SPM技术在碳纤维结构研究上的应用

简单介绍了系列扫描探针显微镜（SPM）的性能、原理及其应用,重点综述了SPM尤其是扫描隧道显微镜（STM）和原子力显微镜（AFM）在碳纤维结构研究领域中的应用。     

中国科学院物理研究所/日本岛津制作所原子力显微镜实验室成立

日本岛津制作所从1986年开始与东京大学合作研制扫描隧道显微镜（STM），1991年研制出AIS－gOO型超高真空STM，1993年又研制出具有独创性的WET－gcf型可控气氛STM。为了满足分析各种各样样品的要求，1994年研制出WET－9400型可控气氛原子力显微镜（AFM）。1995年继而研制出大气中通用的，小型的SPM－950O型原子力显微镜（AFM）。岛津制作所为了促进中国有关科研机关、高等院校、生产部门，特别是在凝聚态物理、表面物理、表面化学、材料科学、生物学、生物工程、医学、电子学等领域内开展原子力显微镜的应用，在中国科学院有关…     

原子力显微镜发展近况及其应用

扫描隧道显微镜(简称STM)和原子力显微镜(简称AFM),它们也可统称为扫描探针显微镜(简称SPM)。原子力显微镜(AFM) 是近十几年来表面成像技术中最重要的进展之一。与扫描电子显微镜相比,它具有较高的分辨率。本文将讨论原子力显微镜的工作原理、原子力显微镜的发展概况和应用。     

扫描探针显微镜的研究

介绍了扫描探针显微镜的起源及其发展过程，同时对扫描探针显微镜中最常用的两种：STM、AFM作了原理和结构介绍，最后介绍了SPM探针的形状及其性能数据。     

纳米绝缘材料的STM检测机理及其应用研究

分析了纳米绝缘材料薄层在适当的偏压电场下STM检测的机理,用自行研制的STM.IPC-205B型扫描隧道显微镜实现了对部分绝缘纳米材料微观形貌的检测,得到了理想的图像.拓展了STM检测加工技术的应用领域,进一步发挥了STM在材料结构和性能研究方面精度高、稳定性强等优势.     

动态电场诱导氧化实现纳米结构的加工

利用原子力显微镜 (AFM )进行表面的局部氧化加工是进行纳米结构加工的一种很有前途的方法。它具有广泛的应用范围 ,可以进行功能性纳米电子器件和纳米机械结构的加工。实验采用了动态电场作用下的AFM诱导氧化的方法 ,提高了氧化物的生长速度 ,并且改善了氧化结构的纵横比 ,能够更好地控制生成氧化物的结构和电属性。     

基于SPM的纳米加工技术研究

扫描探针显微镜（SPM）纳米加工技术是当前非常活跃的纳米加工研究领域,其研究成果有可能成为微纳米器件制作的主要方法。论文主要介绍了单原子操纵、阳极氧化法,以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展动向。     

眼见为实──扫描探针显微镜(SPM)开发记实

扫描探针显微镜（SPM）是用于观察各种样品，例如金属，陶瓷，薄膜，有机质，高分子材料，活的机体等的表面。与普通显微镜比较，其突出的特点是在大气条件下很容易进行高放大倍数的观察，对大多数样品的观察不需要做前处理，以及可以观察到粗糙表面的三维图象。工作原理是根据使用显微探针（悬臂）在样品表面上扫描时，检测极微小的力及距离的变化，以及观察样品表面的形态。岛津制作所提供的标准型号SPM．9500是在本公司广泛而深厚的精密测量，分析方法，以及图象处理技术的基础上开发的。同样，各种图象分析包括在有效地利用视窗（WI…     

高速高精度SPM研究现状及发展趋势

如何实现高速高精度的扫描探针显微镜（SPM）扫描已经成为国际上研究的一个热点问题,扫描器动态响应性能的好坏、控制算法的优化以及电子学系统的设计等,都将影响SPM的扫描速度和精度。本文介绍了SPM在半导体工业检测和生物检测等应用中的不足,归纳了国际上对高速SPM研究的主要研究成果,分析了各个研究方法的特点和不足,对实现高速SPM扫描的主要问题进行了概括总结。     

扫描隧道显微镜在电化学研究中的改进及应用

扫描隧道显微镜 (STM )在电化学领域有广泛应用。但由于STM是通过感应非常微弱的隧穿电流来反映表面状况 ,而隧穿效应是在一定条件下才能发生的量子效应 ,所以在实际应用中受到不少限制。针对STM在电化学研究中的局限性 ,国内外作了许多改进 ,出现了一些新的装置 ,如电化学扫描隧道显微镜、电化学原子力显微镜、扫描电化学显微镜等。本文介绍STM在电化学研究中的改进及其应用 ,并就发展趋势作简短讨论     

STM和AFM的研制

叙述ＳＴＭ（扫描隧道显微镜）和ＡＦＭ（原子力显微镜）的主要关键技术和研制情况。在研制的ＳＴＭ和ＡＦＭ样机上，对１２００１／ｍｍ光栅进行测量，得出本样机的测量重复性可达１０％以内。对研制的样机进行分析和对比后提出：ＳＴＭ和ＡＦＭ，尤其是ＡＦＭ，技术上已趋于成熟；使用上简单、方便，已达到实用化程度，可以作为高级表面粗糙度测量的常用计量仪器。     

MEMS-based fast scanning probe microscopes

Scanning probe microscopy is a frequently used nanometer-scale surface investigation technique. Unfortunately, its applicability is limited by the relatively low image acquisition speed, typically seconds to minutes per image. Higher imaging speeds are desirable for rapid inspection of samples and for the study of a range of dynamic surface processes, such as catalysis and crystal growth. We have designed a new high-speed scanning probe microscope (SPM) based on micro-electro mechanical systems (MEMS). MEMS are small, typically micrometer size devices that can be designed to perform the scanning motion required in an SPM system. These devices can be optimized to have high resonance frequencies (up to the MHz range) and have very low mass (10⁻¹¹ kg). Therefore, MEMS can perform fast scanning motion without exciting resonances in the mechanical loop of the SPM, and hence scan the surface without causing the image distortion from which conventional piezo scanners suffer. We have designed a MEMS z-scanner which we have integrated in commercial AFM (atomic force microscope) and STM (scanning tunneling microscope) setups. We show the first successful AFM experiments.     

