洁净室流场数值模拟的研究进展

对洁净室的应用和发展进行了回顾，分析了洁净室的流场，介绍了数值模拟方面常用的几种模型及国内外在洁净室模拟方面取得的成果，列举了常用的CFD软件，分析了国内研究所存在的问题。     

从建设角度淡洁净室发展和设计

该文简述了洁净室的基本概念，现代洁净室国内外发展动态以及从建筑角度淡洁净室的平，剖面设计，洁净室材料选用和主要构造。     

从建筑角度谈洁净室发展和设计

该文简述了洁净室的基本概念，现代洁净室国内外发展动态以及从建筑角度谈洁净室的平、剖面设计、洁净室材料选用和主要构造。     

矢流洁净室的模型实验与数值模拟

针对矢流洁净室这种新型、节能的洁净室，本文用数值摸拟和模型实验两种方法对其进行了研究．模型实验实测了空态和静态两种工况下模型矢流洁净室室内流场和浓度场，给出了流场图和浓度场实测结果；数值模拟方法，根据ｋ─ε紊流模型，采用有限差分法，对两种工况下矢流洁净室室内流场和污染物的分布进行了计算机求解，得出室内流场图及污染物分布特性．通过对两种方法所得结果进行分析和比较，证明了矢沈洁净室净化的基本原理，得出矢流洁净空室内流场特点有利于其达到较高级别洁净度，且浓度场实测结果证明该种洁净空可以达到较高级别的洁净度。建议某些场合推广使用矢流洁净室。     

生物洁净室的设计特点

从微粒的去除机理，值班系统设计，消毒灭菌系统设计着手介绍生物洁净室的设计特点，简述各行业生物洁净室的设计要求，强调生物洁净室防止交叉污染的重要性。     

洁净室施工中的GMP验证要点

药企生产需要GHP验证的洁净室。文章站在工程施工的角度，以浙江仙琚制药股份有限公司固体制剂／注射剂车间GMP洁净室建设工程为例，按照洁净室室内装饰、空调净化系统安装施工的设计、制作、安装工序，介绍了GHP洁净室施工管理与技术。     

浅谈洁净厂房建设的施工要点

介绍了洁净厂房的概念、分类、工作原理及送风方式，对洁净室施工的三个阶段进行了分析说明，并阐述了洁净室具体施工要点和施工质量控制要点，从而完善洁净厂房的施工工艺，为同类工程积累经验。     

电子洁净室气态化学污染环境控制规范分析

针对气态化学污染控制,回顾了电子洁净室环境控制规范的发展历史和主要内容。从污染物分类、洁净等级划分等方面对比了不同国家及不同组织规范的异同,对现行规范进行了对比总结,分析了电子洁净室环境控制规范的特点、发展趋势及存在的不足。对比了电子洁净室环境控制规范与住宅空气质量规范及大气环境规范,总结了洁净室环境控制的特殊性,并对中国洁净室环境控制规范的修订提出了建议。     

百级洁净室通风设备选型探讨

简要介绍了百级洁净室通风设备选型的方法，结合工程实例证明了采用低压风机来满足百级空调洁净室的风量循环要求同时控制噪声的可行性，以供百级洁净室通风设备选型时参考。     

无尘华夫板施工工艺

洁净室亦称为无尘室,洁净室的空调送排风系统,是空气经过滤器进入室内,由洁净室的高架地板或两侧隔墙回风,将人、机器等发生的尘埃迅速排出室外,使室内洁净度、温湿度及静电等控制在洁净室级别需求的范围内。     

Improved control of the pressure in a cleanroom environment

In order to protect cleanrooms from contamination from adjacent less clean spaces, the cleanroom must be built air tight and maintain an (over) pressure of sufficient magnitude and deviation. For this magnitude there are guidelines. However, there is a lack of guidelines for the required deviation of the pressure. As a result, an unstable pressure could result in an undefined air direction and increase the risk of contamination. This unstable pressure occurs especially during entering the cleanroom with an air tight cleanroom. In this paper the pressure and the entrance of the cleanroom are modeled in the SimuLink modeling environment. The model is verified and validated. The main problem addressed here is that the air tightness and the deviation of the pressure are in conflict with each other. It is concluded that the new proposed adjustment decreases the deviation of the pressure in the cleanroom and enhances the precision of control.     

Analyses of smoke management models in TFT-LCD cleanroom

This study evaluated the effectiveness and performance of smoke management models in a TFT-LCD cleanroom. Several smoke management models are discussed in a distinct 3-level cleanroom compartment. The tools used included a fire dynamics simulator (FDS) and SIMULEX. The design fires were 3 MW and 5.4 MW in ultra fast fire, respectively. In life safety, both a downward smoke exhaust system and upward smoke exhaust system, incorporating a decrease of filter fan unit air supply rate, could be used in a cleanroom, according to the simulation results of performance-based design. For occupant evacuation, the SIMULEX results showed a total evacuation time less than smoke layer descending time, which descended to 1.8 m height from floor to smoke layer in all FDS simulations. In view of property protection, insurance companies generally require significantly higher standards of property protection. For 3 MW or more heat release rate, smoke was hardly controlled by any smoke exhaust system in the cleanroom without sprinklers.     

