度值”的转换······························……周丰昆(6)热应力对光学玻璃均匀性的影响········································”···················”··… 相似文献
15.
大型高功率固体激光装置对打靶精度有很高的要求，总的打靶精度通常在几十微米。而分配到单个光学元件的稳定性指标只有几微米或者几个微弧度，某些光学元件的稳定性指标甚至小于一微弧。这就对结构的稳定性提出了很高的要求。以一大型激光装置为背景，以关键光机系统为例进行稳定性设计。应用有限元理论对关键光学元件及其支撑结构的稳定性进行分析，以验证光机结构设计的合理性。分析结果表明关键光学元件均满足稳定性设计指标和裕度系数。 相似文献
16.
将投影重建法引入一般连续外凸固体变形分析的探讨················,·······~·…郑国英徐铸(2一1.,可靠性技术.可修复系统的可靠性仿真模型及其应用··············,··1························……阔树林牟致忠(2一7)同时考虑模糊性和随机性时的系统可靠性分析方法·······································……黄洪钟(3一11)机械强度抽样试验中子样容量的确定,···············,················… 相似文献
17.
栏目与题录《衡器》蓝事会第三届全体重事会在黑河召开___________________________________________________________·经营管理·顺应潮流阔步前进·····················一·······················~···············”·····················································一学中山走致富之路··················,···············,························… 相似文献
18.
专题综述龙门起重机(与运载桥)的一般概况和设计中的一些问题·············…··……1一30电动机调速方法的选择〔日〕····“······“·”····················“···············……1一82电动葫芦的技术发展、结构与应用〔西德〕·“·························……,·……2一1新系列电动葫芦〔日〕“·····“···”·······“········”···············”·············……2一16欧洲撤运设备联合会… 相似文献
19.
广 .可靠性技术.结构安全概率方法评述············································································..……吕衰宙冯元生(4一1)扁平绕带容器基于爆破失效准则的可靠性设计····································……郑津洋朱国辉黄载生(4一6) .振动.裂纹对管道动态特性的影响···············································……韩祖南任文教李德徐张… 相似文献
20.
新型仪器仪裹宽波段多功能自动光谱辐射计的研制分段等电位屏蔽感应分压器······……水平螺旋管行星式逆流层析仪的研究误差分析与洲试技术圆周回转角位移传递机构及误差·······························································……155用动态法测定精密电阻由于帕尔蒂效应引起的交直流误差······························……162用强迫恢复法测量原子核自旋晶格弛豫时间T:········,···············… 相似文献
|