Miniature active damping stage for scanning probe applications in ultra high vacuum

Scanning probe microscope (SPM) experiments demand a low vibration level to minimize the external influence on the measured signal. We present a miniature six-degree of freedom active damping stage based on a Gough-Stewart platform (hexapod) which is positioned in ultra high vacuum as close to the SPM as possible. In this way, vibrations originating from the experimental setup can be effectively reduced providing a quiet environment for the SPM. In addition, the hexapod provides a rigid reference point, which facilitates wiring as well as sample transfer. We outline the main working principle and show that for scanning tunneling microscopy (STM) measurements of a Si(111) 7 × 7 surface, the hexapod significantly improves the stability and quality of the topographic images.     

扫描隧道显微镜微位移工作台的 神经网络PID控制方法研究

提出了一种基于神经网络理论的微位移工作台控制方案。该工作台以压电陶瓷作为微位移驱动元件,对伺服电机大位移进行位移补偿。分析了压电陶瓷微位移驱动器的原理,建立了工作台的数学模型。神经网络PID控制器对工作台进行闭环控制,利用BP网络的自学习和自适应能力,实时调整网络加权值,改变PID控制器的控制系数,减小工作台的位移误差。采用专用的压电陶瓷驱动电源对工作台的位移进行了实验,相对于常规PID控制器,微位移为11.41 μm时的响应时间从1.5 s缩短到1 s,稳态位移误差从3.13％减小到1.05％,工作台的稳定性和定位精度得以提高,改善了扫描隧道显微镜的工作性能。     

开放式多功能扫描探针显微镜系统

开放式多功能扫描探针显微镜、集成扫描隧道显微镜、原子力显微镜、横向力显微镜和静电力显微镜．具有接触、半接触和非接触工作模式，可进行作用力、电流、电位、光能量等参数的高度局域综合测量,具有极高的开放性和可扩展性，支持用户进行二次开发。     

Scanning probe microscopy studies of cereal seed storage protein structures

Scanning probe microscopes (SPMs) share a number of common features which give the techniques advantages over conventional light and electron microscopy. First, high resolution, up to the atomic level, is possible in certain cases, and second, they are nondestructive, requiring no staining or coating and the images can be obtained in the hydrated state or under water. Scanning probe microscopes, particularly scanning tunnelling microscopes (STM) and atomic force microscopes (AFM), have been used to study food-related systems, ranging from relatively large structures such as starch granules to the organisation of secondary structures in proteins and the interaction of proteins. The seed storage proteins (gluten) of wheat are responsible for the viscous and elastic properties of wheat doughs that allow them to be used for a wide range of different food products. Using AFM and STM, images of individual and groups of proteins have been obtained in both the dry and hydrated states. The ability to work in liquid environments allows the conformation of proteins to be determined under conditions approaching “native.” The AFM and STM have been used to image both gliadins and glutenins and to study their aggregative behaviour in relation to gluten and dough systems.     

纳米切削实验研究

实现纳米科学技术的一个重要课题是纳米加技术的开发和应用,分析讨论目前广泛用于纳米测试中的扫描探针显微技术手段后,探讨直接内米切削的可能性和方法,并进行了实验研究。结果表明,开发的纳米切割方法毁可作为材料加工过程的研究手段,又具有很好的实实应用前景。     

High-pressure scanning tunneling microscopy: tip reactions

Scanning tunneling microscopy (STM) is an ideal tool to image conducting and semiconducting surfaces with atomic resolution. The technique provides high-resolution images in vacuum or even high-pressure environments. Since STM can be operated at elevated pressures and temperatures, images can be collected in situ under catalytic conditions. In this work, we demonstrate that artifacts can be observed when imaging in situ since reactions can occur on the tip, and care should be taken when analyzing the data obtained.     

Iterative image-based modeling and control for higher scanning probe microscope performance

In this article, we develop an image-based approach to model and control the dynamics of scanning probe microscopes (SPMs) during high-speed operations. SPMs are key enabling tools in the experimental investigation and manipulation of nano- and subnanoscale phenomena; however, the speed at which the SPM probe can be positioned over the sample surface is limited due to adverse dynamic effects. It is noted that SPM speed can be increased using model-based control techniques. Modeling the SPM dynamics is, however, challenging because currently available sensing methods do not measure the SPM tip directly. Additionally, the resolution of currently available sensing methods is limited by noise at higher bandwidth. Our main contribution is an iterative image-based modeling method which overcomes these modeling difficulties (caused by sensing limitations). The method is applied to model an experimental scanning tunneling microscope (STM) system and to achieve high-speed imaging. Specifically, we model the STM up to a frequency of 2000 Hz (corresponds to approximately 23 of the resonance frequency of our system) and achieve approximately 1.2% error in 1 nm square images at that same frequency.