Characterization of minienvironments in a cleanroom: Assessing energy performance and its implications

Filtered fans in cleanrooms can demand up to 400 W or more electric power per square meter of floor area to rapidly supply, recirculate, and exhaust air. “Minienvironments” that control particle concentrations within enclosures may not only maintain a level of stringent cleanliness, but also offer opportunities in energy savings and reducing operation costs through integration with adjacent cleanrooms. In order to better understand the total performance of minienvironments in operation, this paper characterizes energy performance of five different minienvironments (designated as ISO-Cleanliness-Class-3) that were in operation and were housed in a traditional, larger ISO-Cleanliness-Class-4 cleanroom used in the microelectronic industry. The measured parameters in the field investigation included electric power demand, airflows, in addition to physical characteristics and cleanliness performance of the minienvironments. In this paper, measured energy performance and associated metrics are compared to those of cleanrooms of various cleanliness classes. This paper develops new understanding of energy performance of minienvironments and quantifies the magnitudes of potential energy savings that could result from integrating minienvironments in traditional cleanrooms while achieving effective contamination control. Based upon this study, achieving energy savings by a magnitude of up to 60–86% was possible in the cleanroom facility housing the minienvironments. The paper also suggests means of increasing energy savings in minienvironments applications, including optimal design and operation, and space management in clean spaces.     

Experimental study on airflow characteristics and temperature distribution in non-unidirectional cleanrooms for electronic industry

A non-unidirectional airflow cleanroom in electronic industries is prone to be challenged by the wide spread of hot air and contaminants dissipated from process tools to surrounding area, resulting from the collision of the uprising hot air current from the tools and the downward cold air from ceilings. To effectively remove the dissipated heat and maintain the required cleanliness level, we proposed an innovative fan dry coil unit (FDCU) return air system (referring to  and ), consisting of ceiling-supply grilles and ceiling-return fans/coils, and demonstrated that the FDCU-return air system can effectively eliminate sub-micron particles from the cleanroom, compared with a conventional ceiling-supply and wall-return air system [1]. This study further investigated the effect of the heat dissipation from the tools on airflow characteristics and temperature distribution in the FDCU-return and wall-return airflow type cleanrooms. Comparisons of velocity vector, turbulence intensity, and temperature distribution between the FDCU-return air system and the conventional wall-return air system were presented. The results showed that the FDCU-return air system can significantly provide better air motion characteristics and temperature distribution in a high heat source case in comparison with the wall-return air system.     

静电净化装置在医院洁净空调系统中的应用

医院室内的空气净化是预防感染的重要措施之一,但目前常用的空气净化方案皆存在一些弊端。静电净化装置能够有效地除尘除菌,本文对其进行了实验测试,测试结果表明：所使用的静电净化装置能够达到高中效过滤器的除尘效率;在一定风量下对空气中浮游菌的除去率能够达到90％以上;在通风量很小的情况下,静电净化装置运行行时送风口处的臭氧浓度有可能超标：并且本文设计了静电净化装置在医院洁净空调系统中的一个应用方案一存新方案中将静电净化装置加装在空调系统的通风管道中,并对过滤器进行重新配置。通过理论的分析说明所设计的厅案能够有更好的空气净化效果,并且能减少系统运行费用,是一种较为合理的空气处理方案。     

软围挡洁净区的单向流三要素研究

全面净化和局部净化方式并用是当前净化行业降低造价和运行费用的有效途径。本文首先介绍了软围挡洁净区的设计及结构特性,然后通过实验分析了它的三个特性指标,即:流线平行度、乱流度和下限风速。结果表明该装置完全符合单向流洁净室的指标要求。最后指出了它的应用价值和广阔的市场前景。     

Approaches for improving airflow uniformity in unidirectional flow cleanrooms

Airflow behavior inside a cleanroom with vertical unidirectional flow has been investigated. The design parameters, such as porosity and height of raised floor, width of cleanroom and inlet velocity profile, which affect the uniformity of air velocity distribution inside the cleanroom have been studied computationally. The Reynolds-averaged Navier–Stokes equations governing the flow are solved using a finite-volume code STAR-CD. The standard k-ε turbulence model has been used. Approaches for improving airflow uniformity have been proposed and quantitatively examined based on intensive case studies. The present results show that the uniformity increases along with the height of raised floor. Alternatively, better airflow uniformity can also be achieved through a proper allocation of floor porosity or by controlling the distribution of inlet velocity profile. Suggestions on how to design unidirectional cleanrooms with desired airflow uniformity under practical constraints have been given.     

洁净室气密性检测方法研究——国标《洁净室施工及验收规范》编制组研讨系列课题之八

分析了在正、负压洁净室进行洁净室气密性验证的重要性,对洁净室气密性相关问题进行了理论计算,给出了具体检测方法,并进行了实验研究.结果表明,一个密封很好的洁净室,500 Pa压力的半衰期不足5 min,小时泄漏率不到10%.     

气幕洁净室流场的有限单元法数值模拟

运用计算流体力学的有限单元法对气幕洁净室内的三维流场进行数值模拟,并对模拟结果进行分析和比较,以期揭示气幕洁净室真正的流动机理;最后给出了一些设计参数。     

大温差送风技术在高精度恒温空调中的应用可行性

为了研究空调大温差送风技术在高精度、多扰量恒温空调中应用的可行性,采用CFD数值模拟分析了恒温室不同送风温差下温度场和速度场的均匀性,研究了恒温室在不同送风温差下不同扰量作用时的温度动态响应特性。结果表明,空调送风大温差下的温度场和速度场以及温度稳定性能满足恒温室要求。